Rotary Table

less 31 49 37 5 or less 20 190 35 62 50 10 or less 39 66 33 5 or less 30 190 39 68 43 10 or less 43 72 29 5 or less 50 190 49 83 33 10 or less 53 87 22 5 or less 70 190 54 95 30 10 or less 58 99 21 5 or less 100 190 61 108 27 10 or less 65 112 18 5 or less 200 190 81 139 21 10 or less 85 143 15 5 or less Operating range m: Value of the operating range Lm of a single auto switch converted

Modular Type Regulator Series AR

Applicable model Accessory AR10 AR20 AR25 AR30 AR40 AR40-06 AR50 AR60 AR10P-270AS AR20P-270AS AR25P-270AS AR30P-270AS AR40P-270AS AR40P-270AS Bracket assembly Note 1) AR50P-270AS Note 5) AR50P-270AS Note 5) Note 6) Note 6) AR10P-260S AR20P-260S AR25P-260S AR30P-260S AR40P-260S AR40P-260S Set nut G36-10-01 G36-10-01 G36-10-01 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G27-10-R1 Round 1MPa Note

5 Port Air Operated Valve

VFA1000/3000/5000 Series 5 Port Air Operated Valve Body Ported/Single Unit Dimensions: VFA3000 Series/Body Ported 2 position single VFA3130(-F)(-P) 01 02 2 position double VFA3230(-P) 01 02 63.5 23 1/8, 1/4 [4 (A), 2 (B) port] 1/8, 1/4 [4(A), 2(B)port] 2 x 4.3 (For mounting) 2 x 4.3 (For mounting) 25.5 10 SYA 10 4A 4A 5 SYJA 1 1 26.4 26.4 20 20 10 1/8 (Pilot port: Upward) 1/8 (Pilot port

PFA/PFW

-m-m PFA750-m-m Dry air, N2 Heater type 1 to 10l/min (0.04 to 0.35SCFM) 0.1l/min (0.004SCFM) 5 to 50l/min (0.18 to 1.77SCFM) 0.5l/min (0.02SCFM) l/min, CFM x 10-2 Instantaneous flow rate Cumulative flow rate Display units l, ft3 x 10-1 0 to 0.5MPa (0 to 72psi) 1.0MPa (145psi) 3kPa (50l/min) [0.44psi (1.77SCFM)] 0 to 9l (0 to 35,300 ft3) 0 to 50C (32 to 122F) with no condensation 5% F.S.

IDX-OM-W020

S 10 S 10-1 10-2 IDFB3E PE 10-1 IDFB Series 10 1 IDX-OM-W020 10 S IDFB4E 11E PE IDFB15 PE 10-2 IDFB Series 10 2 IDX-OM-W020 11 T 11 T 11-1 IEC 11-2 AC115V,5A DC24V,5A (20V,5mA(AC/DC)) 11-3 ON ON/OFF 3 () 5 /1 () 11-1 IDFB Series 11 1 IDX-OM-W020 11 T 11-4 IDFB4E 11E PE 1 2 3 : 0.25inch (6.5mm) : 0.002inch 2 (1.25mm 2) 0.003inch 2 (2mm 2) : 0.0008inch 2 (0.5 mm

Process Valve

table below G (Grommet terminal: E) H (Conduit terminal: T) I (DIN terminal: D) In the case of EZ or TZ, the length is longer by 10 mm.

Air Cylinder CLA Series Fine Lock Model

-28 VDC) 24 VDC (10-28VDC) 24 VDC: 1 mA or less 24 VDC: 1oFA or less 24 VDC: l0|lA or Less 24 VDC: 1 mA or less Rd: ( ri Best 1 mS or less $erios CLA A||l0 $t/t|ilc SolidState Switch .,:,. 24 VDC (10-26 VDC) 28 VDC 1.5 V or less (1omA: 0.8 V or less) 24 VDC: 10!

Title not found

-28 VDC) 24 VDC (10-28VDC) 24 VDC: 1 mA or less 24 VDC: 1oFA or less 24 VDC: l0|lA or Less 24 VDC: 1 mA or less Rd: ( ri Best 1 mS or less $erios CLA A||l0 $t/t|ilc SolidState Switch .,:,. 24 VDC (10-26 VDC) 28 VDC 1.5 V or less (1omA: 0.8 V or less) 24 VDC: 10!

PFxx-OMS0001CN

DC(+) (OUT) 2 OUT2// 3 DC(-) 4 OUT1 (IN) M8 M8 IN OUT (UP) (SET) (DOWN) () OUT1OUT2 ON (1 ) (UP) ON/OFF (SET) (DOWN) ON/OFF -11No.PF-OMS0001CN-A F.S. ( 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF () (0100)() 90 () (0100) ()90ON(OFF) 0 1 atm()[nor] () 10 L/min 10 L ON OFF ON OFF 0 -12No.PF-OMS0001CN-A , , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L

Rotary One-touch Fittings Series KS/KX

28 34 43 69 77 95 89 106 14 4 8.6 8.6 29 32 33 34 1 8 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 18.5 15.2 18 6 27 17 21.6 14.9 R(PT) 42 10 18.5 32 23.5 21 22 30.5 25.0 7 43 44 45 12 24 20.9 35 26 22 8 35.1 35.1 R(PT) Reference dimensions after R(PT) thread installation. 60 Series KM One-touch Fittings Manifold Compact piping.

PF-OMM0004_C

L/min 10 L ON OFF ON OFF , , 2 5 10 L/min 5 ,10550 L -14No.PF-OMM0004-D ON-OFF 1 L/min ,10 11 12 1 L/min () SI SI PF3W ON-OFF () ON 0 PVC -15No.PF-OMM0004-D IN IN (75 ) 9022545 -16No.PF-OMM0004-D (PF3W704/720/740 ) (M44 ) 8 1.5 mm (81 ) (PF3W711 ) (M54 ) 2 mm (81 ) -17No.PF-OMM0004-D (PF3W704/720/740 ) 3.04 8 0.50.7 Nm (81 ) ,, (4 ) (PF3W711/721 ) ,(4.0,4 ) 1.01.2

Precision Regulator

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020/2120 IR3000 IR3010 IR3020/3120 P362030-201 Bracket P36201023 P36202028 Pressure gauge234 G33-2-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-4-01 G43-10-01 G33-4-01 G43-4-01 1 A bracket and two mounting screws (M5 x 35) To mount the bracket, remove two body screws (M5 x 30) on the name plate on the opposite side and replace the attached

3 Port Air Operated Valve

mounted 1(P) port 3/8 3(R) port 3/8 2(A) port 3/8 2 to 20 stations VPA500 P. 1569 VV3PA5-42 Individual EXH 1(P) port 3/8 3(R) port 3/8 2(A) port 3/8 VV3PA7-41 Common EXH 1(P) port 1/2 3(R) port 1/2 2(A) port 1/2 2 to 20 stations VPA700 VV3PA7-42 Individual EXH 1(P) port 1/2 2(A) port 1/2 3(R) port 1/2 Note) Supply pressure to 1(P) ports and exhaust air from 3(R) ports on both sides for 10

VNB

C.O. 1 2 1 4.1 4.2 Normally closed Normally open Double acting VNB0 VNB02 VNB03 VN 1 4 7.7 7.8 40 12 (P1) 12 (P1) 10 (P2) LVC 6.3 6.4 2 Air operated LVA 2 (B) 1 (A) 2 (B) 1 (A) 2 (B) 1 (A) 11.4 11.5 50 10 (P2) Note) The flange should be JIS B 2210 10K (ordinary style) or its equivalent.

JXCx-OMT0030CN

JXC-OMT0030CN GWProfibus / LEC-GPR1 1 . 4 2 . 6 21 . 6 22 . 6 23 . 7 24 () . 8 1 . 8 2 . 8 3LEC . 8 4 . 8 5 . 8 6 . 9 7 . 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23

KS/KX

43 69 77 95 89 106 1 8 1 4 14 8.6 8.6 4 29 32 33 34 1 8 15.2 18 27 6 18.5 21.6 14.9 17 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 42 10 18.5 32 23.5 21 30.5 25.0 22 7 Kl 43 44 45 20.9 24 35 26 22 8 35.1 35.1 12 Ml Reference dimensions after R(PT) thread installation.

Air Cylinder CP Series Cylinder Positioner Assembly

5 1.57 (40) 1.98 (25) 4.96 (1261 1.42 (36) I 40 ;;&i, 35.5 i3l ) 2.56 t65) 2.83 l72l '0.08 (2561 t 1 0 6 2.56 t65) 0.55 3 . 1 9 10.,13 (265) 1 t 4 2 t2901 'Min sboke 0.?

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(-Q) 10-SS3YJ3-42(-Q) 10-SS3YJ3-S42(-Q) Applicable base Sub-plate 10-SS3YJ3-41(-Q) 10-SS3YJ3-S41(-Q) 10-SS3YJ3-42(-Q) 10-SS3YJ3-S42(-Q) Applicable base 10-SS3YJ3-20(-Q) Manifold base Manifold base Manifold base Note) Add suffix -Q for the CE-compliant product.

CXS

Opposite side: Same) 2-M5 x 0.8 depth with 4.5 (Piping port) (Opposite side: Same) 3 8 6 22.5 11 Z (10 + 1/2 ST) (13) 4 (mm) Z S SS ZZ Stroke Model 10 15 23 55 68.5 CXS6-10 20 20 33 65 78.5 CXS6-20 30 25 43 75 88.5 CXS6-30 40 30 53 85 98.5 CXS6-40 50 35 63 95 108.5 CXS6-50 15 Series CXS Dimensions: 10, 15 Stroke ZZ SS 9 J D B M Y (Hexagon socket head set screw) L Z I 1 1 G 0.2 (G) H A P 6.3

Slider Type Ball Screw Drive/11-LEFS Series

ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEJ LEL 10 10 Suction flow rate: 0 L/min Particle concentration [particles/m3] Particle concentration [particles/m3] LEM ISO Class 5 upper limit Suction flow rate: 0 L/min LEY 10 10 LES ISO Class 5 upper limit Suction flow rate: 10 L/min LEPY LEPS 1000 1000 Suction flow rate: 20 L/min LER ISO Class 4 upper limit ISO Class 4 upper limit