Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

3 !

Air Cylinder

3 28 25.5 116 (130) 32 190 (204) 138 (152) 100 37 50 3 3 29 26.5 117 (131) 33 191 (205) 142 (156) Refer to page 1125 for details.

Auto Switch Guide

4 4 3 3 For the applicable auto switch model, refer to the table below.

Auto Switch Guide

4 4 3 3 For the applicable auto switch model, refer to the table below.

Air Fittings Fitting Series For Special Environment

9 3 ( 5 . 0 6 4 2 . 1 ) 5 . 1 3 ( 4 5 . 1 ) 9 3 ( 4 9 . 0 ) 4 2 ( 5 3 . 0 ) 9 ( 7 . 9 2 4 / 1 S 5 3 3 1 L R K 1 1 / 6 1 ) 6 4 . 7 1 ( 4 0 . 1 ) 5 . 6 2 ( 7 6 . 0 ) 7 1 ( 2 2 . 1 ) 1 3 ( 8 / 3 S 6 3 3 1 L R K 2 3 . 1 ) 5 . 3 3 ( 1 6 . 1 ) 1 4 ( 8 3 . 0 ) 6 . 9 ( 2 / 1 7 . 7 3 2 / 1 S 7 3 3 1 L R K 7/8 ) 3 2 . 2 2 ( 8 4 . 1 ) 5 . 7 3 ( 7 6 . 1 ) 5 . 2 4 ( 7 . 3 6 Note: Fitting cover ordered

Auto Switch Guide

4 4 3 3 For the applicable auto switch model, refer to the table below.

Auto Switch Guide

4 4 3 3 For the applicable auto switch model, refer to the table below.

Auto Switch Guide

4 4 3 3 For the applicable auto switch model, refer to the table below.

Auto Switch Guide

4 4 3 3 For the applicable auto switch model, refer to the table below.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

N.O. 1 (P) 5 (R1) 3 (R2) 3 position exhaust center 4 position dual 3 port valve (A) 4 position dual 3 port valve (C) (A) 4 (B) 2 4 2 4 2 5 3 1 5 3 1 1 (P) 5 (R1) 3 (R2) N.C. N.O. N.C.

CL

3 !4 !5 !6 !

HRX-OM-Z015

WIRING COMMUNICATION . 3-1 3.2 CONNECTED EXPLANATION . 3-1 3.3 COMMUNICATION SPECIFICATION. 3-2 3.4 MODBUS COMMUNICATION FUNCTION . 3-2 3.5 PRECAUTIONS FOR COMMUNICATION . 3-3 3.5.1 Precautions after wiring and before communication . 3-3 3.5.2 Precautions for communicating . 3-3 3.6 SETTING METHOD . 3-4 3.7 COMMUNICATION SEQUENCE . 3-5 3.8 MESSAGE CONFIGURATION . 3-6 3.8.1 Message frame .

Auto Switch Guide

4 4 3 3 For the applicable auto switch model, refer to the table below.

Applicable Auto Switch Model

shield plate) CDQ2 MY1B, MY1H MY1C, MY1M MXW MXF MXU MXS, MXQ CDQS MK MK2 CY1R MXP MTS DC() Blue(Black) 5.5 5.5 6.5 5.5 6.5 4 8.5 4 3 5.5 4 4 4 5 6.5 6 4 D-F9B(V) 5.5 3 2 3 2.5 OUT(+) Brown(Red) 3 2 3.5 6 5 6 5.5 2.5 3 3 3 Switch main circuit 5.5 5.5 5.5 6.5 4 5 7 3 5 OUT() Blue(Black) 3 3 5 5.5 5.5 5.5 Note) Average value at normal temperature including hysteresis.

ZX

Electrical entry Nil L Grommet (0.6 m) (5) Digital vacuum switch unit Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector L L plug connector Voltage 21 C 0X ZSE3 D 1 3 100 VAC 50/60 Hz 110 VAC 50/60 Hz 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC Applicable to plug connector. (Connector assembly with rectifier is attached.)

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Note 3) Value for quick response type Symbol 2 position single 3 position closed center 3 position exhaust center 3 position pressure center 2 position double (Double solenoid) 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) Manifold Specifications Piping specifications Note 4) 1 station weight (g)

JXCx-OMT0005CN

1. 2. 3. 4. 4 - JXCD1/ 1. / [][] 1 1.5 *3) *3)1 1 5 - 2 2.1.

CL

3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CL

3 !4 !5 !6 !7 !8 !

MGG

9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!