End Lock Cylinder Series CBG1

Stroke Table Long strokes (mm) Max. manufacturable stroke (mm) Bore size (mm) Standard strokes (mm) Note 1) Lock Unlock 20 25, 50, 75, 100, 125, 150, 200 201 to 350 25 301 to 400 32 301 to 450 25, 50, 75, 100, 125, 150, 200, 250, 300 40 1500 301 to 800 50, 63 301 to 1200 80 301 to 1400 Locked condition Unlocked condition 100 301 to 1500 Note 1) Intermediate strokes other than the above are

Fluoropolymer Piping Equipment

-Fl 19 1/2" 15 29.5 LQ1H5B-Fl 1/2" 9 LQ1H5C-Fl 3/4" 3/4" 60 15 36 LQ1H5D-Fl 1/2" 9 LQ1H5G-Fl 3/4" 1/4" 56.5 10.7 21.5 LQ1H5H-Fl 3/4" 3/8" 56 14 25 LQ1H6A-Fl 1" 3/4" 39.5 36 75 49 58.5 29 26 39 32 15 29.5 LQ1H52-Fl 12 9.4 LQ1H53-Fl 19 3/4" 60 15 36 LQ1H54-Fl 12 9.4 LQ1H58-Fl 19 1/4" 56.5 10.7 21.5 LQ1H59-Fl 19 3/8" 56 14 25 LQ1H61-Fl 25 3/4" 39.5 36 75 49 58.5 21.2 46 36 LQ1H6B-Fl 3/4" 15

Series KV2 Fittings

/100 50/100 50/100 50/100 50/100 50/100 55.0 46.0 47.0 50.0 55.0 55.0 46.9 40.2 40.9 41.9 46.9 46.9 *Dimension A reference after installation. ** Non-Standard Product, consult factory for lead time. 14 Series KV2 Bulkhead Union KV2E_ _-_ _ Mounting Plate Max.

HRX-OM-W032

Status (5): 50 minutes passes after starting operation. Alarm monitoring has started. It shows that the "50 min" setting does not influence the alarm monitoring under these conditions.

New

Use a fluid with a kinematic viscosity of 50 mm2/s or less.

Vacuum Pad

13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK20-B5 P.50 ZP3B-T2BJ10-B5 P.50 Lateral With Adapter: Vacuum Inlet ZP3-10UM: ZP3-13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK3-B5 P.50 Lateral P.51 ZP3-015U: ZP3-02U: ZP3-035U: ZP3B-Y1J3-B3 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10UM: ZP3-13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK6-B5 P.50

17

Load Mass Allowable Moment MY1B/M1 MY1B/M3 MY1B/M2 MY1B/m1 200 200 200 300 400 500 20 30 40 50 100 100 50 20 30 40 100 50 10 40 30 20 30 40 50 5 4 3 2 10 Load mass kg Moment Nm Moment Nm Moment Nm 20 5 4 3 2 10 1 10 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B32 MY1B25 MY1B40 0.2 0.3 0.4 0.5 MY1B32 5 4 3 1 MY1B32 MY1B32 MY1B25 0.5 0.4 1 MY1B25 MY1B25 D0.1 0.3 0.2 2 0.5 0.4 0.3 0.05 0.04 0.03 0.2 -X

60

Description VHS20 to 50-A VHS20 to 50-B part no. Note 1) part no.

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

Soft Start-up Valve

41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AV3000-m03-5 to 6G(Z)m-A AV4000-m04-1 to 4G(Z)m-A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV4000-m04-5 to 6G(Z)m-A AV5000-m06, 10-1 to 4G(Z)m-A 70 75 70 60 11 16 100 3.2 45 80 56 M6 x 1 Depth 8 6 Width across flats 32 AV5000-m06, 10-5 to 6G(Z)m-A 8 AV2000-A/3000-A/4000-A/5000-

3 Port Air Operated Valve Series SYJA300 1

VV3ZA2-50-031-01 1 pc. VV3ZA4-50-031-021 pc. VZA214-P2 pcs. VZA414-2P2 pcs. VVZ200-31A-11 pc.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 16 Series PB1000 Process Pump Built-in Solenoid Valve Type/Air Operated Type Performance Curves/Built-in Solenoid Type/Air Operated Type 1l/min = 0.035SCFM 1MPa = 145psi Cycle 1Hz Cycle 5Hz Cycle 10Hz 70 70 70 60 60 60 50 50 50 40 40 40 Total lifting range m Total lifting

Process Pump Series PA3000/5000/PAX1000 Series PB1000

5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature C

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

/60Hz 5 6 V S R 1 2 Series Without light/surge voltage suppressor Nil SY3000 SY5000 3 5 With surge voltage suppressor S With light/surge voltage suppressor Z A, B port size A, B port size 200VAC 50/60Hz 110VAC 50/60Hz [115VAC 50/60Hz] With surge voltage suppressor (non-polar type) Applicable series Applicable series Port size Port size Symbol Symbol R 3 02 C8 C10 Rc(PT) 1/4 8 One-touch fitting

ZR

Nil 30 50 0.6 m 3 m 5 m Example) ZSE2-0R-15CN . 1 pc. ZS-10-5A-50 . 1 pc. 13-3-13 13 Series ZR Vacuum Pressure Switch Unit/Pressure Switch for Vacuum: ZSE2-0R-15 Guidelines for Use of Vacuum Pressure Switch Unit System circuit for work adsorption Set pressure When it is used for work adsorption, set the pressure so that adsorption is complete and reliable.

Tamper Proof and Flat Head Screw

/32 10-32UNF 6, 10, 16, 20 Universal type AS221F-N01 AS231F-N01 NPT1/8 20, 25, 32 AS221F-N02 AS231F-N02 NPT1/4 20, 25, 32, 40 AS321F-N02 AS331F-N02 NPT1/4 40, 50, 63 AS321F-N03 AS331F-N03 NPT3/8 40, 50, 63 AS421F-N04 AS431F-N04 NPT1/2 63, 80, 100 Note 1) Elbow type only.

VNH

60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 95.5 111 119 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1 2 2-Rc 3 4 2-Rc1 Model J K L M N O P Q R S T U V VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 202.5 232 267 286.5 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5

Compact and Lightweight

60 75 60 Air consumption Suction flow rate 40 40 50 40 50 40 Suction flow rate Vacuum pressure 20 20 25 20 25 20 0 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 10 20 30 40 50 Supply pressure [MPa] 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 10 20 60 80 Supply pressure [MPa] Suction flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] 226 Body Ported Type Vacuum Ejector ZH Series Exhaust Characteristics

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage Lead wire length 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Electrical entry G H L LN LO M MN MO W0 Grommet, 300 mm lead wire Grommet, 600 mm lead wire