4-channel Flow Monitor ( compatible)

7 to 110 100 L Flow gal/min 2.6 to 26.4 1.8 to 29.0 PD 100 to 1000 70 to 1100 Flow L/min 50 to 250 20 to 280 250 L Flow cfm 13 to 66 5 to 74 PD 200 to 1000 80 to 1120 Temperature oC 0 to 100 -10 to 110 50 oC Temperature oF 32 to 212 14 to 230 PD 0 to 1000 -100 to 1100 Flow L/min 0.0 to 10.0 0.0 to 10.5 10 L Flow gal/min 0.000 to 0.353 0.000 to 0.370 PD 0 to 1000 0 to 1050 Flow L/min 0.0

Compact Electric Actuator Series LG1

Nonstandard Compatible Motors: Motor model Corresponding driver model Power supply voltage (AC) Motor output (W) MSM011P1A Matsushita Electric Industrial Co., LTD 100/115 MSD011P1E MSM012P1A 100 200/230 MSD013P1E 100/115 MR-C10A1 Mitsubishi Electric Corporation HC-PQ13 100 200/230 MR-C10A Yaskawa Electric Corporation 100/115 SGDE-01BP 100 SGME-01BF12 200/230 SGDE-01AP SGME-01AF12 Refer to

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Rz 12.5 45 Female thread size Chamfered dimension D (Recommended value) M5 5.1 to 5.4 10-32UNF 5.0 to 5.3 2. Use G external threads with G internal threads. D For Uni Thread 45 Tightening method 1.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load (N) 20 40 60 80 Load (N) 20 40 60 100 Load (N) 12 12 12 L = 100 mm L = 100 mm L = 100

10

Solid state auto switch: D-M9m 40 60 80 100 Long: MHL2-mD2 60 80 100 120 M Performance and mounting dimensions are interchangeable with the current model.

IIIIIIIIII

F-4200-.5 F-4200-2 F-4200-5 F-4200-15 F-4200-30 F-4200-60 F-4200-100 .05 .2 .5 .5 .5 .5 1 .5 2 5 15 30 60 100 15 30 30 45 60 120 120 .05 .1 .4 1.0 1.8 3.5 3.5 .15 .3 .8 1.6 2.4 5.0 7.5 3A 10A 10A 10A 10A 10A 10A Wetted materials For special deadband or current requirements, contact factory See Appendix A F-4200BARBED FITTING SPECIAL OPTIONS RANGE (PSI) MOUNTING STYLE B80 = NYLON 1/16" ID

HRX-OM-W038

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

HRX-OM-O021

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Option Part no. 1 Bracket A ZS24A With 2 pcs. of mounting screws 1 Bracket D ZS24D With 2 pcs. of mounting screws 1 Panel mount ZS24E 1 ZS24F Panel mount + Front protection cover 1 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Specifications ZSE50F (Compound pressure) 100 to 100kPa 100 to 100kPa 500kPa 0.1 0.001 0.001 0.02 1 0.1 ISE50 (Positive pressure)

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

F/ISE

Option Part no. 1 Bracket A ZS24A With 2 pcs. of mounting screws 1 Bracket D ZS24D With 2 pcs. of mounting screws 1 Panel mount ZS24E 1 ZS24F Panel mount + Front protection cover 1 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Specifications ZSE50F (Compound pressure) 100 to 100kPa 100 to 100kPa 500kPa 0.1 0.001 0.001 0.02 1 0.1 ISE50 (Positive pressure) 0.000

SV

200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 200 300 400 500 600

3

DC Specification AC Specification (Built-in Full-wave Rectifier Type) Model Power consumption (W) Note 1) Temperature rise (C) Note 2) Model Apparent power (VA) Note 1) 2) Temperature rise (C) Note 3) VXS23/24 12 100 VXS25/26 15 100 VXS23/24 12 100 VXS25/26 15 100 Note 1) The value at ambient temperature of 20C and when the rated voltage is applied.

LECP6_C

20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 28 - TB No.

AC Servo Motor Driver (CC-Link Type)

The guideline is 80% or less. 0 to 100 % 12 Effective load ratio The continuous effective load current is displayed. The effective value is displayed relative to the rated current of 100%. 0 to 300 % 13 Peak load ratio The maximum torque is displayed.

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

Bore size (mm) JIS symbol 0.01 0.02 Minimum operating pressure Standard Stroke Table Bore size (mm) 32, 40 50, 63, 80, 100 Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kits Theoretical Output Table OUT IN Unit: N Bore size (mm) Contents Kit No.

ZQ-OM01401

30 -100 -80 25 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 20 -60 -60 15 -40 -40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR)

Clean Air Module

200 200 0.1 MPa 100 100 0 1 2 3 4 5 6 7 8 9 11 10 0 0.1 0.2 0.3 0.4 0.5 Number of needle rotations Fluid pressure (MPa) Model: LLB3-1-P1R1VSF and LLB4-1-P1R1VSF Supplied pressure: 0.5 MPa Pressure setting condition and measured position: Pressure is set by turning the regulator knob with ON/OFF valve turned off.

Digital Flow Switches Series PF2A

Note 6) This product conforms to the CE mark. 4 Series PF2A Flow Characteristics (Pressure Loss) PF2A710, 510 PF2A750, 550 PF2A711, 511 3.0 1.0 10 2.5 0.8 8 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 2.0 6 0.6 1.5 0.4 4 1.0 0.2 2 0.5 5 2.5 7.5 0 100 10 25 50 75 0 5 10 15 20 25 30 40 35 45 50 0 1 10 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) PF2A751, 551 PF2A721

125

Bore size System Average speed [mm/s] MB, CA2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 500 mm 40 50 63 80 100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal A 1000 900 800 700 600 500 400 300 200 100 0 B 1000 900 800 700 600 500 400 300 200 100 0 C Bore size System Average speed [mm/s] CS1/CS2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 300 mm 125 140 160