MNB

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size D-A44 D-Y7BAL D-P5DWL (mm) CNA Ht Hs Ht Hs Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 31 38 23 30 23 26.5 23 25.5 27.5 77 27.5 67 32.5 25 35 24.5 32 CNS 33 42 26 34 26 30 26 29.5 27.5 81.5 27.5 71.5 36.5 27.5 38.5 27.5 40 39 46.5 31 38 31 34.5 31 33.5

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

5 MM M4 x 0.7 M5 x 0.8 M6 x 1 N 20 25 40 NT 3.5 5.3 6.5 NH 2 3 4 NE 27 35.5 56.5 NC 14 21.3 32.4 Model MY2C16G MY2C25G MY2C40G NW 69.2 106.8 135.1 NV 3.4 5.5 6.6 PC 16.5 22.2 29 PE 2.2 0.8 8.5 PD 32 48.7 60.5 PF 9.8 19.5 40.5 PH 21.3 31.8 38 Z 160 210 330 XX 12 14 23 TT 12.5 19.3 35.4 UU 3 4.4 2 VV 10.5 15.3 29 SS 9.7 14 21.5 QW 40 60 57 RR 5.3 8.5 11 RW 22 34 45 QQ 16.4 20.4 25.5 PB 43 67

MXF

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Model Height x Width (mm) Height comparison to MXS MXF8 D16 x 58 67% MXF12 18.5 x 68 59% MXF16 21 x 80 53% -X MXF20 27 x 92 54% Neat appearance 20Protecting stopper section with cover realizes neat appearance.

MXH

55.0 39.3 23.6 78.5 OUT 10 4 46.2 33.0 19.8 66.0 IN 141 101 60.3 201 OUT 16 6 121 86.0 51.6 172 IN 220 157 94.2 314 OUT 20 8 185 132 79.2 264 IN Minimum Stroke for Auto Switch Mounting (mm) Applicable auto switch model No. of auto switches mounted D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV 1 pc. 5 5 5 2 pcs. 10 5 10 Weight (g) Stroke (mm) Model 5 10 15 20 25 30 40 50 60 MXH6 MXH10 MXH16 MXH20 62 67

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 67, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber bumper (standard), Operating Pressure(MPa): 0.08 to 1.0, Specification: Built-in magnet, Support bracket: None, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 67, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.08 to 1.0, Specification: Built-in magnet, Support bracket: None, Auto Switches: Without auto switch

Cylinder Speed Checker

Note that although it can be connected, the IP65/67 may not be held depending on the assembly method. The lead wire is converted to M8/M12 connector for use.

Digital Gap Checker

Blue *1 4 OUT1 1 DC (+) Brown *1 Red 2 N.C. 5 3 DC () Blue *1 4 OUT1 1 DC (+) Brown *1 Green 2 N.C. 6 3 DC () Blue *1 4 OUT1 *1: Brown and blue are connected inside the product. 19 3-Color Display Digital Gap Checker ISA3 Series Dimensions ISA-14 (Bracket when control unit not fitted) Y200T-A (Spacer with bracket) 36 53.4 15.5 18.6 5.5 28 30 6 6 9.6 4 3.5 5.5 3 x 3.4 51.5 29 5.5 24 24 67

1

15.5 M5 x 0.8 32 17.5 15 17 10 22 0 0.033 11 8.5 33 6 Width across flats 8 length 3.5 M10 x 1.25 34.5 M22 x 1.5 32 12 15.5 M5 x 0.8 40 23.5 20.5 22 14 27 0 0.039 12 9.5 39 8 Width across flats 12 length 3.5 M14 x 1.5 42.5 M27 x 2 40 13 15.5 M8 x 1.25 Port Thread: M5 Female Rod End [mm] [mm] Port Thread: Rc1/8, NPT1/8 Female Rod End [mm] [mm] Bore size G S ZZ Bore size ZZ 20 5 37 (42.5) 67

Compact Cylinder

cylinder moving parts kg m2: Load mass kg V: Piston speed m/s 100 Allowable lateral load at rod end [N] 80 Mass of Cylinder Moving Parts: Without Magnet for Auto Switch [g] 63 50 10.0 Bore size [mm] Cylinder stroke [mm] 40 32 5 10 15 20 25 30 35 40 45 50 12 5 6 7 8 9 10 25 16 5 6 7 9 10 11 20 9 11 13 15 17 19 21 23 25 27 20 16 1.0 25 15 18 21 24 27 30 33 37 40 43 32 27 32 36 41 45 50 54 59 63 67

Series KV2 Fittings

22.0 22.0 21.9 21.9 27.0 19.0 19.0 19.0 19.0 26.2 26.2 26.2 26.2 28.8 28.8 28.8 28.8 29.6 29.6 39.1 20.3 20.3 24.3 26.3 26.6 29.6 31.6 35.6 29.5 32.5 33.5 37.5 32.0 35.0 41.9 33.9 33.9 36.2 37.9 46.7 48.0 49.7 51.7 52.9 54.2 55.1 56.8 55.9 56.9 71.7 16 17 17 17 21 21 21 21 22 22 22 22 25 25 33 1.6 3.5 3.5 3.5 5.4 5.4 5.4 5.4 6.0 8.5 8.5 8.5 9.8 9.8 12.8 13 13 20 33 29 28 36 61 38 37 47 67

99

FGH FGH FGH200-06 {Rc3/4} FGH200-10 {Rc1} FQ1 Pressure drop (MPa) Pressure drop (MPa) FN EB ES Flow rate (L/min) Flow rate (L/min) FGH300 Series FGH300-03 {Rc3/8} FGH300-04 {Rc1/2} X20 (0.2 m) X40 (0.4 m) Pressure drop (MPa) Pressure drop (MPa) Flow rate (L/min) Flow rate (L/min) FGH300-06 {Rc3/4} FGH300-10 {Rc1} Pressure drop (MPa) Pressure drop (MPa) Flow rate (L/min) Flow rate (L/min) 67

AR20-B to AR60-B

Refer to page 97 for details. 67 Regulator Series AR10-A Regulator Series AR20-B to AR60-B Regulator with Backflow Function Series AR20K-B to AR60K-B Flow-rate Characteristics (Representative values) Condition: Inlet pressure 0.7 MPa AR10-A M5 AR20(K)-B Rc1/4 AR25(K)-B Rc3/8 AC AF+AR+AL AW+AL AF+AR AF+AFM+AR AW+AFM AF Attachment AFM / AFD AR AL AW 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (

Thermo-con/Rack Mount Type

15 20 0 0 5 10 15 20 Facility water flow rate [L/min] Facility water flow rate [L/min] 18 HECR Series Dimensions HECR008-W5 HECR012-W2 (11) 400 Air Warning/Caution label Caution label/Electricity 430 27 (33) Air Display/Operation panel Ventilation hole (air inlet) Tank lid (with gasket) Circulating fluid level gauge Power switch 397 240 Handle (for carrying the product) Fluid fill port 67

Thermo-chiller

range +4%, 10% (Max. voltage less than 500 V and no continuous voltage fluctuation) Electrical system Power supply Applicable earth leakage breaker*7 Rated current A 20 Sensitivity current mA 30 Rated operating current 50/60 Hz A 6.8/8.2 Rated power consumption 50/60 Hz kW(kVA) 4.3/5.3 (4.9/5.8) Communication function Contact input/output, Serial communication (RS-485) Noise level*8 dB(A) 67

Lightweight and Compact

Tool-less maintenance of filter 67 Circulating Fluid Temperature Controller Thermo-chiller Standard Type HRS090 Series Compact and lightweight 136 kg The precision temperature control method by expansion valve and temperature sensor, realized high temperature stability of 0.5C and a small-size tank.

Compressed Air Preparation Filter

A B C D E EE F G H J K Applicable model Y200T-D 3.2 67 29 51 24 33 11.5 5.5 15.5 3.5 30 AFF/AM/AMD/AMK20 Y300T-D 4.2 85 42.5 67.5 35 14 7 20 6 41 AFF/AM/AMD/AMK30 Y400T-D 5.2 115 50 85.5 40 55 18 9 26 7 50 AFF/AM/AMD/AMK40 Part no.

Pilot Operated Regulator AR425 to 935 Series

Pressure gauge port size Port size Model AR425/435 AR625/635 AR825/835 AR925/935 1/4, 3/8, 1/2 3/4, 1 1 , 1 2 80 98 126 160 145.5 155 216 241 3 7 5 10 1/4 1/4 1/4 1/4 39.5 43 75 90 50.0 85 48 52 80 90 B24P B25P 67 78 110 140 73 78.5 94.5 4 1 2 1 109.5 680