Compact and Lightweight

Set of long clamping screws ZH2-TB203-A 3 M4 x 70 2 pcs. ZH13DA ZH15DA ZH2-TB204-A 4 M4 x 90 2 pcs. ZH2-TB206-A 6 M4 x 130 2 pcs. Hexagon nut (M4) 2 pcs. ZH2-TB208-A 8 M4 x 170 2 pcs. (ZH2-TB201-A)3 1 M4 x 30 2 pcs. Flat washer (for M4) 2 pcs. ZH2-TB302-A 2 M4 x 55 2 pcs. ZH2-TB303-A 3 M4 x 80 2 pcs. ZH18DA ZH20DA ZH2-TB304-A 4 M4 x 100 2 pcs. ZH2-TB306-A 6 M4 x 145 2 pcs.

Vacuum Pad

Lifting force = Theoretical lifting force v t (1) Theoretical Lifting Force (Theoretical lifting force = P x S x 0.1) (N) Pad diameter (mm) Pad area S (cm2) 4 0.13 6 8 10 13 16 0.28 0.50 1.5 0.02 2 3.5 0.03 0.10 0.79 1.33 2.01 85 80 75 70 65 60 55 50 45 40 0.15 0.14 0.13 0.12 0.11 0.11 0.10 0.09 0.08 0.07 0.27 0.25 0.24 0.22 0.20 0.19 0.17 0.16 0.14 0.13 0.82 0.77 0.72 0.67 0.63 0.58 0.53

RSQ

75 80 85 75 80 85 Mounting bolt M3 x 45l M3 x 55l M3 x 60l M5 x 55l M5 x 60l M5 x 65l M5 x 60l M5 x 65l M5 x 70l M5 x 75l M5 x 80l M5 x 85l M6 x 75l M6 x 80l M6 x 85l Lever with built-in shock absorber 0.97 1.01 1.05 RSQB12-10 RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20 RSQB40-20 -25 -30 RSQB50-20 -25 -30 Note) CX Round bar, Chamfered, Roller 1.03 1.07 1.11 50 Lever with built-in

ITVH

100 0 25 50 75 100 Input signal [% F.S.]

Series KV2 Fittings

37 35 44 68 43 51 75 81 97 100/400 100/400 100/400 100/400 100/400 100/400 100/400 100/400 100/100 100/100 100/200 100/200 100/200 100/200 100/200 100/200 100/100 100/100 100/100 ** Non-Standard Product, consult factory for lead time. * Dimension A reference after installation.

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

End Lock Cylinder Series CBG1

Stroke Table Long strokes (mm) Max. manufacturable stroke (mm) Bore size (mm) Standard strokes (mm) Note 1) Lock Unlock 20 25, 50, 75, 100, 125, 150, 200 201 to 350 25 301 to 400 32 301 to 450 25, 50, 75, 100, 125, 150, 200, 250, 300 40 1500 301 to 800 50, 63 301 to 1200 80 301 to 1400 Locked condition Unlocked condition 100 301 to 1500 Note 1) Intermediate strokes other than the above are

Air Pilot Operated Series NVSA

A B c D E F H J K M N o P o R s 2.95 (75) 2.52 {64) o.75 {t 9) 2.24 157't 0.91 123l 't.06 {271 1.97 {50) 0.83 {211 0.94 124) 0.16 t4) 1.34 (34) (31) 0.55 114l o.12 {3) 0.47 112't 0.73 (18.6) 0.98 125) lrillimeters in Parenthes PARTS LIST NOTES 1 Sp.ing t AXB3& O-Fim f aRp56+!

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

Max.120'F(50'C) 2position : 20 ms or less 3position : 50 ms or less (70 PSI) Operating pressute range Ambient and fluid temPerature Flesponse time Max.

Solid State Vacuum Regulator Series ITV2090/2091

Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)

IDX-OM-W029

) AC200/220V10% 50Hz/60Hz ( 4) AC230V (50Hz) 4.3 6.9 10.7 AC200V (2) A (50/60Hz) 4.2/4.8 6.7/7.3 8.2/9.3 AC230V (50Hz) 960 1570 2300 AC200V (2) (50/60Hz) 1100/1450 1570/2050 2000/2850 AC230V (50Hz) 10 20 AC200V (3) A (50/60Hz) 10 15 R407C (HFC) AC230V (50Hz) 45010 76010 55010 74510 g AC200V (50/60Hz) 47010 83010 55010 74510 R1 R11/2 R2 mm 10 1 2 kg 90 130 160 166 kW 22 37 55 75

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

g 1 m: Approx. 105 g 2 m: Approx. 165 g 3 m: Approx. 225 g 5 m: Approx. 345 g 10 m: Approx. 645 g 0.5 m: Approx. 75 g 1 m: Approx. 105 g 2 m: Approx. 165 g 3 m: Approx. 225 g 5 m: Approx. 345 g 10 m: Approx. 645 g Weight 224-1 A Communication Cable/Connector M12 Example of Connection PLC !

Stopper Cylinder

. *1RSQB12-10m 5 45 CQ-M3X45L RSQB16-10m 7.5 55 CQ-M3X55L -15m 60 X60L RSQB20-10m 7 Example) CQ-M3X55L 2 pcs. 55 CQ-M5X55L -15m 60 X60L -20m 65 X65L RSQB32-10m 9 Mounting bolt 60 CQ-M5X60L -15m 65 X65L -20m 70 X70L RSQB40-20m 9.5 C D 75 CQ-M5X75L -25m 80 CQ-M5X80L -30m 85 X85L RSQB50-20m 9 75 CQ-M6X75L -25m 80 X80L -30m 85 X85L *1 Be sure to use the attached flat washers when mounting 12

VCC

VCC13-02(F) 45.9 Rc1/8 pilot (12) port G1/4, Rc1/4 IN(1) port 16.5 15 2 x 6 (for M5 mounting) G1/4, Rc1/4 OUT(2) port 6 22 22 58 6 25 25 50 15 15 G1/4, Rc1/4 RETURN(3) port M5 leakage detection port 30 19 11 23 Part number for sub-base VCC13-S02 02F [Rc1/4] [G1/4] 38.4 Sub-base material is aluminum + hard anodized containing PTFE. 70 0.5 to 2 650 Valve for Water and Chemical Base Fluids

AP500

(70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400 -48 300 -61 200 -75 100 -88 0 -101 0 1 2 3 4 5 6 7 8 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Applicable Auto Switch Model

Applicable Auto Switch Model Refer to p.5.3-2 to 5.3-75 for the detailed specifications of auto switches.

Solid State Vacuum Regulator

Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)

VNH

100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 x 8 7 x 10 9 x 12 9 x 12 20 24 24 70 92 109 17-4-34 5 Series VNH High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Precautions Be sure to read before handling.

Title not found

Max.120'F(50'C) 2position : 20 ms or less 3position : 50 ms or less (70 PSI) Operating pressute range Ambient and fluid temPerature Flesponse time Max.

Title not found

Hea\,y duty gu de rod type Wdide bearng lOpott typ" l l l l l l l l l l r r t t t r r l l l t t t t t t l l l l tza t t t t t t t t t l t t t t t t t t t l ,75 _ t t t l l l l l l l znn t r t t t t l t l l ' For bore sizes 12 & 16, only tu15 x 0.8 is availade.