MQQ

2-M5 x 0.8 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F S + Stroke F H ZZ + Stroke (mm) Bore size (mm) A D NN F G1 P G2 MM S I ZZ H J N1 N2 NA M5 x 0.8 16 15 4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

6 13 8.5 Model S ZZ Z SS CXS25-10-XB19 10 106 82 CXS25-15-XB19 15 111 87 46 9 30 CXS25-20-XB19 20 116 92 CXS25-25-XB19 25 121 97 CXS25-30-XB19 30 126 102 (30) (Z) 2-M5 x 0.8 Thread depth 7.5 2-M8 x 1.25 Thread depth 12 CXS25-35-XB19 35 131 107 16 12 40 CXS25-40-XB19 40 136 112 CXS25-45-XB19 45 141 117 CXS25-50-XB19 50 146 122 CXS25-60-XB19 60 156 132 CXS25-70-XB19 70 166 142 CXS25-75-XB19

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Rubber Rubber w/ sp.controller Metal Rubber Rubber w/ sp.controller Metal Rubber Rubber w/ sp.controller Metal Rubber Rubber w/ sp.controller Rubber Rubber w/ sp.controller VQZ2150lC 200 40 15 or less 20 or less VQZ2151lC Single 2 Position 3 Position 44 15 or less 20 or less VQZ2151SlC 0.7MPa Flow rate (l/min (ANR)) 10 or less 13 or less VQZ2250lC 54 15 or less 20 or less VQZ2251lC SY Double

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

6, 10, 15, 20, 25, 32, 40 50, 63 Magnetically Coupled Rodless Cylinder Series 12-CY3B How to Order Clean series 12 Special treatment on sliding part Bore size (mm) 12 CY3B 300 15 Cylinder stroke (mm) Type Bore size Port thread type Symbol 6 10, 15 M3 x 0.5 M5 x 0.8 Rc NPT G Nil 20, 25, 32, 40 50, 63 TN TF Model Maximum manufacturable stroke Cushion Bore size (mm) Standard stroke (mm) Port

MQQ

N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8 x 1.25 13 25 8.5 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M26 x 1.5 18 Rc 1/8 10 M10 x 1.25 13 30 8.5 102.5 160 34.5 44.5 32 20.5 38 32 For details on rod end nut and mounting nut, refer to page 10-5-24. 10-5-20 20 Low

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model Bore size (mm) D-A9 A9V D-M9 D-M9V D-F9W D-F9WV D-F9BAL Number of auto switches 2 pcs. 10 5 15 10 20 10 15 20 1 pc. 5 5 15 5 20 10 15 2 pcs. 10 5 10 10 20 10 10 25,32,40,50 1 pc. 5 5 10 5 20 10 10 2 pcs. 10 5 10 10 15 10 10 63 1 pc. 5 5 10 5 15 5 5 Besides the models listed in How to Order, the following auto switches are applicable

MQQ

M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8

Wedge Cam Operation Gripper Series MHK2

3 15 5 9 10 0 -0.05 4 7.5 Note) When single acting, other port is used as bleed port. 21 M5 X 0.8 (Finger opening port) 2.5 MHKL2-20 /Long stroke model 18.6 4H9 4 deep +0.030 0 2-M5 X 0.8 thread 8 deep 24 21H9 1.5 deep +0.052 0 2-M5 X 0.8 thread 10 deep 4-M5 X 0.8 thread 10 deep Bottom hole dia. 4.3 through-hole 0 -0.1 5 13.5 16 0.02 8 Open 34 +1.2 0 70 68 32 46 30 0 -0.2 Closed 16 4H9 4

Compact Cylinder with Solenoid Valve/

Minimum Stroke for Auto Switch Mounting (mm) D-M9 10 D-M9V 5 D-M9W 15 D-M9WV 10 D-A9 10 D-A9V 5 Number of auto switches mounted Bore size (mm) 32 1, 40 50 2, 63 1 10 5 15 15 10 10 2 1 The outline dimensions for 5 mm stroke will be the same as those for 10 mm stroke. 2 The outline dimensions for 10 mm stroke will be the same as those for 15 mm stroke. 7 Prior to Use Auto Switches Common Specifications

Plug-in Unit

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 2-2-46 Base Mounted Series VQC Plug-in Unit VV5QC41 3(R) port 2-Rc 3/4 Flat ribbon cable connector assembly (26P) 1(P) port 2-Rc 1/2 AXT100-FC26-3: 5 m AXT100-FC26-2: 3 m AXT100-FC26-1: 1.5 m VQC SMC SMC SMC SMC

MHK2

34 +1.2 0 5 13.5 16 0.02 70 68 46 30 32 0 0.2 32 Closed 16 4H9 depth 4 +0.030 0 18 44.5 20 27.6 0.05 73.5 Auto Switch Mounting Groove Dimensions 100 4-M4 x 0.7 (Thread for mounting attachment) M5 x 0.8 (Finger closing port) Auto switch mounting groove (2 positions) Adjustment needle for finger speed 3 15 S O 15 4 10 0 0.05 5 9 7.5 Note) For single acting, one port is used as a breather

MHK2

34 +1.2 0 5 13.5 16 0.02 70 68 46 30 32 0 0.2 32 Closed 16 4H9 depth 4 +0.030 0 18 44.5 20 27.6 0.05 73.5 Auto Switch Mounting Groove Dimensions 100 4-M4 x 0.7 (Thread for mounting attachment) M5 x 0.8 (Finger closing port) Auto switch mounting groove (2 positions) Adjustment needle for finger speed 3 15 S O 15 4 10 0 0.05 5 9 7.5 Note) For single acting, one port is used as a breather

MHF2

40 104 90 20 E 7.7 14.8 15 19 25 E 0 -0.1 4-3.4 through (mounting hole) 20 27 1 27 1 4-5.5 M5 x 0.8 +0.1 0 Close: 0 Finger opening port E-E Open: 481 Use the attached hexagon socket head screws for mounting holes. 4-M4 x 0.7 thread depth 5 Mounting thread 8-M3 x 0.5 thread depth 4 Attachment mounting thread 80 M3 x 0.5 5 33 15 20 Accessory option: Hexagon socket head screw (special screws

Wedge Cam Operation Provides

34 +1.2 0 5 13.5 16 0.02 70 68 46 30 32 0 -0.2 Closed 16 32 4H9 depth 4 +0.030 0 18 44.5 20 27.6 0.05 73.5 100 Groove position for auto switch mounting 4-M4 X 0.7 (Thread for mounting attachment) M5 X 0.8 (Finger closing port) Groove position for auto switch mounting (2 positions) Adjustment needle for finger speed 3 15 S O 15 4 10 0 -0.05 5 9 Note) For single acting, one port is used

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Series 12-CY3B Magnetic rodless cylinder 15, 20, 25, 32, 40 How to Order Clean series 12 Special treatment on sliding part Bore size (mm) 300 15 12 CY3B Cylinder stroke (mm) Type Bore size Port type Symbol 15 M5 x 0.8 Rc NPT G Nil 20, 25, 32, 40 TN TF Model Maximum manufacturable stroke Cushion Standard stroke (mm) Bore size (mm) Port size Lubrication Model Rubber Air 15 1000 M5 x 0.8 Rc1

0.5

15 Discharge time [s] Discharge time [s] 15 15 15 15 Air flow level: 1 Discharge time [s] Discharge time [s] Discharge time [s] Discharge time [s] Air flow level: 1 Air flow level: 1 Air flow level: 1 10 10 Air flow level: 1 Air flow level: 1 10 10 10 10 Air flow level: 10 5 Air flow level: 10 5 Air flow level: 10 Air flow level: 10 5 5 Air flow level: 10 Air flow level: 10 5 5 0 0 0 200

Fieldbus system Ethernet POWERLINK compatible SI unit

2006h 00h DXD, IN 0 15 (Slot 2) RO : : : 2020h 00h RO *1: RO means Read Only data.

EXxx-OMY0006CN

Fig. 15-1 Dimensions of the Modules manifold Table 15-1 M 0 1 2 3 4 5 6 7 8 L1 113.6 167.6 221.6 275.6 329.6 383.6 437.6 491.6 545.6 L1 = 54n + 113.6 (8 ) 85 No.EX##-OMY0006CN 15. 15.1. EX245-FPS1/2/3 Table 16-1 1/2(XF1/2) No. SI Auto negotiation 1 LINK/ACT LED SI Table 16-2 PROFINET No.

HRX-OM-W060

25 Circulating fluid temperature[] Fig. 8-5 Cooling Capacity (HRL100-A-20) 8.4.2 HRL200A20 CH1 30 25 Ambient 20 temperature 32 Cooling capacity [kW] 15 Ambient temperature 45 10 This is the cooling capacity of the 5 CH1 side when 1 kW heat load is applied to the CH2 side. 0 15 20 25 Circulating fluid temperature[] Fig. 8-6 Cooling Capacity (HRL200-A-20) HRL Series 8.4 Cooling Capacity 8-

MHF2

Auto Switch Mounting Groove Dimensions M3 x 0.5 5 1.7 15 33 4 20 Accessory option: Hexagon socket head screw (special screws) 3.3 2-2.5H9 +0.025 0 depth 2.5 3 9 9 2-M4 x 0.7 thread depth 5 Groove for auto switch mounting 14 14 Mounting thread 15 38 12-3-15 16 Series MHF2 Dimensions MHF2-12D1 3H9 +0.025 0 depth 3 42 3H9 +0.030 0 depth 3 2-M4 x 0.7 thread depth 10 Mounting thread 4 58 4 40