HRX-OM-R016

, or flammable gas (the product is not flame-proof) Location where the ambient temperature is out of the following range: In transportation and In storage 0 to 50C (with no water or circulating fluid in piping) In operation 5 to 40C Location where the ambient humidity is out of the following range or where condensation occurs: In transportation and storage 15 to 85% In operation 30 to 70%

VEX1

Proof pressure Max. operating pressure Set press. range Air operated Solenoid Ambient and fluid temperature Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 P A R mm2 02 01 02 03 04 04 06 10 10 12 14 20 02 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 590 2 1 300 17 25 1.4 16 0.9 25 1.4 60 3.3 70 3.9 330 18 36 2.0 Cv 16 0.9 130 7.2 160 8.9 180 10

Air-hydro Unit

CCT40 M32 x 2 50 Lube-plug Rc 1/4 Air port size Rc 1/4 Oil port size DL Dimension (Effective oil level stroke) (mm) -X Effective oil level stroke (mm) 50 100 150 200 300 Technical Data L 213.5 263.5 313.5 363.5 463.5 1171 Valve Unit CCVS/CCVL Series How to Order CCV S 1 1 1 U1 Valve unit size CE-compliant S L Small flow Large flow Nil Q CE-compliant (Refer to Table 1.)

NAAMS Standards Compliant

Clamping block Fulcrum L Bore size: 50 Bore size: 63 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 Allowable load mass [kg] Allowable load mass [kg] 15 15 105 30 30, 45, 60 105 90 120 120 75 90 45, 60 75 Arm opening angle: 135 Arm opening angle: 135 Distance to the center of gravity [mm] Distance to the center of gravity [mm] Bore

Table of Contents

VQ1000 (VV5Q17)-Plug Lead Unit, Cassette Type (F, P, T, S kit) . 3 3 4 9 10 10 11 12 12 14 16 18 20 22 28 30 32 32 33 34 34 35 36 61 62 64 65 67 68 70 36 37 38 38 40 44 48 52 56 74 74 75 76 76 78 80 82 84 86 89 92 94 96 97 100 104 104 106 108 110 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-

Turntable Cylinder Series MGT

, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 52 52 72 50 54 47 38 42 35 128 128 148 28 28 48 110 140 166 142 180 210 28 25.5

Brake mechanism added

16 ) Note 2) 95 + 40 (n 4) 2 100 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 15 + 40 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8, 12, 16 ) Note 2) 2 (Different surfaces, Same surface) 1 65 70 75 10 60 D-M9AV (n 2) 2 60 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 65 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 70 + 30 (n 4) 2 75 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 10 + 30 n (n = 2, 4, 6, 8 )

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

(ANR)] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure 80 60 Suction flow 40 Air consumption 20 0 0 20 40 60 80 Suction flow [L/min(ANR)] Supply pressure [MPa] ZHP-15 ZHP-15 (Supply pressure: 0.35 MPa) 100 100 90 80 70 60 50 40 30 20 10 0 150 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] 135 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure 80 120 105 Air consumption

HRX-OM-O021

Table 3-1 Amount of radiation and required ventilation Required ventilation amount m3/min Differential temp. of 3 oC Heat Differential temp. of 6 oC Radiated between inside and Model between inside and outside kW outside of installation of installation area area HRS050-A-20 Approx.10 140 70 The water-refrigerated thermo-cooler discharges heat by using facility water.

VQ4000

KG 72309-0114-70-15, etc.

Soft Start-up Valve

2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AV4000-m04-1 to 6D/Y(Z)m-A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV5000-m06, 10-1 to 6D/Y(Z)m-A 70 75 70 60 11 16 100 3.2 45 80 56 M6 x 1 Depth 8 6 Width across flats 32 9 AV2000-A/3000-A/4000-A/5000-A Series Specific Product Precautions 1 Be sure to read this before handling the products.

AR20-B to AR60-B

2.3 35.5 42.5 21 7 AR40(K)-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50(K)-B 70 66 65.8 11 13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

Series AP3500

Operating pressure Proof pressure Burst pressure Ambient and operating temperature Cv Vacuum to 250 psig (1.7 MPa) Vacuum to 125 psig (0.9 MPa) 1000 psig (6.9 MPa) 8000 psig (55.2 MPa) 14 to 160F (10 to 71C) (No freezing) 1) 0.29 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m), 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 70

AR20-B to AR60-B

2.3 35.5 42.5 21 7 AR40(K)-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50(K)-B 70 66 65.8 11 13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 *1 The dimension of B is the length when the filter regulator knob is unlocked. *2 For the AR20(K)-B only, the position of the pressure gauge is above the center of the piping. 76 AR20-B to AR60-B Regulator Made to Order Please contact SMC for detailed

HRX-OM-W038

Table 3-1 Amount of radiation and required ventilation Required ventilation amount m3/min Differential temp. of 3 oC Heat Differential temp. of 6 oC Radiated between inside and Model between inside and outside kW outside of installation of installation area area HRS040-A-20 Approx.8 120 70 The water-refrigerated thermo-cooler discharges heat by using facility water.

HRX-OM-R005

, or flammable gas (the product is not flame-proof) Location where the ambient temperature is out of the following range: In transportation and In storage 0 to 50C (with no water or circulating fluid in piping) In operation 5 to 40C Location where the ambient humidity is out of the following range or where condensation occurs: In transportation and storage 15 to 85% In operation 30 to 70%

Air Cylinder CLA Series Fine Lock Model

i 1 6 30 46 1 0 21 50 168 0 70 I 12 90 50 1 0 58 238 52 1 . 2 66 31 % 44.5 1 3 23 60 182 0 86 105 59 130 58 52 1 1 . 2 66 37 % 55 1 5 70 208 0 '102 1 8 130 160 71 297 65 't2.5 80 1 4 40 12 1 5 25 80 226 0 1 1 6 13.5 t 8 150 92 1 8 0 72 3 1 6 65 14.0 8 1 ra Single Glevis Type/CLAC with Bod Boot M14x r.5 M 1 8 X 1 . 5 M18X1.5 M22X1.5 M26X1.5 Dill|o||$io[$ $enies CIA Double Glevis TyPe/CLAD

Title not found

i 1 6 30 46 1 0 21 50 168 0 70 I 12 90 50 1 0 58 238 52 1 . 2 66 31 % 44.5 1 3 23 60 182 0 86 105 59 130 58 52 1 1 . 2 66 37 % 55 1 5 70 208 0 '102 1 8 130 160 71 297 65 't2.5 80 1 4 40 12 1 5 25 80 226 0 1 1 6 13.5 t 8 150 92 1 8 0 72 3 1 6 65 14.0 8 1 ra Single Glevis Type/CLAC with Bod Boot M14x r.5 M 1 8 X 1 . 5 M18X1.5 M22X1.5 M26X1.5 Dill|o||$io[$ $enies CIA Double Glevis TyPe/CLAD

SYJ300/500/700

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Individual exhaust for the pilot valve, common exhaust for the pilot and main valve Pilot exhaust method Body ported Lubrication Mounting orientation Shock/Vibration resistance (m/s2) Note 2) Not required Unrestricted 150/30 Dustproof ( M8 connector conforms

VQ7-6/7-8

Fluid Maximum operating pressure 1.0 MPa Valve specifications Solenoid specifications Single 0.20 MPa 0.15 MPa Min. operating pressure Double 0.15 MPa 0.15 MPa 3 position 0.20 MPa 0.15 MPa JIS Symbol 10 to 60C (1) 5 to 60C (1) Ambient and fluid temperature 2 position single 2 position double (Metal) Not required Lubrication (A) 4 (B) 2 (A) 4 (B) 2 Push type (Tool required) Manual override 150