1

M3 x 0.5 M3 7.5 15 34 3.3 10.5 10 6.5 23 3.4 5.5 3.5 9.5 5 7 26 M3 x 0.5 M3 7.5 15 38 3.3 13 12 6.5 30 3.4 7 3.5 11.5 5 7 33 -X M4 x 0.7 M4 8.5 17 53 4.4 14.5 14 8 35.5 4.5 7.5 4.5 18 4.5 6.5 38.5 M4 x 0.7 M3 14.5 29 62 6.5 3 26 14 34 4 4.5 16.5 6 45 7 20M5 x 0.8 M4 14.5 29 70 8 3 31 17 39 4 5.5 20.5 7 51 8 M6 x 1 M5 17 34 76 9.5 3 41 22 50 4.5 6.5 21 7.5 62.5 10

CRB2/CRBU2/CRB1

Q1 M3 5.5 to 8 Y-1 10 15 X-3 7.5 to 14 M3 Y = M3, M4 7.5 to 9 Y-1.5 L2 = L1(3 x P) C2 = C 15 20 X-4 M3, M4 10 to 18 9 to 10 Y-1.5 M3, M4, M5 X = 20 30 12 to 20 X-4.5 M3, M4, M5 11 to 13 Y-2 M3, M4, M5, M6 L1 = Q2 = M 30 40 14 to 22 X-5 14 to 15 Y-4.5 M3, M4, M5, M6 M3, M4, M5, M6, M8 24 Simple Specials Series CRB2 Axial: Top (Long-shaft side) Axial: Bottom (Short-shaft side) Symbol: A10 Symbol

MXS

Model Mounted to body B C D E H F M P* I A J Q* MXS-AS6 5 16.5 MXS 6 P M 17.8 10.5 M2.5 X 10 12.5 8.5 M2.5 X 8 7 2.5 6 6 M5 X 0.8 C A MXS-AS6-X11 15 26.5 MXS-AS8 5 16.5 MXS 8 21.5 14.6 10 M3 X 10 11 M3 X 12 8 3 7 7 MXS-AS8-X11 15 26.5 M6 X 1 MXS-AS8-X12 25 5 36.5 B MXS-AS12 20 E MXS12 18.5 13 M4 X 12 16 M4 X 15 12 4 31 10 9.5 M8 X 1 MXS-AS12-X11 15 30 D F MXS-AS12-X12 25 40 MXS-AS16 5 24.5

0.5

/min 0.46 m3/min 0.80 m3/min (Max.) 0.66 m3/min 0.46 m3/min 0.80 m3/min (Max.)

CQS

X 25 l M3 X 30 l M3 X 35 l M3 X 40 l M3 X 45 l M3 X 50 l M3 50 55 60 65 70 25 30 35 40 45 50 6.5 6.5 Secure the cylinder by using Secure the cylinder by using the OA screws that are the OA screws that are provided with the cylinder provided with the cylinder tube. tube.

REA/REB

x 0.5 13 7 M3 38 15 7.5 12 33 30 3.5 Order Made Auto Switches 15 6.5 4.5 4.4 8 18 4.5 M4 x 0.7 7.5 14.5 17 8.5 M4 14 53 38.5 35.5 4.5 20 6 6.5 16.5 4 M4 x 0.7 14.5 M3 3 29 26 45 14 62 7 4.5 34 25 7 8 20.5 M5 x 0.8 4 M4 14.5 3 17 70 29 5.5 39 31 51 8 32 7.5 9.5 21 M6 x 1 4.5 M5 76 34 17 50 41 3 62.5 22 10 6.5 40 7.5 9.5 25.5 M6 x 1 7.5 39 19.5 M5 45 3 90 60 74.5 28 10

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 31 (4 Port/Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: M3 (M3X0.5 Type 31, S31)

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 5 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -

CQS

Example) Bolt M3 x 25l 4 pcs. (Standard stroke) Bolt M3 x 75l 4 pcs.

MXS Series Air Slide Table

Applicable model P(Hexagon socket head screw) Q(Hexagon socket head screw) Mounted to body J M I F B C D E H A MXS-AS6 5 16.5 MXS 6 P M 17.8 10.5 M2.5 X 10 12.5 8.5 M2.5 X 8 6 2.5 7 6 M5 X 0.8 C A MXS-AS6-X11 15 26.5 MXS-AS8 5 16.5 MXS 8 21.5 14.6 10 M3 X 10 11 M3 X 12 7 3 8 7 MXS-AS8-X11 15 26.5 M6 X 1 MXS-AS8-X12 25 5 36.5 B MXS-AS12 20 E MXS12 18.5 13 M4 X 12 16 M4 X 15 10 4 12 31 9.5

Made to Order

x 0.5 9.5 3.4 6.5 3.3 5 7 5.5 10.5 26 23 34 15 7.5 M3 3.5 10 M3 x 0.5 11.5 3.4 6.5 3.3 5 7 7 13 33 30 38 15 7.5 M3 3.5 12 M4 x 0.7 18 4.5 8 4.4 4.5 6.5 7.5 14.5 38.5 35.5 53 17 8.5 M4 4.5 14 M4 x 0.7 16.5 6 4 45 14 62 29 14.5 M3 4.5 26 6.5 7 34 3 M5 x 0.8 20.5 7 4 51 17 70 29 14.5 M4 5.5 31 8 8 39 3 M6 x 1 21 7.5 4.5 62.5 22 76 34 17 M5 6.5 41 9.5 10 50 3 M6 x 1 25.5 7.5 7.5 74.5 28 90 39

ISO Cylinder

Description Size Quantity BBA2 1 Auto switch mounting screw M3 x 0.5 x 6 L 1 BMU1-025 M3 x 0.5 x 8 L 1 BQ-1 M3 x 0.5 x 10 L 1 BQ-2 2 Auto switch mounting nut (Hexagon nut) M3 x 0.5 1 BQ-1 3 Auto switch mounting nut (Convex shape) M3 x 0.5 1 BQ-2 D-A7, A8 D-F7, J7 * A spacer for BQ-2 (black resin) is not included. * When using D-A9l(V)/M9l(V)/M9lW(V)/M9lA(V) auto switches with BQ2-012, use

V100

V114-5GZ VS VFN 2 1 3 2 Blank plate assembly V100-77-1A Manifold base (5 stations) VV100-S41-05-M5 VV100-S41-05-M5 1 set (Type S41, 5 station manifold base part no.) V100-77-1A 1 set (Blank plate assembly number) V114-5GZ 4 sets (Valve) To order valves and options mounted onto the manifold at the factory, list the valve/option with an asterisk () in front of each part number.

Dedicated Controller Series LC1 Uniaxial Type

T-nuts (weight 10.0g) Dedicated communication cable (IBM PC/AT compatible computer) M Model LC1-1-RC M Model 17.5 LC1-1-N3 M3 x 0.5 Cable length 02 2m 04 4m 03 3m 05 5m LC1-1-N5 M5 x 0.8 18 7.5 PC Controller T-brackets Model LC1-1-L5 (weight 16.0g) Model LC1-1-L3 (weight 15.5g) Cable length: 2 to 5m M5 M3 17.5 17.5 11 Dedicated communication cable (D-Sub) (for NEC PC-98 Series) Model LC1-

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

DMade to Order Specifications (For details, refer to page 8-31-1.)

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(Example) For M3: L1 = 6 mm Applicable shaft type: W CRB2 CRBU2 Q1 = M L1 + (3 x P) (mm) CRB1 Y Q2 Size (mm) Y = L1 = 15 X Q1 M3 Size 1.5 to 9 MSU 15 20 M3, M4 1.5 to 18 M3 1.5 to 10 L2 + (3 x P) L2 = 20 30 M3, M4, M5 1.5 to 20 M3, M4 X = 2 to 13 CRJ 30 40 Q2 = M M3, M4, M5 2 to 22 M3, M4, M5 4.5 to 15 CRA1 Symbol: A3 The long shaft can be further shortened by machining male threads into

42

Note Option mounting diagram Single valve AXT632-17-4 (M3 x 37) 3 Valve 0 Blanking plate (VVQ4000-10A1 5 ) AXT632-38-1 (M3 x 14) 4 For manifold Blanking plate Valve + Individual SUP spacer (VVQ4000-P1 5 02 03 ) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x 26) 2 Valve + Individual EXH spacer (VVQ4000-R1 5 -02 03) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x

Title not found

16 Hex 13/64 13/64 5/16 Hex Typ. 80 M3-LB4 M3-LB1 M3-LB2 M3-LB3 M3F-LB3 M3-LB2 1/2 1" 15/16 5/8 5/8 5/8 5/16 Hex Typ. 3/16 Hex Typ. 81 M3-T1 M3-T2 M3-T3 M3-T4 M3-T2 1/2 See complete selection of adapters on pages 23 & 24 1/4 5 32 /32 3/16 Hex 7/16 Ref 1/4 Hex 5/16 Hex M3 x 0.5 M6 x 1 Thd .085 5 32 9 32 M3 0.5 Thd to 10-32 Thd .241 Ref 82 M3 x 0.5 to M6 x 1 (F) Adapter M3 Plain Plug M3

Free Mount Cylinder

(mm) DQ HQ HP 4 6 8 10 13 16 20 25 32 40 50 10 16 25 40 6 8 10 13 16 20 25 32 40 50 2.6 4.8 31 12 7 26 10 7 31 12 9 26 10 9 10 10 26 26 2.6 4.8 32 13 7 32 13 9 DQ HQ HP ZP ZC(D)UKD16 ZC(D)UKR16 12 12 31 31 15 12 33 18 16 37 28 20 44 DQ HQ HP 12 18 12 15 36 15 18 20 41 12 16 37 ZC(D)UKD20 ZC(D)UKR20 ZP 12 33 12.5 18.5 33.5 23 14 38 39.5 28 14 38 34 29 53 35 22 27 24 48 DQ HQ HP ZC(D)UKD25

ZR

x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec.]