SQ1000/2000

Uni-wire H System compatible 16 1 to 8 stations 16 stations SUNX Corporation: S-LINK System (16 outputs) compatible SUNX Corporation: S-LINK System (8 outputs) compatible 8 1 to 4 stations 8 stations D side Device Net, OMRON Corporation: CompoBus/D compatible 16 1 to 8 stations 16 stations OMRON Corporation: CompoBus/S (16 outputs) compatible OMRON Corporation: CompoBus/S (8 outputs) compatible

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Set of nos. above @2, @3, @4 8-29-6 7 Dual Rod Cylinder: Basic Type Series CXS Dimensions: 6 ZZ (58.5 + ST) ST SS (45 + ST) 16 8 5.5 Z (10 + 1/2 ST) 2-3.4 through 2-6.5 counterbore depth 3.3 M3 x 0.5 x 5l (Hexagon socket head set screw) 14 1 2.75 13 3 3 OUT 1 MX 5.6 3.2 MTS 0.2 28 0.2 22.7 (16) 37 35 16 28 MY 6.3 5 CY M2.5 x 0.45 x 6l 6 (Hexagon socket headcap screw) M3 x 0.5 x 12.5l, M3

Series IDG

Note 4) Refer to "Best Pneumatics No. 4" page 1.5-16 for regulator flow rate characteristics and pressure characteristics. Note 5) When very clean air is required, refer to page 46 "Precautions on Design", item 2.

High Vacuum Angle Valve

M: Size 16, 25, 40 only.

Refrigerated Air Dryers

Applicable air dryer Port size Rc A B C D Weight [kg] I D F IDF-BP317 IDF22E 1 134 405 928 198 4.4 IDF-BP318 IDF37E 1 1/2 980 7.7 IDU-BP336 IDU22E 1 93 445 1465 46 4.5 IDU-BP337 IDU37E 1 1/2 64 550 1635 70 8.0 I D U Dimensions [mm] IDU-BP338 IDU55E 2 53 530 1783 110 12.3 IDU75E 1918 Part no.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

21.5 28 34 41 6 6 6 8 16 21 25 30 6.3 12 10.3 18 7 10 11.5 14 3/16 3/16 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 #8-32UNC 3/16 3/16 #10-32UNF 5/16 5/16 1/4-28UNF 3/8 3/8 Knuckle pin and snap ring are contained.

CL

20 25 25 28 32 17 17 20 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 6.5 6.0 6.0 8.0 8.0 43 43 43 14 14 14 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 Without rod boot With rod boot Bore size (mm) P J K KA L MM N RR S U W H Z ZZ e f h Z ZZ l 36 45 45 60 60 75 75 75 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke

One-touch Fittings Series KQ2

Weight (g) M L1 A L2 P Q D 1 8 5 32 3 16 1 4 5 16 1 8 5 32 3 16 1 4 5 16 KQ2U01-99 KQ2U03-99 KQ2U05-99 KQ2U07-99 KQ2U09-99 10 12 17 19 22 2 2.5 3.5 4.6 6 15.5 16 16.5 17 18.5 35 35.5 39.5 39.5 46 9.6 10.4 11.4 13.2 15.2 9 9.7 10.6 12 13.7 9.6 10.4 11.4 13.2 15.2 50 51.5 56 56.5 64.5 17.5 18 20.5 21.5 24.5 KQ2U Metric e v i t c e f f E m m ( e c i f i r o 2) . t W ) g ( e l b a c i l p p A

Rotary Table/

GE H Size 10 20 30 50 55.4 50 9.5 34.5 27.8 60 4.5 28.5 45 46 20H9 5 15H9 52.9 44.3 33.5 14 97.2 80 8 4 3 4.5 20 15.6 11 7.5 45.2 13 70.8 65 12 46 30 76 6 30.5 60 61 28H9 9 17H9 61.8 55.3 43 18 117.1 100 10 6 2.5 6.5 25 19.5 14 9.5 56.4 17 75.4 70 12 50 32 84 6.5 33.5 65 67 32H9 9 22H9 63.1 60.3 46 19.5 123.4 110 10 4.5 3 6.5 27 21.5 14 9.5 61.5 17 85.4 80 15.5 63 37.5 100 10 37.5 75 77 35H9

Table of Contents

VS4 16 stations Max. 16 stations.

High Vacuum Angle Valve, XL Series

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46.

V

T Y P E F L AT W I T H R I B I: M6X1 I: M5X0.8 Y Model A B C D E F G H H Flat Flat with rib G ZPR10 U C 10 12 12 21 29.9 46 20 67 72 3 1.7 25 ZPR13 U C 13 15 12 21 29.9 46 20 67 72 3 1.8 25 ZPR16 U C 16 18 12.5 21.5 30.4 46.5 20 67.5 72 3.5 1.2 25 D E E P T Y P E I: M6X1 I: M5X0.8 Model A B C D E F Y G H H G ZPR10D 10 12 15 24 32.9 49 20 70 75 6 25 ZPR16D 16 18 16 25 33.9 50 20 71 76 7 25

Table of Contents

Refer to How to Order for standard specifications on pages 14-20-3, 16, 23, and 31.

VQZ1000/2000/3000

VQ2000FPG-FB 01 1 station 0.8 to 1.0 Nm 16 16 stations VVQ2000-FPG-066 stations manifold VQ2000-FPG-C6C6-D: 3 sets VQ2000-FPG-C8C8-D: 3 sets Double check block Note) It is the tightening torque for mounting a bracket for the perfect block.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

High Flow/ Power Saving Type Refer to page 46 for details.

PSxx-OMU0008CN

-A1 C A3 ZS-46-E B ZS-46-B E ZS-35-B D ZS-46-D + F ZS-35-E -9No.PS-OMU0008CN-D / A ZS-46-A1 38L(2 ) C ZS-46-E 310L(2 ) ZS-46-B ZS-35-B ZS-46-D + ZS-35-E ZS-46-5F 5 2 m ZS-27-01 ZS-35-01 -10No.PS-OMU0008CN-D OUT1 LCD OUT2 () LCD 4 ON/OFF ON/OFF (kPaMPa) -11No.PS-OMU0008CN-D digit() 1digit=1kPa 1,2,3,,99,100 1kPa -0.1001.000[MPa]F.S.=1.000(-0.100)=1.100[MPa]

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

GE H Size 10 20 30 50 55.4 50 9.5 34.5 27.8 60 4.5 28.5 45 46 20H9 5 15H9 52.9 44.3 33.5 14 97.2 80 8 4 3 4.5 20 15.6 11 7.5 45.2 13 70.8 65 12 46 30 76 6 30.5 60 61 28H9 9 17H9 61.8 55.3 43 18 117.1 100 10 6 2.5 6.5 25 19.5 14 9.5 56.4 17 75.4 70 12 50 32 84 6.5 33.5 65 67 32H9 9 22H9 63.1 60.3 46 19.5 123.4 110 10 4.5 3 6.5 27 21.5 14 9.5 61.5 17 85.4 80 15.5 63 37.5 100 10 37.5 75 77

Round Type Hydraulic Cylinder

10 16 12 8 41 5 30 5 M8 x 1.25 13 26 19 15 M22 x 1.5 1/8 13.5 81 14 136 149.5 25 25 f8 Up to 800 19.5 M10 x 1.25 22 17 10 16 12 16 12 8 46 6 32 5.5 13 28 19 15 M24 x 1.5 1/8 14.5 81 15 142 156.5 32 31 f8 Up to 800 21 M14 x 1.5 24 22 12 16 16 19 12 8 53 8 40 7.5 13 36 19 15 M30 x 1.5 1/8 18.5 87 20 160 178.5 40 34 f8 Up to 800 21 M33 x 2 M16 x 1.5 24 24 12 24 18 21 14 11 54 10 48 7.5 19 44

VZ100/300/500

Made to Order Specifications (For details, refer to page 4-6-46.) 4-6-14 15 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ300 External Pilot VZ300R JIS Symbol VZ31R Pilot valve pressure is supplied separately from the main valve pressure through the use of a separate supply port.

Cylinder with Lock Series CNS

D C NT-12 NT-16 125, 140 160 M30 x 1.5 18 46 53.1 44 M36 x 1.5 21 55 63.5 53 H B 12 Series CNS Accessory Dimensions Single/Double Knuckle Joint Mounting H A 3.5 (mm) Applicable knuckle joint part nos.