Made to Order

Through-hole/Both ends tapped (Standard): MK2TB MK2T-XC89 Lube-retainer Coil scraper 2 x P Cylinder port M A C G thread length H L N C A KA I KK 2 x J 4 x J K D 0.07 0.15 4 x F counterbore C S T AB AA MM KB Q R 2 x E through 2 x FF counterbore (mm) MM KB KK FF AB AA I N M L K J H G F E D C A KA Bore size 32 40 50 63 0.07 0.15 14 50 9 depth 11 9 depth 7 M10 x 1.5 8 4 46 45 34 6 M6 x 1.0 21

CV/MVGQ

H ZZ e f h l ZZ 40 50 63 59 66 66 11.2 11.2 11.2 43 52 52 201 208 217 51 58 58 1/4 stroke 1/4 stroke 1/4 stroke 209 216 225 For accessory, refer to page 10-15-74. 10-15-81

CV/MVGQ

H ZZ e f h l ZZ 40 50 63 59 66 66 11.2 11.2 11.2 43 52 52 201 208 217 51 58 58 1/4 stroke 1/4 stroke 1/4 stroke 209 216 225 For accessory, refer to page 10-15-74. 10-15-81

42

4") N9 (For 5/16") N11 (For 3/8") F, L kit: 0.32n + 0.75 S, T kit: 0.32(n2) + 1.8 F, T kit 18 stations Side 1/2 Option SV L F kitD-sub connector L T kitTerminal block box L L kitLead wire L S kitSerial transmission VQ4l00 VQ4l01 L kit 16 stations VQ4000 VV5Q41-lll Direct exhaust with silencer box SYJ S kit 18 stations Not including valve weight.

High Purity Fluoropolymer

E W Y H M L 11.5 18.5 LQ1H1A-F LQ1H2A-F LQ1H2B-F LQ1H2C-F LQ1H2D-F LQ1H2E-F LQ1H2F-F LQ1H3A-F LQ1H3B-F LQ1H3C-F LQ1H3D-F LQ1H4A-F LQ1H4B-F LQ1H4C-F LQ1H4D-F LQ1H5A-F LQ1H5B-F LQ1H5C-F LQ1H5D-F LQ1H6A-F LQ1H6B-F LQ1H6C-F LQ1H6D-F 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 10 10 1/8" 26.5 18.5 1/8" 35 16.5 14 15 14 21.5

Modular F.R.L. Unit

28.5 30.5 35 35 U P 2.5 13 10 12 12 Q 65 64 66 74 74 K 12 14 14 18 18 L 5.5 7 7 9 9 M 3.2 4 4 4 4.6 N J 33 L 5.5 7 7 9 9 F 43 57 57 75 80 G 30 41 41 50 50 H 24 35 35 40 40 B 132 184 187 222 224 E 41.5 55 55 72.5 77.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 AC20C AC25C AC30C AC40C 50 71 71 88 88 2 Note 1) 80 80 80 105 105 126 167 167 220 235 114 143 146 183 185 26.5 28 31 36 36 0 3.5

ZP

M6 x 1 A8 M8 x 1 G J J 04 4 06 6 08 8 Model A B C D 2 E F G H J K L M Vacuum inlet direction q Pad dia.

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

G H C4,N3 C6,N7 4 3.5 19.5 3.5 B A P R1 16 15 10.6 R2 One-touch fitting (A, B port) Applicable tubing O.D.: 4 and 5/32" : 6, 1/4" 32.3 (3.2) 21 M5 x 0.8 (P, R1, R2 port) (2.3) L plug connector (L): 10-SYJ5123-L-M5(-F) M plug connector (M): 10-SYJ5123-M-M5(-F) DIN Terminal (D): 10-SYJ5123-D-M5(-F) M8 connector (WO): 10-SYJ5123-WO-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D.

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

AC

T bracket T bracket Applicable model A B C D E F G R H L 15 2.75 5.5 3 30 5 10 48 33 Y20T AC2001 to AC2041 AC2501 to AC2541 AC3001 to AC3041 AC4001 to AC4041 24 B210T 16 3.5 7 4 41 7 11 70 45 Y30T 35 B310T 22 4.5 9 4 50 7 14 80 50 Y40T 40 B410T Bracket For AFM/AFD For AF/AL B340 B240 Mounting thread Model Applicable model A B C D F H J K L M N R t M4 X 8 l AF2000, AL2000 AFM2000, AFD2000

V

P Q R S 4 4 20.6 15.6 10.4 6 6 21.6 16.6 12.8 F L AT T Y P E F L AT W I T H R I B Y Model A B C D E F G H I Flat Flat with Rib ZPR20 20 23 14 29 39.8 57.6 68.6 91.5 102.6 4 1.7 ZPR25 25 28 14 29 39.8 57.6 68.6 91.5 102.6 4 1.8 ZPR32 32 35 14.5 29.5 40.3 58.1 69.1 92 103.1 4.5 23 D E E P T Y P E Model A B C D E F G H I Y ZPR25D 25 28 20 35 45.8 63.6 74.6 97.6 108.6 10 A P P L I C A B L E T

Best Pneumatics Vol. 14

/8 AR30 1/4, 3/8 AR40 AR40-06 3/4 AR50 3/4, 1 AR60 1 AR20 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 AR40-06 3/4 AR50 3/4, 1 AR60 1 1/4, 3/8, 1/2 1/4, 3/8, 1/2 Port size Port size How to Order How to Order AR 30 BG F 1N X430 03 AR 30 BG F N X425 03 Regulator Regulator For high/low temperature Body size Body size For high pressure 25 30 40 50 60 20 25 30 40 50 60 X430 X440 Low temperature High

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

/ISE20C(H) Series Dimensions ZSE20C(F) ISE20C(H) ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Made to Order Piping specification Piping direction 1.5 02: 48.4 N02: 48.9 Atmospheric vent port 02 4 x 2.6 Depth 7 or less 20 30 25 8.5 11 R1/4 M5 x 0.8 Thread depth 5 4.2 N02 30 20 NPT1/4 17 Piping port 02: R1/4 N02: NPT1/4 2.5 If there

Series VQ Base Mounted Metal Seal/Rubber Seal

P, L, S kit) Manifold block ass'y D side end plate ass'y U side end plate ass'y Housing ass'y and SI unit S kit P kit F kit L kit 1.10-208 Exploded View of Manifold Plug-in Unit/VQ2000 (F, P, L, G, S kit) Manifold block ass'y D side end plate ass'y U side end plate ass'y Housing ass'y and SI unit S kit P kit F kit L kit G kit 1.10-210 Exploded View of Manifold

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 2) Common to single solenoid and double solenoid 568 Exploded View of Manifold 1021-VQ2000 Plug-in Unit: Exploded View (F/P/J/L/G/S kit) Manifold block assembly D-side end plate assembly U-side end plate assembly Housing assembly and SI unit S kit P/J kit F kit G kit L kit q !3 o !0 u !5 w !2 !6 !4 !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 2) Common to single solenoid and double solenoid 568 Exploded View of Manifold 1021-VQ2000 Plug-in Unit: Exploded View (F/P/J/L/G/S kit) Manifold block assembly D-side end plate assembly U-side end plate assembly Housing assembly and SI unit S kit P/J kit F kit G kit L kit q !3 o !0 u !5 w !2 !6 !4 !

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

H L M E W Y LQ 11.5 18.5 LQ1H1A-F LQ1H2A-F LQ1H2B-F LQ1H2C-F LQ1H2D-F LQ1H2E-F LQ1H2F-F LQ1H3A-F LQ1H3B-F LQ1H3C-F LQ1H3D-F LQ1H4A-F LQ1H4B-F LQ1H4C-F LQ1H4D-F LQ1H5A-F LQ1H5B-F LQ1H5C-F LQ1H5D-F LQ1H6A-F LQ1H6B-F LQ1H6C-F LQ1H6D-F 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 10 1/8" 10 26.5 LVN 18.5 1/8" 35 TI/ TIL 16.5

A

NVHS2000 1/8, 1/4 1/8 40 56 36 28 22 25 NVHS3000 1/4, 3/8 1/4 53 74 45 48 28 30 NVHS4000 1/4, 3/8, 1/2 3/8 70 80 48 54 36 30 D I M E N S I O N S S E R I E S (N)VHS 3 P O R T VA LV E H O W T O O R D E R S E R I E S (N)VHS S H U TO F F V A LV E S (N)VHS 00 W I T H L O C K I N G FA C I L I T Y Standard N North American B O D Y S I Z E A N D A P P L I C A B L E FRL S E R I E S 2 2000 3 2500,

TABLE OF CONTENTS

(SCFM) 150 0 * INLET PRESSURE P1 (PSI) * P2 = 0 * L I O 6 1/4 NPT W O L F 4 1/8 NPT 2 (GPM) 150 0 PRESSURE DROP (PSI) * S.G. = .85 EXHAUST MUFFLER SPECIFICATIONS: Pipe Size: 1/8 or 1/4 NPT Max. Working Press. Diff.: 400 PSI Element Burst Press.