ITV

Temperature characteristics 0 to 50C (With no condensation) Operating temperature range IP65 equivalent Enclosure Connection type Built-in One-touch fittings z, x, c: 4 Metric size For single unit z, x, c: 5/32" Inch size Connection size z, c: 6, x: 4 Metric size Manifold z, c: 1/4", x: 5/32" Inch size (1) Weight 100 g or less (without options) Note 1) Indicates the weight of a single unit

CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Digital Gap Checker

ISO1179-1 Piping type C (4 One-touch fitting) C (6 One-touch fitting) F (G thread) H 13 13.6 19 18 ISA3 Series Dimensions ZS-31-B (Cable with connector) 2 38.5 5000 3 15 4 1 Connector pin no.

80

A B C D E F G H J 1.6 M5 2.3 3.2 For other special options, refer to page 462.

Title not found

r^rE_aEIl_I ItrtrElEll+trMElr cG1 C D G l T T series i I .2: 3. .4, i.5. .6-l '?

CJ5-S

Applicable bore size (mm) D B1 C d H1 Part no.

CJ5-S

Applicable bore size (mm) D B1 C d H1 Part no.

CM2

Dd9 t m L d Part no. l Trunnion Nut CD-S02 CD-S03 0.040 0.076 8 0.9 1.6 19.5 24.5 7.6 Type C 8 for axis Material: Carbon steel 0.040 0.076 10 1.15 1.35 29 34 9.6 Type C 10 for axis Applicable bore size (mm) 20 25, 32 40 D C B d H Part no.

NAAMS Standards Compliant

: Machined A B A C B 6H6 through +0.008 0 D C E 6H6 through +0.008 0 D F 200.03 10 E G F 200.03 10 G 300.025 300.025 9 through H 300.025 300.025 I 250.05 9 through J H 250.05 I 45 M6 x 1.0 R45 500.05 M6 x 1.0 750.05 6.5 18 R25 10 3 10 1 1 6.5 R6 R25 19 18 19 R25 19 [mm] R6 19 [mm] Model NAAMS code A B C D E F G H I Weight [kg] CKZ-50A022 ACA246M 80.0 65.0 50.0 90.0 56.0 0.5 CKZ-50A023 ACA247M

CQS

No option Rubber bumper Rod end male thread C M Rubber bumper (Standard equipment for long stroke model) C Rubber bumper & Rod end male thread CM * "C" and "M" can be combined.

VCW

C 1.5 B D L E 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D E F G H J L Port size Bracket part no.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K

Title not found

1/4 G 3'l8 G 3/8 'ln case or mixed speciricatio.

CNS

4-J Width across flats KA 2-Rc P Cylinder port G G Rc BP Unlocking port GL GR GB 4-FD FA MM Q D EA FY BF RY E V FT VA AL A K F BN N N RT M C B FX FZ H S + Stroke ZZ + Stroke Bore size (mm) Stroke range (mm) FD FX A AL B BF BN BP BQ C D E EA F FA FT FY FZ G GA 125 140 160 16 Up to 1400 50 47 145 145 205 1/2 3/8 115 36 90 63 35 14 19 14 190 100 230 155 16 Up to 1400 50 47 161 160 245 1/2 3/

MVGQ

RS H A RZQ Rc 1/8 P port MI W S CEP1 CE1 CE2 Rc 1/8 R port C + Stroke B + Stroke A + Stroke ML2B C J G5-S MVGQM, MVGQL Common Dimensions CV Applicable solenoid valve B C DA F G H J K L MM ML NN PW Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) MVGQ 40 124 38 M8 x 1.25 20 M8 x 1.25 27 30 106 48 122 10 110 M8 x 1.25 11 17 25 90 26 54 44 16 8 51 CC 25, 50, 75, 100, Series VZ5000 50

Direct Solenoid

|y-4"C. compbla wllh coll. 120i80 240t60 JEOAO aola{)g 401A.r0 NXTO1012 12 C&llYe ac|.w i lock l|.lh.r XTOlG2i 't3 thock pd NXTO1010 ta NXrOl t3 DIRECTIOI{AL AIR VALVE DIMENSIONS/PARTS LIST SERIES NVS 3115,3125 NVS 3135, 3145 NVS 3135 NVS 3145 DIMENSIONS Valve Slzs A B c D E F G H J K M N P NVS 3135 5.98 (152) 2.56 (65) 2.01 (s1) 0.75 (19) 0.35 (s) 1.38 (35) 1.77 {45) 2.56 (65) 2.52 (64)

3

A G i 2 x P Port size G A 2 x P Port size b B Conduit DIN terminal D F Q S Cable 6 to 12 G1/2 F Q 280 D G1/2 45 (42) (44) 31.5 Built-in full-wave rectifier type R C C R E J J E 2 x M depth 5 H 2 x M depth 5 B B1 H G A G A B B1 2 x P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting

Free Mount Cylinder

(g) Stroke (mm) Model 15 10 5 C(D)U6-S,T C(D)U10-S,T C(D)U16-S,T C(D)U20-S,T C(D)U25-S,T C(D)U32-S,T 28(38) 25(35) 22(27) 48(58) 40(50) 36(41) 71(101) 56(86) 50(75) 133(170) 106(143) 95(128) 235(294) 193(252) 176(230) 347(425) 286(364) 262(335) For the weight of auto switch, refer to page 68 to 72.