IDX-OM-W020

(2.8C) (17 m 3/h) (25 m 3/h) (43 m 3/h) (70 m 3/h) (100 m 3/h) (120 m 3/h) 11 SCFM 16 SCFM 26 SCFM 43 SCFM 62 SCFM 80 SCFM 45 F (7.2C) (19 m 3/h) (27 m 3/h) (45 m 3/h) (74 m 3/h) (106 m 3/h) (136 m 3/h) 17 SCFM 28 SCFM 45 SCFM 65 SCFM 86 SCFM 12 SCFM 50 F (10C) (20 m 3/h) (28 m 3/h) (47 m 3/h) (77 m 3/h) (110 m 3/h) (147 m 3/h) 100psig (0.7MPa) 100 F (37.8C) 100 F (37.8C) 115V 60Hz

Rotary Table/

200 (Example) Clamp F: Pressing force (N) l Static torque calculation Ts = F x l (Nm) Shaft center Note) Effective torque values are representative values and not to be considered as guaranteed values.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

16 16 0.2 0.05 0.1 0.2 0.1 0.05 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

CE2

In order to actuate multiple cylinders at once, use a pressure regulator that can handle a large air flow volume and also consider installing a surge tank. 20Data 10-12-47 5 Stroke Reading Cylinder with Brake Series CE2 40, 50, 63, 80, 100 How to Order CE2 40 100 B Y7BW Mounting style Number of auto switches B L F G C D T Basic style Foot style Rod side flange style Head side flange style

VCC

VCKK1209-02F VCKK1008-02F VCKK1075-02F VCKK0806-02F VCKK0604-02F Symbol F G H J K Part no.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

FC Mounting hole B 0 0.3 A F NA FT NB FX FZ H S + Stroke F Z + Stroke Refer to page 8 for details of the mounting nut.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

Angle Seat Valve /

VXB215C F(H).

REFRIGERATION AIR DRYERS, AIR COOLING SYSTEM, Series PDE

48.2 50.0 factor 1.00 1.02 1.05 1.07 1.10 1.12 1.15 1.18 * The DewPoint refers to an ambient temperature of +100F with inlet air at 100 psig and +100 F.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

For DC 5 6 V S R 24V DC 12V DC 6V DC 5V DC 3V DC Bracket : Without bracket F: With bracket For AC (50/60Hz) 3 port 1 2 3 4 100V AC 200V AC 110V AC [115V AC] 220V AC [230V AC] Actuation bracket Normally closed Normally open 1 2 (For manifold type 20, 20R) Bracket is supplied not mounted.

Possible to transfer a workpiece at low-speed.

The rotation angle can be adjusted between 0 and 100. The rotation angle can be adjusted between 0 and 100.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

= F x L M3 = F x L M1 = F x L Note) Deflection: Displacement of point A when force acts on point F Point A: Indicates a measurement point CYV15 (M1) CYV15 (M2) CYV15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYV32 (M1) CYV32 (

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Made to Order (Refer to page 725 for details.) 724 AS-FM Series Speed Controller for Low Speed Operation with One-touch Fitting In-line Type How to Order 200 1 F M 06 AS Lock nut option AS-F Nil J Hexagon lock nut Round lock nut TMH Body size M5 standard 1/8 standard 1/4 standard ASD Made to Order Refer to the below for details. 100 200 205 AS Applicable tubing O.D.

HRX-OM-X071

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

VM

Inch size 1/4" 1/8" 5/32" Flow rate (l/min(ANR)) 170 100 120 150 IN OUT Effective area (mm2) 2.6 1.5 1.8 2.3 IN P1 Note) Flow rate is the value measured under a pressure of 0.5 MPa and a temperature of 20C.

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

Arm length Shim Clamping position Bore Size: 25 Arm length: 100 mm 157 [700] Peak clamping force position 135 [600] Clamping force lbf [N] 112 [500] 90 [400] 116 psi [0.8 MPa] 67 [300] 0.5 MPa 73 psi [0.5 MPa] 45 [200] 22.5 [100] 0.3 MPa 44 psi [0.3 MPa] 0 0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 Shim thickness [mm] Bore Size: 32 Arm length: 100 mm 157 [700] 135 [600] Clamping force lbf [N] 0.5 MPa

Vacuum Pad

Note) ;in the table indicates the pad material "N, S, U, F, GN, GS." Note) ;in the table indicates the pad material "N, S, U, F, GN, GS." Note) ;in the table indicates the pad material "N, S, U, F, GN, GS."

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Rated pressure range Rated pressure range Rated pressure range Rated pressure range Rated pressure range 100 kPa to 100 kPa 0 to 500 kPa 0 to 1 MPa 0 to 2 MPa 0 to 5 MPa 0 to 10 MPa 101 kPa to 0 100 kPa to 100 kPa 0 to 100 kPa 0 to 1 MPa 101 kPa to 0 100 kPa to 100 kPa 0 to 1 MPa 0 to 2 kPa 101 kPa to 0 100 kPa to 100 kPa 0 to 500 kPa 0 to 1 MPa C O N T E N T S How to Order p. 7 Internal

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motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

Nil S n Mounting Bore size B A L F G D Through-hole (Standard) Both ends tapped Foot Front flange Rear flange Double clevis 32 40 50 63 80 100 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Mounting brackets are not mounted and are supplied loose at the time of shipment.