Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 33 25 10 10.5 10.5 12 8.5 13.75 4 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 30 10 18 11.6 19.5 23 20 29 53.2 9.1 14.1 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 34 14 22 15.6 23.1 27 24 35 67

ZP

(for Ball Spline) Buffer assembly model Applicable pad model Series ZP Page ZP02U ZP04U ZP06U ZP08U P. 77 ZP2B-T3S6 67 Series ZP2/ZP Adapter/Buffer Applicable Pad List Buffer Assembly Part No.

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Tokyo 105 JAPAN Te/:03-3502-2740 Fax:03-3508-2480 1st pnnhng February 1995.D-036,P-53{M) November 1997, 67 5(RP) SpeclilCatlons are subject to change without pnor notICe Printed In Smgapore and any obltgaltOn on the pa r1 01 the manifacture.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

CV/MVGQ

12 16 CXT MX Series CVM5/CVM5K MXU 20 Standard 3.5-18 Double acting 25 MXS 3.5-29 32 Nonrotating rod 40 MXQ MXF Series CVM3/CVM3K 20 Standard MXW Single acting 3.5-34 25 (Spring return) 3.5-47 32 Nonrotating rod (Spring extend) MXP 40 MG Series CV3/CV3K 40, 50 63, 80 100 MGP 3.5-52 Standard Double acting MGQ Nonrotating rod 40, 50 63 3.5-63 MGG MGC Series CVS1/CVS1K 40, 50 63, 80 100 3.5-67

MY2

3.5 5.3 6.5 NH 2 3 4 NE 27 35.5 56.5 NC 14 21.3 32.4 Model MY2C16G MY2C25G MY2C40G NW 69.2 106.8 135.1 NV 3.4 5.5 6.6 PC 16.5 22.2 29 PD 32 48.7 60.5 PE 2.2 0.8 8.5 PH 21.3 31.8 38 PF 9.8 19.5 40.5 XX 12 14 23 Z 160 210 330 VV 10.5 15.3 29 SS 9.7 14 21.5 TT 12.5 19.3 35.4 UU 3 4.4 2 RW 22 34 45 QQ 16.4 20.4 25.5 QW 40 60 57 RR 5.3 8.5 11 Q 152 198 312 NX 5.8 8.5 10.5 PA 40 60 100 PB 43 67

NCA1

Bore Model No. 150 (1.5) 200 (2) 250 (2.5) 325 (3/25) 400 (4) D-A5, D-F5 D-A6, D-J5 NBT-150 NBT-200 NBT-200 NBT-325 NBT-325 M8-3pin M8-4pin M12-4pin Connector Style 1 2 1 4 Pin arrangement 2 1 3 4 4 3 3 JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 300m/s2 Applicable standards Impact resistant IP degress of protection Insulation resistance Withstand voltage IP-67 (IEC529 standard) 100Mor

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Dimensions MSUA7 MSUA7-S/SE Top ported: MSUA7-SE C 8-M4 x 0.7 depth 8 A port B port 67 13 2-M5 x 0.8 14 41 50 B 33 37 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M5 x 0.8 depth 7 22.5 5 +0.025 0 3H9 A Long groove depth 5 (Positioning pin hole) 22.5 47h9 0 0.062

CE2

stroke Stroke range A B C GA H1 FF GL F GD D E E GC M BB J BL C CC D EE GB K AA AL Bore size (mm) Without rod boot With rod boot 40 50 63 80 100 25 to 850 25 to 700 45 30 10 10 10 54 32 26 11 22 20 44 16 11 15 6 27 71.5 60 42 22 21 150.5 8 M8 x 1.25 25 to 800 25 to 650 50 35 12 13 10 59 40 27 11 27 21 52 20 10 17 9 32 80.5 70 46 24 28.5 162.5 11 M8 x 1.25 25 to 800 25 to 650 60 35 15 18 10 67

RSH/RS1H

RE A B 0.2 53 REC 67 CX CY MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC 4-6.6 through 8-11 depth of recessed area 5 Load carrying direction MK(2) 12 3 RS Q G 28 13 6 10.3 6 RS H A RZQ 12 Conveyor lower limit position MI W S 1 3 R25 CEP1 CE1 Stroke 73

ML2B

cylinder ML2B25 ML2B32 ML2B40 RS H A RZQ MI W S Stroke Adjusting Unit CEP1 With shock absorber: CE1 ML2B Bore size S Stroke L CE2 TT h ML2B EB FF EA Stroke adjusting unit C J G5-S CV ED MVGQ CC TA FA (Absorber stroke) RB FB FC J Shock absorber Cushion needle EC DFH -X EY 20Data (mm) TT Max. 16.5 Max. 20 Max. 25 TA 7 12 12 FH 12 16 16 FF 6 6 6 FC 13 17 17 FB 33 43 43 FA 46.7 67.3 67.3 EY 53.5 67

RZQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Front flange style: RZQF MK(2) RS Q G Flange Style (mm) FV M Bore size (mm) RS H A AR AH B FD FT FV FX 32 100.5 108.5 56 82.5 5.5 8 50 RZQ 40 110 118 62 92 5.5 8 56 L B + Full stroke FX FZ AR + Full stroke MI W S 50 76 118.5 127.5 96.5 6.6 9 67 63

Compact Cylinder

End Male Thread (mm) Bore size (mm) B1 C D H H1 K L X 32 40 50 63 17 16.5 16 M10 x 1.25 6 14 26 19 17 16.5 16 M10 x 1.25 6 14 26 19 19 19.5 20 M12 x 1.25 7 17 30 22 19 19.5 20 M12 x 1.25 7 17 30 22 Basic Style (mm) Bore size (mm) A B C D E F H I J K L M N OA OB Q RA RB T Z 32 40 50 63 51 44 12 16 46 8.5 M8 x 1.25 59 2 14 7 32.5 5.5 M6 x 1.0 9 14.5 11 5 1 15 52 45 12 16 52 9.5 M8 x 1.25 67

CJ1

Symbol S Z 5 19.5 10 28.5 15 37.5 20 46.5 5 40 10 49 15 58 20 67 Bore size (mm) Stroke 4 6-2-5

NCA1

South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB MB1 Connector type M8-3 pin M8-4 pin M12-4 pin 1 2 1 4 CA2 2 1 Pin arrangement CS1 3 4 4 3 3 C76 JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 300 m/s2 Applicable standards Impact resistant IP degress of protection Insulation resistance Withstand voltage C85 IP-67

CQM

Unit: N Theoretical Output Weight Bore size (mm) Operating direction Operating pressure (MPa) Unit: g Without Auto Switch 0.3 0.5 0.7 Bore size (mm) Cylinder stroke (mm) IN 25 42 59 12 5 10 100 40 45 50 75 15 20 25 30 35 OUT 34 57 79 12 44 52 60 69 77 86 IN 45 75 106 16 16 56 67 77 87 97 108 OUT 60 101 141 20 183 198 213 227 92 107 122 137 152 167 IN 71 118 165 20 25 234 252 270 288

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com I HR CX D D-X 2 x 4-J 20E MB Data MA KA MC C NB N K B S + Stroke H ZZ + Stroke (mm) Stroke range Bore size (mm) H HR I J K KA LL LM B D C DL E GA GB 40 50 63 Up to 1000 Up to 1000 Up to 1000 40 45 50 57.5 63.5 69 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 36 46 53 30 30 30 30 30 30 45 55 68 58 67

MNB

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size D-A44 D-Y7BAL D-P5DWL (mm) CNA Ht Hs Ht Hs Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 31 38 23 30 23 26.5 23 25.5 27.5 77 27.5 67 32.5 25 35 24.5 32 CNS 33 42 26 34 26 30 26 29.5 27.5 81.5 27.5 71.5 36.5 27.5 38.5 27.5 40 39 46.5 31 38 31 34.5 31 33.5

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100