Micro Mechanical Valve Series VM1000

EXH.1 (C1) 2 (C2) 4 93.7 23 19 VH 18.5 18.5 12 CYL.2 CYL.1 14 12 21 20 3 (E1) 1 (S) 5 (E2) VHS 0.5 MPa supply 30.5 26.4 3 x 1/4 VHS T.T.

ITV

(For details, refer to page 14-8-11 in Specific Product Precautions.) 26.5 PPA Bushing assembly 2.7 AL Note) For dimensions of the cable connector, refer to single unit on page 14-8-8. 14-8-9 10 Series ITV0 Dimensions Manifold 20 40 20 40 4-M3 x 0.5 thread depth 3 Mounting hole 11 11 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Misc. 14-20-59 How to Order Bowl Assembly 14-20-62 Precautions 14-20-64 Information on Items to be Discontinued and Equivalent Products Auto-Drain Valve, Motor Operated Auto-drain, Heavy Duty Auto-Drain, Pressure Differential Gauge 14-20-49 Related Products Note) It describes the degree of compressed air quality based on ISO8573-1: 1991 and JIS B 8392-1: 2000. 14-20-1

High Purity Fluoropolymer

Model G F B H L E M M H LQ1T2A LQ1T1A 2 1/8" 10 11.5 18.5 8 4 1/2" 3/4" 3/8" 1/2" 1/4" 3/8" 1/8" 3/16" 1/4" LQ1T3B LQ1T3A LQ1T2C LQ1T2B 15 16.5 28 14 12 6 4 25 1 5 Class 6 23 36.5 17 18 9 20 LQ1T4A LQ1T4B 6 28 11 22 21 45 20 LQ1T6B LQ1T6A LQ1T5B LQ1T5A 7 29 39 26 28 14 54 3/4" 1" 8 39.5 49 18 36 36 69.5 14 Series LQ1 Dimensions Panel Mount Union: LQ1P Metric sizes Applicable tubing O.D.

HRX-OM-X084

20. 9-10 9.4.4 HRR010-W-20. 9-10 9.5 Heating capacity . 9-11 9.5.1 HRR010-A-10. 9-11 9.5.2 HRR010-W-10. 9-11 9.5.3 HRR010-A-20. 9-12 9.5.4 HRR010-W-20. 9-12 9.6 Pump capacity. 9-13 9.6.1 HRR010-A/W-10 . 9-13 9.6.2 HRR010-A/W-10-T1 . 9-13 9.7 Required facility water flow (for water-cooled type) . 9-14 9.7.1 HRR010-W-10/20. 9-14 9.8 Types of Hazard Labels . 9-15 9.8.1 Locations of Hazard Labels

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

to 500 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 6 14 9 50 Up to 600 20 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25 7 18 9 63 Up to 600 20 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 7 18 11.5 80 Up to 750 20 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 10 22 13.5 100 Up to

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

CY1L15/20/25/32/40 (mm) d B A L JK J HI HG H G FB FA D C Model LD HT HS HP HO HB HA GP EB EA CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 12 9.5 7.5 75 9.5 M6 x 1.0 14 16 40 6.5 6 3 16.6 5 5.6 16 25 39 38 4 6.5 65 13 6 16 9.5 9.5 86 10 M6 x 1.0 16 18 46 8.5 21.6 5.2 5.6 20 31 45 44 10 9 80 16 11 9.5 86 10 M8 x 1.25 21 23 54 8.5 7 4 26.4 6.5 7 20 39 53 52 18 9 90 14 8 20 14 10.5 100 15 M10 x 1.5

Cylinder with Lock Series MNB

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

MU

Part no. +0.058 0 +0.058 0 +0.058 0 +0.070 0 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 25 32 40 50, 63 25 32 40 50, 63 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 RQ MU DU1 R1 NZ NX NDH10 NL NL NO U1 NO NX R1 Applicable pin Part no. Part no.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Station 20 24 11 24 24 SOL.a 3 SOL.b Station 5 3 SOL.b Station 5 SOL.a Station 4 15 SOL.a Station 4 15 Station 2 SOL.b 15 2 SOL.a Station 3 2 SOL.a Station 3 SOL.a 2 SOL.a Station 2 14 SOL.a Station 2 14 Station 1 SOL.b 14 1 SOL.a Station 1 1 SOL.a Station 1 SOL.a 1 The common polarity should be the same as the common specifications of the valve to be used.

CHKD/CHKG

86 9 51 18 94 14 19 15 M12 x 1.75 7 6.6 33 16 79 14 depth 8.6 98 55 11 22.4 108 23 19 20 M16 x 2 7 9 37 20 90 111 14 17.5 depth 10.8 60 28 126 24 27 24 M20 x 2.5 8 11 43 24 104 130 16 20 depth 13 67 146 35.5 30 33 M27 x 3 33 9 13 52 30 121 23 depth 15.2 151 18 78 45 172 41 38 36 M30 x 3.5 14 15 63 35 144 26 depth 17.5 179 22 96 56 208 50 43 45 M39 x 4 21 17 76 40 174 Note 1) Body dimensions

KJ

(inch) Connection thread UNF NPT H (Width across flats) 8.4 9.6 <10-32 UNF> <10-32 UNF> Min. port size D1 Note) D2 L1 M A Weight (g) Model L2 L3 Applicable tubing L1 M 5 18 6 18 19 16 19 37 30 38 67 60 70 85 104 10 14 11 15.5 14 11.5 14 17.5 17 20 20.5 17.5 19.5 21 24 12.7 15.5 2.3 2.5 2.5 2.8 3.5 2.3 20 29.5 20 29.5 29.5 27 29.5 38.5 31 38.5 45 41 45 42 50 16.5 25.5 16 25.5 25.5 23.5 25.5

V

Stations Max) V A LV E S TAT I O N S 02-10 .Double Wiring Specifications 11-20 .Applicable up to 20 Solenoids.

C76

/Double Rod Accessory Dimensions [First angle projection] Single Knuckle Joint/DIN648 Double Knuckle Joint/DIN71751 CJ1 CJP CJ2 CM2 CG1 MB (mm) (mm) MB1 Thread e M10 x 1.5 M12 x 1.75 b 10 12 d 40 48 f 10 12 g 18 23 c 20 24 j 12 15 a 20 24 0 l3 14 16 Model GKM10-20A GKM12-24A Thread d3 M10 x 1.5 M12 x 1.75 h 43 50 d6 20 30 b3 b1 14 16 l 20 22 d7 19 22 Bore 32 40 Model KJ10DA KJ12DA Bore 32

C76

, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) (mm) a 20 24 j 12 15 c 20 24 g 18 23 f 10 12 d 40 48 b 10 12 Thread e M10 x 1.5 M12 x 1.75 0 l3 14 16 Model GKM10-20A GKM12-24A h 43 50 d6 20 30 b3 b1 14 16 l 20 22 d7 19 22 Thread d3 M10 x 1.5 M12 x 1.75 Bore 32 40 Model KJ10DA KJ12DA Bore

Modular F.R.L. Units

20 20 20 20 20 20 15 The combination of metal bowl: 2 and 8 is not available. 16 When choosing with W: Filter drain port, the drain cock of a lubricator will be with barb fittings. 17 For pipe thread type: NPT.

•

F:M5.X O.8 I F:M6 x 1 D E t3 I D." ~ ' G 1J 2O 8 3 19 19 25 ' 45 14 3 3.5 24 15 1.7 I ZPT20~ 20 23 8 12 4 40 ZPT02U 2 2.6 1.2 ZPT04U ' 4 . .. a:.e 1.6 ZPT06U 6 7 08 '9 ' 12 ZPT2Sg . 25 28 I 14 3 .8 4 25 , 45 , ''24 '' . '5 : .

Applicable Auto Switch Model

Refer to the p.5.3-6 for the details of contact protection box. 13 13 13 13 13 13 13 13 13 13 13 13 14 14 14 14 14 14 14 14 14 14 14 16 15 17 17 17 17 14 16 16 13 13 13 13 Note) Average value at normal temperature including hysteresis.

MU

15 20 20 LD LU 13 14 17 23 23 LC 16 18 20 28 28 LC 18 22 26 32 32 LB 27 31 36 46 46 LB 27 31 36 46 46 LA 35.5 41 47 62 62 LA 35 41 46 62 62 L 52.5 59 67 81 84 L 52.5 59 67 81 84 ZZ 115.5 127 137 171 175 Model MU25 MU32 MU40 MU50 MU63 Model MU25 MU32 MU40 MU50 MU63 Applicable pin 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 0.2 0.4 0.2

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

19 14 Up to 1000 -X Lube Non-lube Air-hydro 1/2 160 161 212 112 255 16 M14 x 1.5 M30 x 1.5 50 128 15 47 36 90 31 35 59 43 14 19 20 Up to 1000 3/4 180 182 236 118 275 18.5 M16 x 1.5 M36 x 1.5 56 144 17 53 40 36 90 39 59 43 14 19 20 Up to 1200 203/4 200 204 265 132 320 18.5 M18 x 1.5 M40 x 1.5 63 60 162 45 20 41 115 70 39 48 17 24 25 Up to 1200 3/4 1 225 226 280 150 335 18.5 M20 x 1.5 M45