VHK

B L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 Q L2 M1 Model 1(P)2(A) 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 11 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-M5-06F VHKl-M5-04F 18 41 16.5 3.5 3.4 1.2 21 51 11 23 53 13 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-01S-06F VHKl-01S-04F 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 1 8 8 VHKl-01S-08F 62.2

Pneumatic Transfer System Series MF

Applicable cylinder D G F H L I C E J K M N Part No.

0.5

Supply power again 1: NPN/PNP open collector output 23 Fan Type Ionizer IZF10/IZF10R Series Wiring/IZF10 IZF21/31 IZF10/IZF10R Technical Data Number stamped on connector Pin no. Signal name Description 1 +24 VDC Power supply connection to operate this product. 2 0 V 1 2 3 4 3 F . G.

HRS100/150

min] Circulating fluid specific heat C : 1.0 x 103 [cal/(kgfC)] Circulating fluid outlet temperature T1 : 20 [C] Circulating fluid return temperature T2 : 23 [C] Circulating fluid temperature difference iT : 3 [C] (= T2 T1) Conversion factor: hours to minutes : 60 [min/h] Conversion factor: kcal/h to kW : 860 [(cal/h)/W] * Refer to page 119 for the typical physical property value of tap

Rubber seal 5 Port Solenoid Valve Series SYJ7000

: SYJ7120(-F) G H C6, N7 C8, N9 P R2 R1 28.3 1.6 18 27.2 1.6 (PE port) 1/8 (P, R1, R2 port) B A 17 One-touch fitting (A, B port) (4.9) 36 Applicable tubing O.D.: 6, 1/4" : 8, 5/16" (3.6) L plug connector (L): SYJ7120-L-01 (-F) M plug connector (M): SYJ7120-M-01 (-F) M8 connector (W0): SYJ7120-W0-01 (-F) DIN terminal (D): SYJ7120-D-01 (-F) Approx. 300 (Lead wire length) Applicable cable O.D

RLQ

Bore size (mm) 32, 40 50, 63 T2 T1 M F E D B Part No.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

M8 connector Cable length For connector cable of M8 connector, refer to page 90. 1 2 3 4 7 300 mm 500 mm 1000 mm 2000 mm 5000 mm 4 Series SYJ3000 2 Position Single [ ]: AC G H G H Grommet (G), (H): SYJ3120-M3 With bracket: SYJ3120-M3-F G: Approx. 300 H: Approx. 600 (Lead wire length) 54.4 [56.6] 28.4 32.2 22 2-3.5 (For mounting) 3.2 7.1 13.2 16.4 10 + 8.2 A B 4 19.3 7 11.5 Manual override

One-touch Fittings

29.9 23 48.3 17 57.4 45.4 9 27.6 3/8 KQ2Y12-03GS 17 18.5 18.2 17 23 30.8 23 48.8 17 57.4 45.4 9 28.2 1/2 KQ2Y12-04GS 22 18.5 18.2 17 23 34.8 23 51.5 17 57.4 45.4 9 50.7 X X Y 16 3/8 KQ2Y16-03GS 22 23.8 23.6 21 28.6 35.4 28.6 58.9 20.6 81 60 11 48.3 1/2 KQ2Y16-04GS 22 23.8 23.6 21 28.6 34.1 28.6 56.3 20.6 113 60 13 52 Applicable tubing O.D.: 4, 6 1: D1 is maximum diameter. 2: Reference

Digital Gap Checker

Function number Function name Default setting Page F 0 (Unit) Unit selection [ PA] kPa Page 49 ISA3-F: [ 20] ISA3-G: [ 50] ISA3-H: [ 50] Switch point ISA3-F: [ 3] ISA3-G: [ 20] ISA3-H: [ 20] F 1 (oUt1) OUT1 setting Page 50 Hysteresis Display colour [ SoG] Green when ON, Orange when OFF out2: [ Ewin] Output mode OUT port side pressure detection Window comparator mode Reversed output 2ot:

Compact Vacuum Ejector Series ZQ

Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE

ZQ

ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP

VCC

VCKK1209-02F VCKK1008-02F VCKK1075-02F VCKK0806-02F VCKK0604-02F Symbol F G H J K Part no.

70pvvna

H (Conduit terminal: T) VXA I (DIN terminal: D) VN Main port Rc A H I J K L M R B F G N S C P T D Q U E Model LVC VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 52 2.3 42 26 25 28 4.5 34 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 24.3 55 LVA 60.5 73 1 80 90 84 100 92 108 62 72 2.3 2.3 50 60 31 36 30 35 35 40 5.5 6.5 43 49 17.5 20 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

AS-FPQ/AS-FPG

However, note that only the AS221FPQ uses steel. 713 AS-FPQ/FPG Series Dimensions H (Hexagon width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type Applicable tubing O.D. d H (Hexagon width across flats) A L4 D1 L3 D2 M1 L1 T L2 Model Weight (g) (3) Tubing O.D. d T H D1 D2 L1 L2 L3 (4) M1 L4 (1) (4) Max. Min. Max. 1 2 Min.

AS-FPQ/AS-FPG

However, note that only the AS221FPQ uses steel. 713 AS-FPQ/FPG Series Dimensions H (Hexagon width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type Applicable tubing O.D. d H (Hexagon width across flats) A L4 D1 L3 D2 M1 L1 T L2 Model Weight (g) (3) Tubing O.D. d T H D1 D2 L1 L2 L3 (4) M1 L4 (1) (4) Max. Min. Max. 1 2 Min.

HRX-OM-W069

(C or F). Read the circulating fluid discharge temperature which is displayed on the touch panel.

PF-OMN0009_C

D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J K L N P PF3W504 3/8 70 50 30 45.6 40.6 15.2 24 14 35 26 18 13.6 2.7 14 PF3W520 3/8 1/2 78 54 30 45.6 40.6 15.2 27 18 39 30 18 13.6 2.7 12 PF3W540 1/2 3/4 98 71 38 53.6 48.6 19.2 32 28 49 35 28 16.8 2.7 12 PF3W511 3/41 124 92 46 62.6 57.6 23 41 42 63 48 28 18 3.5 14 S T U V W WX Y Z PF3W504 24 22 32 40

0.4

unit S kit P kit F kit L kit !

Refrigerated Air Dryer

F N G 4 6 3 NPT Single phase 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) 10 Note) Hexagonal nipple (R threads) is included as an accessory for the thread symbol F.