Plug-in Unit

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 2-2-46 Base Mounted Series VQC Plug-in Unit VV5QC41 3(R) port 2-Rc 3/4 Flat ribbon cable connector assembly (26P) 1(P) port 2-Rc 1/2 AXT100-FC26-3: 5 m AXT100-FC26-2: 3 m AXT100-FC26-1: 1.5 m VQC SMC SMC SMC SMC

CEx-OMQ0011

P1 No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 59 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Vacuum Unit

is available in units of 1 piece.)

Table of Contents

Note 1) Note 2) 2-4-19 20 S VQ1000 Kit (Serial transmission unit) The serial transmission system reduces wiring work, while minimizing wiring and saving space.

LEC-OM036xx

ID=1) I_Address bit 7 6 5 4 3 2 1 0 18 Abnormal station Connect station 19 Sending Sending completed [ID=9 to 12] (ex.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Bore size [mm] Stroke range [mm] A B d11 D1 D EE PL RT L12 KK SW G BG L8 VD VA WA WB WH ZZ ZY E R L2 L9 H SL 32 Up to 500 22 30 12.2 12 G 1/8 13 M6 x 1 6 M10 x 1.25 10 28.9 16 94 4 4 4 7 26 146 190 47 32.5 15 4 48 8 40 Up to 500 24 35 14.2 16 G 1/4 14 M6 x 1 6.5 M12 x 1.25 13 32.6 16 105 4 4 5 8.9 30 163 213 54 38 17 4 54 8 50 Up to 600 32 40 19 20 G 1/4 14 M8 x 1.25 8 M16 x 1.5 17 32 16

KP/KPQ/KPG

-02 KPGT06-M5 KPGT06-01 KPGT06-02 KPGT08-01 KPGT08-02 KPGT10-02 KPGT10-03 KPGT12-03 KPGT12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 38 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 D1 4 4 4 18 10.4 20.7 10 D1 8 A L2 6 10 10 19.5 12.8 22.8 D2 H Connection threads 10 (R) 8 26 18 15.2 21.5 26.3 12

High-Precision Digital Pressure Switch

B (Horizontal mounting) u Option 3 Symbol Operation manual*1 Calibration certificate*1 Nil Y K T NPT1/8 N01 NPT1/8 Piping adapter ZS-46-N2 *1 All texts are in both English and Japanese.

Stopper Cylinder

25 52 8 10 53 5 41 4 40 5.5 9 depth 7 1/8 1/8 1/8 24.5 24 44 28 9 15 50 107 54 25 64 8 10 53 7 50 4 50 6.6 11 depth 8 1/8 1/8 1/8 24.5 24 56 28 9 19 B + stroke R R * Refer to pages 572 and 573 for the auto switch proper mounting position and mounting height. * For the single acting type, a One-touch fitting is on the rod end only. * The position of the width across flats (K) is arbitrary

90

(+) (+) () 24 23 22 21 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 Release valve COM. 13 25 12 24 11 23 10 22 9 21 8 20 7 19 6 18 5 17 4 16 3 15 2 14 1 Release valve Supply valve Supply valve 26 25 1 2 stations Release valve 2 stations Release valve 14 Supply valve Supply valve 24 23 2 3 stations Release valve 3 stations 15 Release valve 22 21 3 Supply valve Supply valve 16 4 stations

Magnetically Coupled Rodless Cylinder

79 93 LD 4.3 5.6 5.6 7 7 WP 16 19 21.5 27 32 Z 94 107 117 130 148 M 5 5 6 7 8 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 N 6 7 6.5 8.5 11 PW 32 38 43 54 64 Q 84 95 105 116 134 QW 18 17 20 26 34 T 19 20.5 21.5 24 26 TC 17 20 22.5 28 33 P (Piping port) Model Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3R15 CY3R20 CY3R25 CY3R32

ITV

thread 1.6 12 (99) (11) SMC PREGULATOR E ITV2090 Rc 1/4 VAC port OUT 2 G VAC (Vacuum pressure) ATM OUT (Set pressure) (Atmospheric pressure) 19 36 Flat bracket P3020114 (Option) 2-Rc 1/4 ATM port, OUT port 4-M5 x 0.8 thread depth 6 mm through Mounting hole OUT 2 G 15 19 R3.5 25 7 36 45 2.3 (10) 30 L-bracket INI-398-0-6 (Option) 2-Rc 1/4 ATM port, OUT port (7) 36 14-8-32 33 Accessory (Option

Thermo-chiller

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

SI unit ( device)

Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM00201 1.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

79 93 LD 4.3 5.6 5.6 7 7 WP 16 19 21.5 27 32 Z 94 107 117 130 148 M 5 5 6 7 8 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 N 6 7 6.5 8.5 11 PW 32 38 43 54 64 Q 84 95 105 116 134 QW 18 17 20 26 34 T 19 20.5 21.5 24 26 TC 17 20 22.5 28 33 P (Piping port) Model Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3R15 CY3R20 CY3R25 CY3R32

AIR COMBINATION

Model AC10*-A AC20*-B AC25*-B AC30*-B AC40*-B AC40*-06-B AC50*-B AC55*-B AC60*-B Port size M50.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 Gauge port size Note 1) 1/16 1/8 Fluid Air Ambient and fluid -5 to 60 (Should be no freezing) temperature Note 2) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Set pressure range 0.05 to 0.7 MPa 0.05 to 0.85 MPa Filtration / Air filter 5

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold

Dedicated Controller

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

1 @1 !8 !5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !