) S R U N L H L H k P a MOD E SET HYS Air supply port (P port) Note 4) (M3 x 0.5, piping not required) 71.9 66.9 (63.1) (M5 x 0.8) 57.3 Vacuum port (V port) Note 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com PE SMC (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust
Construction Symbol (B) 2 (A) 4 5 (R1) 1 (P) 3 (R2) Component Parts No.
W W D E d M a MA Q C A K F NA NB B H S + Stroke M ZZ + Stroke With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a d B C F G GA GB K M MA NA NB R S Q V W T P J MM E D 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 23 10 60 17.5 M8 x 1.25 18 M14 x 1.5 7.5 8 44 18 9.5 13 11 25 20 1/4 14 30 22 37 106 5
Construction Symbol (A)2 (R)3 1(P) Component Parts Material Aluminum die-casted No.
Note 4) Always use line receivers to receive the output signals. * The functions allocated to the input signals /DEC, P-OT, N-OT, /EXT1, /EXT2 and /EXT3, and the output signals /SO1, /SO2 and /SO3 can be changed by setting the parameters.
Rod end nut Rod end male thread 7-6-53 54 (In the case of without auto switches, A, B, F and P dimensions will be only changed. Refer to the dimension chart.)
Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.
(otaloq l{0, lltlodell trl tl P 0 R 5 T U v w x CR 6.59 ?
VQ VQ4 VQZ VQD VZS VFS VS VS7 1.13-9 Series VQD1000 Dimensions Plug lead unit manifold(VV4QD12-l) Lead wire length: 300mm 4-Rc(PT)1/8 (P, R port) Light 2-4.5 (Mounting hole) 57 50.5 5.3 5.3 52 0.6 1 3 P R 1 3 R P 30 17 6.5 15 7 10 P=11 0.5 0.5 2n-M5 (A, B port) L2 35 4 M5: M5 thread L1 38 42 M plug connector (M) Station 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15
$0Pi8$ I)(P _ uomlam neouil nctun loxt Fifl.[r[ $$or tE L X P B T I o.l O",u*o, "r,"p"f i?'Ic.dffiAil a Number ot auto switch t1--'l-G'l [?
(Non-locking) VS 300 4-Rc 1/8 (Lead wire length) (P , R port) VFN (Lead wire length) 2-4.5 (Pitch) (Mounting hole) Manual override (Non-locking) 300 (Pitch) n-Rc 1/8 (Pitch) n-One-touch fitting C4: Applicable tubing T0425 C6: Applicable tubing T0604 (A port) (A port) Refer to the above drawing for DIN terminal dimensions.
A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)
A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)
MSQ Backlash 2 or less For detailed explanation of effective output, refer to the description on p.1.5-5.
P K K 8 U 57 (at knob locked) DIN rail part no.
Refer to "Flow Characteristics" (p.4.6-2) and figure of "Max. air flow" (p.4.6-3).
Sensors (R) (P) 7.4 3 (13) M plug connector (M) L plug connector: 10-VQD1151-L-M5 M plug connector: 10-VQD1151-M-M5 5 5 5.5 2(B) 4(A) Direct manual override Lead wire length 300 mm 27 Indicator light 17.6 11.2 3 3(R) 9 0.3 3.8 10.9 3.5 5.5 9.1 2 x mounting hole 33.5 28.5 37 38 1(P) 1(P) 5.5 12 4-M5 x 0.8 13 L plug connector (L) (P, A, B, R port) 49 50.5 M plug connector (M) 598 4 Port Direct
Refer to "Flow Characteristics" (p.4.6-9) and figure of "Max. air flow" (p.4.6-8).
(X) (B) 2 (X) (A) 4 (B) 2 (A) 4 (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) (X) (B) 2 (X) (A) 4 (A) 4 (B) 2 (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 9 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 3.2~3.7mm () 300mm ) ) ) ) (+ -) ( ) ) ) ) ) Assy 2000mm VF3230-5MO-02 3 DXT170-80-4A-20 6 (1mm) 0.6 Nm VF1000 1.4 Nm VF3000 1.4 Nm VF5000 1.4 Nm VF130 VF133 DXT144
Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.