Lightweight and Compact

G1, Symbol N: NPT1) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Pump capacity HEA IDH Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Brass, Bronze, PTFE, FKM, EPDM, PVC, NBR, POM, PE, PP, Carbon, Ceramic Temperature range C 5 to 40 Pressure range MPa 0.3 to 0.5 Required flow 50/60 Hz L/min 25/25 Facility water pressure differential MPa 0.3 or more Facility

Adsorption Plate

Adsorption surface size SP1330 SP1430 SP1530 SP1630 150 x 150 180 210 20 150 82.5 97.5 120 16 200 x 200 230 260 20 200 107.5 122.5 145 25 250 x 250 280 310 25 250 132.5 147.5 170 36 300 x 300 330 360 25 300 157.5 172.5 195 49 754 SP Series Adsorption Plate Square/SP230 SP SP A D ZCUK Rc 1/8 (Suction port) C AMJ AFJ AMV ZH -X185 B D F Related Products G E 4 x 5.5 drill Element fixing nut N

VCA

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 VX3 L VXA K 2-M Thread depth 6 2-M Thread depth 6 K VN LVC LVA LVH DIN terminal: D Conduit terminal: T LVD F F (Q) Q S 34 LVQ D LQ LVN U 25 R C 44 TI/ TIL C R G1/2 PA E E G1/2 PAX B B 2-P Port size A A D 2-P Port

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 3 Direct Operated 2 Port for Air Series VCA Dimensions Grommet: G Conduit: C Approx. 300 Approx. 280 Q F D Q F D G1/2 C R C R L IN E E Manual override A B B A 2-P Port size 2-P Port size Manual override 2 L K 2-M Thread depth 6 2-M Thread depth 6 K DIN connector: D Conduit terminal: T F F (Q) Q S 34

MHY2/MHW2

(F: Thrust of one finger) Pressure 0.6MPa 0.5 40 8 0.5 Holding force (N) Holding force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Holding point L (mm) 40 0 30 40 60 70 Holding point L (mm) 50 80 F F F F MHY2-16D MHY2-25D 35 100 Pressure 0.6MPa Pressure 0.6MPa 30 0.5 0.5 80 25 External hold Holding force (N) Holding force (N) 0.4 0.4 60 20 0.3 0.3 15 40 0.2 0.2 10 20

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O-<f), P-30:Q; July 1995, 25(RP) Specifications subject to change without notice. Printed in Singapore

HRX-OM-X037

(This is a wiring example.) 13 25 14 1 D sub 25 female pin (socket) type Note: Prepare a cable tie. Fasten the signal cable to the mount on the base with the cable tie. Mount for cable tie 1 Pin No.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Special tool F Special tool part number list Applicable bore size (mm) 6, 10, 15, 20 25, 32, 40 50 63 Part no. CYRZ-V CYRZ-W CYRZ-X CYRZ-Y 12REA Warning 1. Do not disassemble the product because it may damage the air cushion mechanism.

Flow Control Equipment

Applicable cylinder bore (mm) 4 6 8 10 12 Construction M5 X 0.8 6, 10, 16, 20 AS12l1-M5 1 8 R(PT) 20, 25, 32 AS22l1-01 1 4 R(PT) 20, 25, 32, 40 AS22l1-02 3 8 R(PT) 40, 50, 63 AS32l1-03 1 2 R(PT) 63, 80, 100 AS42l1-04 Note 1) : Nickel plated model is standard. How to Order F S K 1 0 03 06 3 2 AS Sealant Option Speed controller None Component Parts Hexagonal lock nut Nickel plated K N No.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS121FG-M5-23 AS121FG-U10/32-01 9.6 7 22.2 12.7 17.3 25.8 12.3 28.6 22.1 3.2 M5 x 0.8 25 8 8.4 1/8" 8.4 12.3 17.3 22.1 12.7 AS121FG-M5-04 AS121FG-U10/32-03 12.7 17.3 12.3 22.1 4 9.3 5/32" 9.3 10-32 UNF 22.2 9.6 8 7 M5 x 0.8 22.2 28.6 25.8 28.6 25 25.8 8 25 7 9.6 AS121FG-M5-06 AS121FG-U10/32-05 21.3 26.1 13.5 18.1 11.7 22.9 6 11.6 3/16" 11.4 16.5 11.7 AS221FG-01-23 AS121FG-U10/32-07 14.2 18.3

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75

Compact Cylinder with Air Cushion and Lock Series RLQ

Extension locking Retraction locking Retraction locking Variations Bore size (mm) Standard stroke (mm) Locking direction Mounting Series 20 25 30 40 50 75 100 LOCK 32 Extension lock Through hole LOCK 40 RLQ LOCK 50 Retraction lock Both ends tapped 63 Compact Cylinder with Air Cushion and Lock Series RLQ 32, 40, 50, 63 How to Order B 32 50 M F RLQ B 32 50 M F F9BW RDLQ With auto switch Number

3 Port Air Operated Valve

Applicable manifold base model VP300-25-1A VV3PA3 Blanking plate assembly (With a gasket and two mounting bolts) VP700-25-1A VV3PA7 VP500-25-1A VV3PA5 1569 VPA300/500/700 Series How to Order Valve (With a gasket and two mounting bolts) VPA 3 4 4 1 A Type of actuation A B N.C. (Normally closed) N.O.

AR Series Modular Type Regulator

A : Max. 3.5 AR20-A to AR25-A : Max. 4 AR30-A to AR40-06-A : Max. 8 Model Standard specifications Optional specifications Round type pressure Round type pressure gauge gauge (with color zone) Bracket mount Panel mount P1 P2 A B C D F J H J H J M N Q R S T U V W Y Z AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18 18.5 AR20-A 1/8, 1/4 1/8 40 67.4 23.5 22

4/5 Port Air Operated Valve Series SYJA3000 1

) Body ported 5 port base mounted (with sub-plate) 4 Port base mounted (For manifold) Note 1) 2 position 0.36 0.12 0.46 0.35 0.12 0.46 0.33 0.12 0.47 0.31 0.12 0.47 SYJA340-M5 M3 x 0.5 M5 x 0.8 0.39 0.10 0.59 [0.40] 0.43 [0.33] 0.16 [0.11] 0.36 54 (28) 3 position 0.42 [0.33] 0.16 [0.080] 0.46 0.32 0.11 0.58 [0.32] 22 25 2 position SYJA320-M3 M3 x 0.5 M3 x 0.5 0.9 28 3 position 22 25 2 position

3

.S. (15 to 35C) 5% F .S. (0 to 50C) 2% F .S.

EXxx-OMY0006CN

F_Source/Destination_Address (F-Address) F-Source F-destination F-Address F-Address F_WD_Time F_WD_Time PROFIsafe ms F_SIL SIL F_iPar_CRC i-Prameters F_Par_CRC F-Parameters CRCF-Parameters F-CPU Failsafe controller, safe controller F_Destination_Address F-Parameter (F-Parameter) F-I/O device Failsafe I/O I/O 100 No.EX##-OMY0006CN F-Slave Failsafe slave F_Source_Address F-Parameter

PSxx-OMT0001CN

(oUt2) OUT2 52 EPL[ 25] kPa EPH[ 50] kPa EH [ 5] kPa rES[ 1000] F 6( FSt) [ 0.0] 0.0 55 F10( SUb) [ LEvEL] 56 F80( dSP) OFF [ on] () 57 F81( Pin) [ oFF] 58 F90( ALL) [ oFF] 59 F98(tESt) [normAL] 60 F99( ini) [ oFF] 61 -48No.PS-OMT0001CN-E 4 [F 0] M [F0] [Unit][] kPa Bar PSI -49No.PS-OMT0001CN-E 4 [F 1]OUT1 (P_1)(H_1) ISA3-F ON OFF ISA3-G ON OFF ISA3-H

reduces flow setting time

Speed Controller with Indicator AS-FS Series RoHS Numerical indication of knob rotation for flow rate AS-F AS-F Universal reduces flow setting time and setting errors! reduces flow setting time and setting errors!

CJP

M15 x 1.5 4 10 20 23.5 17 15 27 30.5 24 5 14.5 19 11.5 15 19 4.5 M22 x 1.5 5 10 20.5 25 17.5 15 27 31.5 24 Note) E and F should be machined in a concentric manner.