Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VZS VFS VS4 VQ7 EVS Large capacity EVS7-6 (Size 1) 1200 l/min (ANR) EVS7-8 (Size 2) 3000 l/min (ANR) EVS7-10 (Size 3) 5500 l/min (ANR) VFN Cylinder driving size Flow rate 100 160 200 Rubber seal, single type Lightweight Size 1 (3 position): 0.55 kg Size

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Note) Refer to Variations in the table below for valve type combinations.

MHK2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS MHC MHT MHY MHW MRHQ Misc.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(Value in the initial state) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Caution For Safety Instructions and Solenoid Valve Precautions, refer to pages 5-11-2 to 5-11-6.

ZPT/ZPX

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

0 to 240 Angle adjustable (3) 0 to 230 Note 3) Adjustment range in the table is for 270.

CRB2/CRBU2/CRB1

180 +4 0 90 +4 0 0 to 175 Mounting Basic type only 0 to 85 Variations Basic type, with auto switch The maximum adjustment angle of the angle adjuster for size 10 and 40 is 230. 2.

CUJ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RQ MU D-X 20Data 7-2-1 2 Series CUJ 4, 6, 8, 10 Mini-free Mount Cylinder Miniature Body Free mount design allows installation from four directions. Concentrates wiring and piping on one side Short pitch mounting is possible.

Vacuum Equipment

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com For the vacuum release valve, select a 2-3 port valve with a low vacuum specification. Also, use a needle valve to regulate the release flow rate.

Pneumatic Purification

/1/60 1 NPT 174 R134a 21.3 26.4 25 3.1 10.2 126 PDE40-S 137 5.1 6.5 1 1/4 230/1/60 1 1/4 NPT 174 R134a 23.2 32.3 31.7 3.5 11.4 168 PDE50-S 168 6.3 8.2 1 1/2 230/1/60 1 1/2 NPT 174 R134a 23.2 32.3 31.7 3.5 11.4 207 PDE60-S 200 7.2 10.4 1 3/4 230/1/60 2 NPT 174 R134a 23.2 32.3 31.7 3.5 11.4 227 PDE75-S 235 7.5 10.7 1 3/4 230/1/60 2 NPT 174 R134a 23.2 32.3 31.7 3.5 11.4 232 PDE100-S 310 8.2

LC6D/LC6C

Limit switch abnormality 4 314 11 Series LC6D/LC6C Options Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Caution Do not repeatedly apply bending stress or tension to the cables.

VXD21/22/23

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN LVC LVA LVH N.O. LVD Variations LVQ Valve Electrical entry LQ OUT Grommet Conduit DIN terminal Conduit terminal LVN Normally closed (N.C.) IN TI/ TIL OUT Normally open (N.O.)

ZMA

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ MRQ D20PAT.

CJP

Without rod end thread Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Width across flats) Auto switch Mounting nut (Refer to page 6-2-13.)

ISE70/75/75H

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Functions Error function Display calibration function Take the following corrective solutions when error occurs.

ZSE40/ISE40

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4. Selection of response time 5. Setting Auto/Manual SET SET SET Press the SET button. Press the SET button. Press the SET button to complete the setting.

VXF

'/# 05 10 . &) VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 Two-time Hitting Function Dimensions VXA 78 78 # VN 9 78 LVC !=!. Operation sequence diagram !

VXP21/22/23

VX Electrical entry G C D T Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Grommet Conduit DIN terminal Conduit terminal VX3 Valve/Body 0 Normally closed/Single unit VXA Refer to the table (2) given below for availability.

ZQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY Conventional ZX ZQ ZQ ZF ZP ZCU AMJ Misc.