2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

. *2 Excludes the PF2M725 *3 Made to order (Produced upon receipt of order) Flow ratio*2 100: 1 25 50 100 200 Flow range [L/min] Port size Smallest settable increment 0.1 0.01 0.05 0.02 0.3 0.5 1 2 3 5 10 0.01 1 0.001 PF2M701 0.02 2 C43, C6, 1/8 PF2M702 0.05 5 PF2M705 0.01 0.1 10 PF2M710 0.3 25 PF2M725 C6, N7, 1/8 0.5 50 PF2M750 0.1 1 100 PF2M711 C8, N7, 1/4 2 200 1 PF2M721 New New Compatible

IDX-OM-W023

R T 600mm 1 10% () ( 60cm 1 ) 10% 3 IDU Series 5-1 5 1 IDX-OM-W023 5 () 60cm 1 2 INOUT INOUT () IDU Series 5-1 5 2 IDX-OM-W023 6 6-1 IDU8E-10/20 IDU11E-10/20 IDU15E1-10/20 50Hz 1.1 1.5 2.6 3/min (ANR)1 m 60Hz 1.2 1.7 2.8 0.7MPa 55 32 10 580 0.151.0MPa 240 (85%) AC100V 50/60Hz AC100/100110V10%(4) AC200V 50/60Hz AC200/200220V 10%(4) AC100V 50/60Hz 3.4/3.5 5.7/6.0 4.6

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Valve model Pilot valve model Note) VQZ115-L VQ110-M Note) For the special voltages, please consult with SMC. VQZ115-M VQ110-L 4-14-41

VZ100/300/500

Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Made to Order Specifications (For details, refer to page 4-6-46.)

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Coil voltage 1 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others Valve style Pilot valve style 2 3 VQZ115l-lLl VQ110l-lMl 4 VQZ115l-lMl VQ110l-lLl 5 6 9 Consult SMC when requiring grommet, AC specification and others. 2.10-39

IDX-OM-W029

/60Hz) 4.2/4.8 6.7/7.3 8.2/9.3 AC230V (50Hz) 960 1570 2300 AC200V (2) (50/60Hz) 1100/1450 1570/2050 2000/2850 AC230V (50Hz) 10 20 AC200V (3) A (50/60Hz) 10 15 R407C (HFC) AC230V (50Hz) 45010 76010 55010 74510 g AC200V (50/60Hz) 47010 83010 55010 74510 R1 R11/2 R2 mm 10 1 2 kg 90 130 160 166 kW 22 37 55 75 1ANR 2065% 2 330mA 4() IDU Series 6-1 6 1 IDX-OM-W029 6 6-2 GWP (GWP

V100

V100-31-1A V100-74-1 Material FKM, Steel Aluminum die-casted Number 10 11 Note Gasket, 2 screws Gasket assembly Sub-plate VFN R A P 2 4 8 6 11 10 1 How to Order Connector Assembly For DC: SY100 30 4A For 100 VAC: SY100 30 1A For 200 VAC: SY100 30 2A For other voltages of AC: SY100 30 3A SY100 30 A Lead wire length Without lead wire: (With connector and 2 sockets) Nil 6 10 15 20 25 30 50

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

/60 Hz 00 01 Without sub-plate Rc 1/8 (6A) Accessory 2 200 VAC, 50/60 Hz Without sub-plate (For manifold) 4 Indicator light (DC is possible only for DL.)

IDX-OM-W026

10-1 10-3 . 10-2 11 M 11-1 . 11-1 11-2 . 11-2 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-2 13-6 . 13-3 14 14-1 . 14-1 2 IDX-OM-W026 i i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W026 i i-2 5 i 2 1 IDF Series i-2 i-2 IDX-OM-W026 i i 2 2 i 2 3 50

IDX-OM-W053

IEC 14-2 AC200V/2A DC24V/2A 20V/3mA (AC/DC) 14 1 14 T 14-3 ON ON/OFF 3 3 5 () 14-4 1) 2) 3) 4) : L,N PE 1,2 2,3 3 L N 1 2 PE M3 6.5mm :1.25mm 2 (17) (22) (21) (28) 14 2 14 T 14-5 (50/60Hz) AC200/200,220V GFCI GFCI R R TB L PE N 1 2 3 ILS MC TDR V V EDV MC TDR MC PTC OLR CM PE MC FM1 PE PRS P FM2 PE MC TDR CM FM1,2 OLR PTC PTC ILS PRS TB MC TDR C11 PE

VP4_50-OMU0001

(2) () Sol.1: Sol.2: 1.NPN Sol.1: Sol.2: +() -() 2.NPN 5 VP450-OMU0001 VP4*50, VP4*70, VVP4*0 Series 5 1 ()ISO VG32 2 ()ISO VG32 1 Rc Nm Rc 1/8 35 Rc 1/4 812 Rc 3/8 1520 Rc 1/2 2025 Rc 3/4 2830 Rc 1 3638 Rc 1 1/4 4042 Rc 1 1/2 4850 P P A,B () 5 +/30N 6 VP450-OMU0001 VP4*50, VP4*70, VVP4*0 Series 5 1 ()ISO VG32 2 ()ISO VG32 EAEB 3 30 ( ) , 7 VP450-OMU0001 VP4*50, VP4*70,

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage Lead wire length 5 6 V S R 1 2 Electrical entry 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Nil 6 10 15 20 25 30 50 G H L LN LO M MN MO W0 Grommet, 300 mm lead wire Grommet, 600 mm lead wire

3 Port Solenoid Valve Rubber Seal Series SY100 1

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

IDX-OM-W017

IDFA4E15E1 L N PE M3 6.5mm 1.25mm 2 1-1 IDFA Series 1 4 IDX-OM-W017 2 2 , 2 1 IDFA4E15E 20kg 2 2 2 2 2 1 2000m 240 050 600mm 600mm 600mm ( 600mm ) 600mm 2-1 IDFA Series 2 1 IDX-OM-W017 2 2 2 2 6 6-2 IDFA4E15E 2 2 3 50 50 2 2 4 10mm 2-2-2 IDFA Series 2 2 IDX-OM-W017 2 ( 2 2 5 6-1 IEC AC230V 30mA 5A 216AWG,3 ,812 1.25 0.1m 30m M3 1.25-3 6.5mm ()M3 0.61Nm

IDX-OM-W035

9-1 . 9-1 9-2 . 9-1 9-3 . 9-1 9-4 . 9-3 9-5 . 9-3 10 S 10-1 . 10-1 10-2 . 10-1 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-3 11-6 . 11-4 12 V 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 12-4 . 12-2 13 13-1 . 13-1 -2 IDX-OM-W035 i i i-1 () 3 i-1-1 3 IDFB Series i-1 i-1 IDX-OM-W035 i i-2 5 . i-2-1 i-2 IDFB Series i-2 IDX-OM-W035 i i-2-2 i-2-3 50

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

3 Port Solenoid Valve Metal Seal Series VZ200 1

Model VV3Z2-20 VV3Z2-30 VV3Z2-50 -S50 Part no.

NCM-A

applicable auto switch model, refer to Best Pneumatics Stroke Hundredths of an inch (i.e. 06 = 0.06") Standard stroke Inches Specifications Specifications 075 (3/4") 200 (2") 106 (1 1/16") 150 (1 1/2") Bore size (in) Fluid Air Maximum operating pressure 250 PSI/1.7 MPa Minimum operating pressure 8 PSI/0.06 MPa Ambient and fluid temperature 40 to 140F / 5 to 60 C Piston speed 2 to 30 in/sec (50

Secondary Batteries

with secondary batteries ZS-33-M-X221 90 Material restriction Mounting screw (accessory) Type Integrated display 7 R Rated flow range (Flow rate range) 10 50 11 * ( ): Fluid: CO2 0.2 to 10 (5) l/min 1 to 50 (25) l/min 2 to 100 (50) l/min Panel mount adapter (For without flow adjustment valve) Port size ZS-33-J Symbol Description Flow rate range 10 Panel mount adapter A 50 11 C6 C8 6 One-touch

20.0

Specifications IZH10 Model 20.0 kV Rated charge amount range 0.1 kV (1.0 kV to 20.0 kV), 0.01 kV (0 to 0.99 kV) Minimum display unit Measurement distance 50 mm (between sensor part and measured target) Power supply Note 1) 1.5 VDC 2A alkali dry cell battery, 2 pcs (continuous use for 15 hours or more, see Note 2)) 5% F.S. 1 digit Display accuracy Enclosure IP40 Environment Operating: 0 to