VS 8-2/VS 8-4

or less 80 or less 70 or less 80 or less 70 or less 80 or less 80 or less Single 2-position 5 (R1) 3 (R2) Double 1 (P) N.C.

PFxx-OMO0004CN

L/min [H_1] OUT1 10 L/min 100 L/min [P_2] OUT2 10 L/min [H_2] OUT2 OUT1OUT2 [F 1]OUT1(31)[F 2]OUT2(39) -26No.PF-OMO0004CN-E <> 1 [P_1][n_1] [] OUT1OUT2[P_2][n_2] [F 1]OUT1(31)[F 2]OUT2(39) 32 (28) -27No.PF-OMO0004CN-E [] 2 [F 0] 2 F0 F1 F99 2 [rEF] [Anr] [F 0][rEF] 29 [Uni] 1 [ L] L/min [oU1] OUT1 [HYS] [1ot] OUT1 [1_P] [F 1][oU1] [P_1] OUT1 [100] 100 L/min 31 [H_1] OUT1 [

JXCx-OMT0028CN

500 100 500 1 1 200 1000 200 1000 2 2 A-miniB type 50 200 50 200 3 3 CN2 CN2TB/PC 27 - 6.CN4 6.1 No.

Air Cooled Aftercooler Series HAA 1

70 59 60 485 580 428 505 320 333 150 150 150 150 320 400 70 94 58 65 200 200 480 610 220 220 225 238 Model HAA15 HAA22 B C D E F G H J K L M N P Q R S 1B union union 1 2 B 1 HA AT ID AMG AFF AM Misc. 14-15-3

Free-Mounting Cylinder with Air Cushion Series CU

, 80, 90, 100 Bore sizes (mm) 20, 25, 32 Intermediate strokes are also available upon receipt of order.

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

NARM Series

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

Power Clamp Cylinder

1 2 3 4 5 6 7 8 9 10 11 12 13 80 0 5 10 15 20 25 30 35 40 45 50 55 60 Load capacity (N) Load capacity (pounds) 63 300 12.0 280 11.0 Distance from pivot point (inches) 260 Distance from pivot point (mm) 10.0 240 9.0 220 200 8.0 180 7.0 160 6.0 140 5.0 120 100 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 4.00 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 Load capacity (N) Load capacity

1

Additional weight with magnet. .0.02 0.12 + 0.05 x 100/50 + 0.022 + 0.02 = 0.262 kg Calculation: (Example) JCMBZ25TR-100F Basic weight.0.10 (Basic (Female thread on rod cover), Rc1/8 port, 25) Additional weight.0.05/50 mm stroke Cylinder stroke.100 mm stroke 0.10 + 0.05 x 100/50 = 0.20 kg Allowable Kinetic Energy Allowable Lateral Load at Rod End fR Table (1) Max.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) 15+1/2ST 20 25 30 35 40 50+ST 60 70 80 90 100 63.5+ST 73.5 83.5 93.5 103.5 113.5 Model CXS6-10 21-/2210-/11-/12CXS6-20 CXS6-30 CXS6-40 CXS6-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/12854 A Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS10, CXSL10 10-/11221221S ZZ SS 17 8 9 2 x 3.4 through 4 20 1 Z M5 x 0.8 x 5 L (Hexagon socket set screw) 2 x 6.5 counterbore

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

100 0.2MPa 0.2MPa 50 50 0.1MPa 0.1MPa 0 0 10 10 20 20 30 30 40 40 50 50 Gripping point L mm Gripping point L mm MHS2-50D MHS2-50D F 400 400 Internal gripping Pressure 0.6MPa Pressure 0.6MPa 300 300 Gripping force N 0.5MPa 0.5MPa Gripping force N 0.4MPa 0.4MPa 200 200 0.3MPa 0.3MPa 1N: Approx. 0.102kgf 1MPa: Approx. 10.2kgf/cm2 0.2MPa 0.2MPa 100 100 0.1MPa 0.1MPa 0 0 20 20 40 40 60 60 Gripping

LV50-OMQ0002

Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g -12No.LV50***-OMQ0002-G Summary of Product Parts Body With lead wire and M12 connector (4 pins) Display (Option) Connector Piping port Piping port Bracket (Option) Description Function Connector The part to which lead wires are connected.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Quality grade (3) as system Odor Application (2) Oil mist (1) density No.1 Solid Moisture No.1 Labor-saving equipment Jigs and tools General cleaning (Air blow gun) 5 m others 2, 10 20, 40 70, 100 Air Filter Series AF Series AF Traces of dust, moisture and oil can be tolerated 5 mg/m3 (ANR) Humidity 100% Oil odor Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

Fieldbus System

) Input channel 24 VDC Supplied voltage Max. supplied current 0.5 A/connector Protection Short-circuit protection Input Output Power Input signal range 12 bit resolution 0 to 10 V, 1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA EX600-AMB Max. rated input signal 22 mA Note 2) 15 V 250 100 k Input impedance 0.05% F .S.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

100 100 239 247 296 320 339 345 44 46 48 51 59 63 3 4 1 3 4, 1 1 1 1 4 1 2 , 2 Dimensions: Auto Feed Tank Float switch Contact point capacity: AC: 15 VA, DC: 15 W Contact point construction: 1a, 1b M Width across flats 12 Float switch Lubrication plug Model A 174 174 234 234 B 70 70 108 108 C 16 16 30 30 D 7 7 7 7 E 91 91 121 121 F 182 182 242 242 G 15 15 16 16 H 24 24 40 40 I 382 382 422

PF-OMN0009_C

L/min 11 cm ) IN OUT PF3W504 PF3W520 (16 L/min ) (16 L/min ) (4 L/min ) (8 L/min ) [cm] [cm] PF3W540 PF3W511() (100 L/min ) (100 L/min ) (50 L/min ) (40 L/min ) (40 L/min ) (50 L/min ) [cm] [cm] -36No.PF-OMN0009CN-F PF3W521() (250 L/min ) (250 L/min ) [cm] -37No.PF-OMN0009CN-F PVC 3F.S.11 cm IN OUT PF3W511/521(PVC ) (100 L/min ) (250 L/min ) [cm] -38No.PF-OMN0009CN-F PF3W504S PF3W520S

Series KP/KPQ/KPG

90 26 45 45 70 70 100 17 8 21.5 15.2 15.2 D 19 10 24 18.5 18.5 H 22 Connection threads 12 25 20.9 20.9 Reference dimension for R threads after installation Note 1) D indicates the maximum diameter. 6 Clean One-Touch Fittings Series KP Dimensions (mm) 1in = 25.4mm, 1g = 0.0353oz Straight Union: KPH Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M 2-Applicable tubing

Ozone Resistant

70 Residual ozone (%) 60 50 40 30 These observations illustrate that the use of so-called "oilfree" air sources and compressed air at low dew points make it difficult to eliminate ozone in pneumatic lines. 20 10 0 Initial value Measuring point 100 90 80 70 Residual ozone (%) Air with atmospheric dew point: 17C Air with atmospheric dew point: 10C 60 50

Series KP/KPQ/KPG

90 26 45 45 70 70 100 17 8 21.5 15.2 15.2 D 19 10 24 18.5 18.5 H 22 Connection threads 12 25 20.9 20.9 Reference dimension for R threads after installation Note 1) D indicates the maximum diameter. 6 Clean One-Touch Fittings Series KP Dimensions (mm) 1in = 25.4mm, 1g = 0.0353oz Straight Union: KPH Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M 2-Applicable tubing

KP/KPQ/KPG

70 100 26 35 45 55 70 90 17 8 15.2 21.5 15.2 D 19 10 18.5 24 18.5 H 22 Connection threads 12 20.9 25 20.9 Reference dimension for R threads after installation Note 1) D indicates the maximum diameter. 3 Clean One-touch Fittings Series KP Dimensions Straight Union: KPH Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M 2-Applicable tubing TPH TPS KPH04-00 37.4 18 4