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series 02 03 04 06 10 12 14 20 Caution L (2) Note 1) AS800 is available as special.

M2 M3 m2 m3 16 25 16 25 5 4 3.5 18 16 14 E-MY2C 13 14 10 35 35 30 7 6 7 15 13 13 E-MY2H 28 26 26 32 30 30 The above values are the maximum allowable values for moment and load weight. Refer to each graph regarding the maximum allowable moment and maximum load weight for a particular slide table speed.

Please refer to pages 42 and ,15 of this catalog for more intormation and precautions regarding the optional origin home switch.

Use Pn008.1 to activate or not the warning detection. 42 - Revision history No.LEC-OM07301 Feb./2014 1st printing No.LEC-OM07302 Jul./2014 2nd printing No.LEC-OM07303 Apr./2015 3rd printing No.LEC-OM07304 (No.JXC-OMT0068) Nov./2017 4th printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are

Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated

pling 1 3 Magnet 14 Damper l 5 Cushion damper Rubber t6 Molor cover Fl6sin l 7 Photo micro snsol tl0stric lmabr$ $enies t)(F ur &hdim clnil & D|ju flilir Greater than 50% duty cycle?

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 14-14-6 to 14-14-8 for precautions on every series. Suffix Basic size (Applicable compressor rating) T With terminal (Provided as standard for HAA37.)

For air gripper and auto switch precautions, refer to the Handling Precautions for SMC Products and the Operation Manual on the SMC website: http://www.smcworld.com Refer to pages 12 to 14 for cylinders with auto switches.

3 2 1 110 VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Symbol A: Non-locking push type A (projecting) N.C. 0.5 MPa N.O. 1 MPa N.C. 1 MPa 4 1 6A 8A 10A 10A 15A 20A 25A 32A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz 7 Valve size 1 5 6 24 VDC 12 VDC B: Slotted locking type B (tool required) 7 240 VAC 50/60 Hz 15 (11) 2 Semi-standard For other rated voltages, please consult with SMC. 20 (14

Dimensions MSUA20 Scale: 50% MSUA20-S/SE 8-M5 x 0.8 depth 10 C Top ported: MSUA20-SE 78 A port B port 14 2 M5 x 0.8 48 59 B 38 15.5 42 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M6 x 1 depth 7 22.5 5 +0.025 0 3H9 Long groove depth 5 (Positioning pin hole) A

No.EX-OMS0026CN TMSI EtherNet/IP // EX600-SEN3/4 EX600-ED# 2 8 9 10 12 12 14 SI 15 15 16 16 17 LED 21 25 25 26 27 27 28 28 29 29 29 31 32 42 42 58 62 63 64 EDS 64 TM 64 Logix Designer Device Level Ring (DLR) 69 TM 69 QuickConnect TM 71 EtherNet/IP Web 77 86 -1No.EX-OMS0026CN 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating

Plate mounting support bracket Body mounting side support Auto switches mountable (both sides) Types of Units and Parts Type of units and parts Type of units Type of parts Single units P.1 to P.9 Combination units P.11 to P.18 Set parts P.11 to P.14 Parts P.16 Spare parts P.4 & 5 Optional parts P.2 Catalog pages Parts for combination units.

No.PS-OMM0006CN-E // ZSE40A(F) ISE40A 2 9 12 13 16 16 18 20 23 23 25 25 25 F0 27 F1 OUT1 28 F2 OUT2 31 F3 33 F4 34 F5 / 36 F6 38 F11 39 F80 40 F81 41 42 F90 42 F97 44 F98 46 F99 48 49 52 52 53 60 60 63 -1No.PS-OMM0006CN-E (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

14 2 x 3.4 (Through holes for mounting) 17 37.4 11.5 2 x M3 x 0.5 (Pilot port) 32.5 + Stroke 34 + Stroke 31.5 7.7 11.5 23 24.5 + Stroke 16.3 + Stroke 14.4 23 (37.4) 2 x M3 x 0.5 depth 2.5 1.5 8 +0.1 6 0 depth 2.5 Auto switch 14 MXZ12R(Pilot port location: Right) MXZ12L(Pilot port location: Left) 2 x M3 x 0.5 (Pilot port) 2 x M3 x 0.5 (Pilot port) 16.3 + Stroke 16.3 + Stroke 7.7 7.7 Auto

45.6 40.6 15.2 27 18 39 30 18 13.6 2.7 12 PF3W540 1/2 3/4 98 71 38 53.6 48.6 19.2 32 28 49 35 28 16.8 2.7 12 PF3W511 3/41 124 92 46 62.6 57.6 23 41 42 63 48 28 18 3.5 14 S T U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0009CN-F PF3W521 2X A AA B DD E F G H J K L N P 11/4,11/2 104

Port size Size Applicable body size 650 850 Symbol 10 14 20 1 1 1 2 2 *Specifications and dimensions for the 90-series are the same as standard products.

17 22 16 24 43 45 39 80 62 80 M 14 8 18.5 A 14 42 17 L 54.3 47.3 49.3 60.5 54.5 17 24 10 21 22 19 22 34 12 22 Connection thread Reference dimension after screwing into R threads.

28 12 6.2 6.2 14 8 34.1 15.2 14 13.0 10.5 31.1 17 33.9 35.9 40.3 43.2 10 17 38 17 18.5 24 19.5 16.5 12 40.7 20.9 20.9 22 25.5 45.7 24.8 21.3 Reference dimensions after R(PT) installation.

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 71.5 31 6.5 12.5 28 14 12.8 M4 22 45.5 44 43.5 58 41 46.5 99 43.5 66 1/8 VCW22 18 36 74.5 31 8.5 12.5 28 18 12.8 M4 22 46.5 44 44.5 58 42 46.5 99 44.5 66 1/4 22 40 88 36.5 11 15 32 20 19 M5 24 57 46 55 60 52.5 48.5 101 55 68 1/4, 3/8 VCW32 30 50