Series HAW Water Cooled Aftercooler 1

60 60 66 66 66 70 120 140 140 140 120 140 140 140 220 60 60 90 100 100 100 200 193 193 238 289 289 289 357 293 293 326 354 354 354 428 159 159 215 219 219 219 159 159 245 264 264 264 203 203 266 324 324 324 473 130 130 165 216 216 216 267.3 35 35 138 170 276 276 365 270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72 395 83 83 212 258 366 366 500 190 390 575 893 1038 1538 950 1 2

Heatless Air Dryer Series ID 1

Source voltage F G N NPT 0 Single phase 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) 1 Single phase 110 VAC (50 Hz) JIS Symbol 5 Single phase 200 VAC (50 Hz) 200 to 220 VAC (60 Hz) 6 Single phase 220 VAC (50 Hz) 14-19-1 2 Series ID Working Principle Flow Rate Inlet pressure: 0.7 MPa The compressed air that flowed in from the IN side passes through the 4 way solenoid valve, and after it is dehumidified

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQ4 Response time Life VQZ VQZ1000 10ms 200 million cycles Built-in One-touch fittings for easier piping VQZ2000 12ms VQD VQZ3000 15ms VZS Dispersion accuracy2ms Metal seal, Single solenoid with light and surge voltage suppressor lntegral One-touch fittings save on installation time and labor and can be easily removed if necessary.

Compact Vacuum Ejector Series ZQ

0.3 0.4 0.5 0.6 Suction flow (l/min(ANR)) Supply pressure (MPa) ZQ110 Exhaust characteristics ZQ110 Flow characteristics Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50 40 -40 -40 30 Air consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15

ZQ

Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50 40 -40 -40 30 Air consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15 10 5 0 0.1 0 0.2 0.3 0.4 0.5 0.6 Supply pressure (MPa) 13-9-3 4 Series ZQ Specifications Ejector Weight Switch and suction

48

2.03 2.89 3.74 4.60 80 (56 x 2) 2.81 3.47 4.79 6.12 7.44 100 (71 x 2) 4.48 5.40 7.22 9.05 10.87 [N] direction Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 12 (10 x 2) 6 OUT 157 31 47 63 79 94 110 IN 101 20 30 40 50 60 70 16 (12 x 2) 6 OUT 226 45 68 90 113 136 158 IN 170 34 51 68 85 102 119 20 (16 x 2) 8 OUT 402 80 121 161 201 241 281 IN 302 60 90 121 151 181 211

Flow Control Equipment

Male thread Suitable screw torque (Nm) Hexagonal width (mm) Adjustable spanner nominal (mm) 1/4 4.5 M3 M5 10/32-UNF 100 1/6 8 150 7 to 9 14 1/8 200 12 to 14 17 1/4 200 22 to 24 21 3/8 200 28 to 30 24 1/2 1Nm=10.2kgf/cm Tightening torque for lock nuts Caution qSuitable screw torque for a hexagon lock nut is shown in the table below.

Vacuum

SymbolTube size l\,lodel Note) Replacemont Ong sal included with reolacement elefienls @3h6" NZFBl Ol srze Symbol Flow SCFM (N/min) @1/4" NZFBl Ol NZFB2Ol s3/8" NZFB3Ol Inch 3ize' MAX 0.7 (20) MAX 1.1 (30) MAX 2.1 (60) r\rAX 3.5 (100) @1/2" NZFB4Ol lnch slze' (Rebase butlon: Fed) o4mm zFB100 oGmm zFB100 zFB'200 oBmm zF8.200 zF8300 o10mm zFB300 can o8mm can be used with 5/16'tubing. iti slze

Vacuum

SymbolTube size l\,lodel Note) Replacemont Ong sal included with reolacement elefienls @3h6" NZFBl Ol srze Symbol Flow SCFM (N/min) @1/4" NZFBl Ol NZFB2Ol s3/8" NZFB3Ol Inch 3ize' MAX 0.7 (20) MAX 1.1 (30) MAX 2.1 (60) r\rAX 3.5 (100) lnch slze' (Rebase butlon: Fed) @1/2" NZFB4Ol o4mm zFB100 oGmm zFB100 zFB'200 oBmm zF8.200 zF8300 o10mm zFB300 can o8mm can be used with 5/16'tubing. iti slze

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cke1 ARlolo 60, AR20K ro AR2010 60. AR20K tJ 60K AB1010 40.

MGZ Series

Minimum strokes for mounting of auto switches 40 50 63 Number of auto switches mounted Auto switch type Auto switch models 60 2 pcs. (same side) Reed switch D-Z73, Z76, Z80 20 1 pc., 2 pcs. (different sides) 60 2 pcs. (same side) D-Y59A (B), Y69A (B) Y7P (V) 20 1 pc., 2 pcs. (different sides) 70 2 pcs. (same side) D-Y7NW (V), Y7PW (V) Solid state switch Y7BW (V) 1 pc., 2 pcs.

Process Pump

SUP = 0.2 MPa 0.2 0.2 0.2 0.1 0.1 0.1 0 0 0 50 100 150 200 0 Discharge (mL/min) 0 Discharge (mL/min) 200 400 600 800 1000 0 Discharge (mL/min) 200 400 600 800 1000 Air Consumption: Built-in Solenoid Valve/Air Operated Calculation of Air Consumption Air Consumption 45 Find the air consumption for operation with a 5 Hz switching cycle and pilot air pressure of 0.35 MPa from the air consumption

VP300/500/700

override Rated voltage Nil Push type 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz B Locking type (Slotted) C Locking type (Manual) 110 to 120 VAC, 50/60 Hz 4 Surge voltage suppressor Option 220 VAC, 50/60 Hz Indicator light 24 VDC 12 VDC 5 6 Light/Surge voltage suppressor E EZ Nil None 7 240 VAC, 50/60 Hz With light/surge voltage suppressor (Type E, T, D, or Y only) 9 Other Z Option S With

VXF

Rated voltage Electrical entry 2 200 VAC 50/60 Hz 1 100 VAC 50/60 Hz G Grommet C Conduit 3 110 VAC 50/60 Hz D DIN terminal 4 220 VAC 50/60 Hz T Conduit terminal 5 24 VDC Refer to the table (1) given below for availability. 6 12 VDC 7 240 VAC 50/60 Hz 8 48 VAC 50/60 Hz 9 Other (Contact us for inquiry) Refer to the table (1) given below for availability.

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

CE

49 60 9 M10 x 1.5 Rc(PT) 1/4 89.5 35 19 64 Refer to page 11 regarding the rod end nut which is included.

Digital Gap Checker

range 100 to 200 kPa Displayable range (Pressure value) 3 -20 to 220 kPa Repeatability 0.005 mm or less 0.010 mm or less 0.020 mm or less Temperature characteristics (Reference: 25 oC) 0.010 mm or less 0.015 mm or less 0.030 mm or less Hysteresis 0 to variable (Default: 3) 0 to variable (Default: 20) Rated pressure range 0 to 200 kPa Setting pressure range -20 to 220 kPa Minimum display/

Vacuum Pad

Q = (V x 60) /T1 + QL = (0.0031 x 60) /0.3 + 0 = 0.62 L From the formula on the front matter 8, the maximum suction flow rate Qmax is Qmax = (2 to 3) x Q = (2 to 3) x 0.62 = 1.24 to 1.86 L/min (ANR) According to the maximum suction flow rate of the vacuum ejector, a nozzle with a 0.5 diameter can be used.

VP4

Hz Symbol Option Without sub-plate VP454 2 200 VAC, 50/60 Hz 00 3 110 VAC, 50/60 Hz VP474 4 220 VAC, 50/60 Hz (10A) 3 8 (15A) 1 2 03 04 5 24 VDC VP450 6 12 VDC 06 (20A) 3 4 10 (25A) 1 7 240 VAC, 50/60 Hz 9 Other 12 (32A) 1 4 1 14 (40A) 1 2 1 VP470 Option Note) There is no 3 position type for Series VP470.

VEX1

81.5 83.5 2-M6 X 1 X Depth 9 1 2 3 4 60 143.5 62.5 156.5 36.5 16.5 20 Center 116.5 70 25 VEX5700 VEX5701 1 4 1 4 160.5 150.5 62.5 90 60 30 15 7 173.5 37.5 100 13 88.5 86.5 18 4-M6 X 1 X Depth 6 136.5 60 17 82 c Bracket mounting dimensions g Grommet h Grommet terminal i Conduit terminal j DIN connector a Model b d e f VEX5500 VEX5501 19 130 110 9 12 2.3 187 187.5 205.5 205 32 VEX5700 VEX5701