Bearing Type: Ball Bearing, Mounting: Basic Style, Bore Size: 25mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 100mm, Rear Plate: With Rear Plate, Lock Operation: E [Spring Locking (Exhaust)], Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Bearing Type: Ball Bearing, Mounting: Basic Style, Bore Size: 25mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 400mm, Rear Plate: With Rear Plate, Lock Operation: E [Spring Locking (Exhaust)], Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Bearing Type: Ball Bearing, Mounting: Basic Style, Bore Size: 25mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 150mm, Rear Plate: With Rear Plate, Lock Operation: E [Spring Locking (Exhaust)], Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Bearing Type: Ball Bearing, Mounting: Basic Style, Bore Size: 25mm, Port Thread Type: M5X0.8: 20, 25; Rc: 32, 40, Stroke: 125mm, Rear Plate: With Rear Plate, Lock Operation: E [Spring Locking (Exhaust)], Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.2 to 1.0, Specification: Built-in magnet, Port thread type: M5 × 0.8, Auto Switches: Without auto switch

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.2 to 1.0, Specification: Built-in magnet, Port thread type: M5 × 0.8, Auto Switches: Without auto switch

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 500, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.2 to 1.0, Specification: Built-in magnet, Port thread type: M5 × 0.8, Auto Switches: Without auto switch

AC Servo Motor Driver (SSCNET /H Type)

Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Load to motor inertia moment ratio PB06 7 7 Function selection E-3 PE41 0 0 LEFS25(L,R)T6 LEFS32(L,R)T7 LEFS40(L,R)T8 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

VZS

Applicable manifold base Plug-in type With attachment plug lead wire: Type 51G Description Component parts Manifold block u, Junction box i, Lead wire assembly o Tie-rod y, O-ring e, r, Seal A q VVZS2000-1A-1-Port size (1) Manifold block assembly Manifold block u, Tie-rod y, O ring e, r, Seal A q Non plug-in type: Type 51 VVZS2000-1A-2-Port size (1) Plug-in type With D-sub connector: Type

33

To circulating fluid return port e r Part no. Applicable model HRS-BP001 HRSE012-A-(-T) HRSE018-A-(-T) HRSE024-A-(-T) To circulating fluid outlet q r Parts List No.

ZQ

Suction filter ZF With L type plug connector ZP Vacuum pressure switch PE P EXH ZCU AMJ S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8

NCY2 series

2 E 1 0 E E _ E 5 E E c r l 0 1 2 3 4 5 6 7 I I 101112131415 Distance from cylinder axis: Lo (cm) Example The required load, Fo =100(N) and the moment arm, L0 = Bcm refering to Data 1, draw a vertical line from the 8cm value of the horizontal axis.

MY1

1 u t q w e y !2 i r #3 !4 !0 !9 !8 !5 !

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

2 E 1 0 E E _ E 5 E E c r l 0 1 2 3 4 5 6 7 I I 101112131415 Distance from cylinder axis: Lo (cm) Example The required load, Fo =100(N) and the moment arm, L0 = Bcm refering to Data 1, draw a vertical line from the 8cm value of the horizontal axis.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Shock absorber Port variations R L R L Tighten the four unit fixing bolts equally to secure the unit body. R R R R L L L L R L R L L R Slide table operating direction 8-14-26

MY1

(except for 50) MY1MW16, 20, 50, 63 MY1CW16, 20, 50, 63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25, 32, 40 MY1CW25, 32, 40 L L This port is not available for use. (except for 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 39 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

MHL2

7 Hard anodized Finger Electroless nickel plated Aluminum alloy Cold rolled steel Rod seal cover B e !8 Piston rod Nitrided Stainless steel Stainless steel Washer r Rack Stainless steel Oil containing polyacetal with back metal !

3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

VQ4000

(Refer to pages 2-5-40 to 2-5-43.) 26.4 48.7 3(R2) 5(R1) Rc 3/8 SUP port 54.5 P1 Po 1(P) 25 13.5 Po Circuit diagram Plug-in type Plug lead type SUP/EXH block plate VVQ4000-16A 11.8 When different pressures, high and low, are supplied to manifold, a SUP block plate is inserted between the stations under different pressures. 21.8 R P R R P R R P R SUP/EXH passage blocked EXH passage blocked

MHL2

7 Stainless steel Stainless steel Piston rod Washer Nitriding e !8 Sainless steel Rack r Oil containing polyacetal with back metal Bearing !