Compact Cylinder with Air Cushion

Rod end nut L1 10 Series RQ Accessories Single Knuckle Joint Double Knuckle Joint For I-G02, I-G03 For I-G04, I-G05 For Y-G02, Y-G03 For Y-G04, Y-G05 ND hole H10 Shaft d9 MM ND hole H10 Shaft d9 MM L NDH10 MM NDH10 MM L RR1 RR1 RR1 RR1 E1 E1 E1 E1 A1 L1 A NX NZ U1 A1 L1 A NX NX U1 A1 L1 A U1 A1 L1 A NX NZ U1 Material: Carbon steel Material: Cast iron Material: Carbon steel Material: Cast

CM2

CA2 ND hole H10 Axis d9 CS1 C76 C85 C95 MM A H L NX2 ND U2 Y Z R2 Bore size (mm) 20 25, 32 40 +0.2 +0.1 9 18 41 25 M8 x 1.25 9 10 14 11 66 CP95 +0.2 +0.1 9 22 45 25 M10 x 1.25 9 10 14 14 69 +0.3 +0.1 16 24 50 49.7 M14 x 1.5 12 13 25 13 92 NCM Double Knuckle Joint NCA Y-020B, Y-032B Material: Rolled steel Y-040B Material: Cast iron D-X ND hole H10 Axis d9 ND hole H10 Axis d9 20Data Applicable

70astamb1

L1 E1 E1 L1 MM NDH10 NX U1 NDH10 NZ R1 U1 R1 NX A A1 MM CA2 32 40 50, 63 80 100 32 40 50, 63 80 100 20 22 28 40 40 30 40 50 65 65 I-03M I-04M I-05M I-08M I-10M Y-03M Y-04M Y-05M Y-08M Y-10M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 Note) Pin, cotter pin and plain washer are attached

MU

-X +0.058 0 +0.058 0 +0.058 0 +0.070 0 18 22 26 32 3 4 5 6 13 14 17 23 9 11 13 16 8 10 10 14 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 8 10 10 16 21 24 27 39 8.5 10 11 16 11 14 15 20 8.5 10 11 16 19.5 24 26 36 CD-MU02 CD-MU03 CD-MU04 CD-MU05 9 11 13 16 20Knuckle pin and snap ring are included.

RQ

Rod end nut L1 7-7-13 13 Series RQ Accessory Bracket Dimensions Single Knuckle Joint Double Knuckle Joint For I-G02, I-G03 For I-G04, I-G05 For Y-G02, Y-G03 For Y-G04, Y-G05 ND hole H10 Shaft d9 MM ND hole H10 Shaft d9 MM L NDH10 MM NDH10 MM L RR1 RR1 RR1 RR1 E1 E1 E1 E1 A1 L1 A NX NZ U1 A1 L1 A NX NX U1 A1 L1 A U1 A1 L1 A NX NZ U1 Material: Carbon steel Material: Cast iron Material: Carbon

MNB

MLU L1 E1 E1 L1 MM NDH10 NX U1 NDH10 NZ MM R1 U1 R1 NX A1 A 12 32 40 50, 63 80 100 32 40 50, 63 80 100 20 22 28 40 40 30 40 50 65 65 Y-03M Y-04M Y-05M Y-08M Y-10M I-03M I-04M I-05M I-08M I-10M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 Note) Pin, cotter pin and plain washer are

mb1

5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.

MNB

MLU L1 E1 E1 L1 MM NDH10 NX U1 NDH10 NZ MM R1 U1 R1 NX A1 A 12 32 40 50, 63 80 100 32 40 50, 63 80 100 20 22 28 40 40 30 40 50 65 65 Y-03M Y-04M Y-05M Y-08M Y-10M I-03M I-04M I-05M I-08M I-10M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 Note) Pin, cotter pin and plain washer are

MU

-X +0.058 0 +0.058 0 +0.058 0 +0.070 0 3 4 5 6 13 14 17 23 18 22 26 32 9 11 13 16 8 10 10 14 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 8 10 10 16 21 24 27 39 8.5 10 11 16 11 14 15 20 8.5 10 11 16 19.5 24 26 36 CD-MU02 CD-MU03 CD-MU04 CD-MU05 9 11 13 16 20Knuckle pin and snap ring are included.

Cylinder with Lock

Bore size E1 L1 MM R1 U1 NDH10 NX NZ Y-03M*1 32 20 30 M10 x 1.25 10 16 10 +0.058 0 14 +0.30 + 0.10 28 0.10 0.30 Y-04M*1 40 22 40 M14 x 1.5 11 19 10 +0.058 0 14 +0.30 + 0.10 28 0.10 0.30 Y-05M*1 50, 63 28 50 M18 x 1.5 14 24 14 +0.070 0 20 +0.30 + 0.10 40 0.10 0.30 Y-08M*1 80 40 65 M22 x 1.5 20 34 22 +0.084 0 30 +0.30 + 0.10 60 0.10 0.30 Y-10M*1 100 40 65 M26 x 1.5 20 34 22 +0.084 0

MNB

03M Y-04M Y-05M Y-08M Y-10M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 Note) Pin, cotter pin and plain washer are included with the double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 11 Series

VPA4

VVPA4 5 0 04 04 1 Thread type Nil Rc G NPT NPTF VP 5 port Air operated manifold F N T 5 Base size Rc A, B Port size Rc 3 4 6 1 VVPA450 Symbol 04 Port size VVPA460 1 2 3 4 Mixed 1 06 10 M (2) Piping Note 2) In the case of mixed specifications, indicate M and specify port location sparately on a manifold specification sheet.

CE

2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !

CLQ

, Y-G03 Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Shaft d9 MM ND hole H10 Shaft d9 MM L MM ND H10 MM ND H10 L RR1 RR1 RR1 RR1 E1 E1 E1 E1 A1 L1 A NX NZ U1 A1 L1 A NX NX U1 A1 L1 A U1 A1 L1 A NX NZ U1 Material: Rolled steel Material: Cast iron Material: Rolled steel Material: Cast iron (mm) (mm) Applicable bore size (mm) Applicable bore size (mm) ND NX Applicable pin no. 20 25 32, 40 50, 63 80

Compact Cylinder with Lock Series CLQ

, Y-G03 Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Shaft d9 MM ND hole H10 Shaft d9 MM L MM ND H10 MM ND H10 L RR1 RR1 RR1 RR1 E1 E1 E1 E1 A1 L1 A NX NZ U1 A1 L1 A NX NX U1 A1 L1 A U1 A1 L1 A NX NZ U1 Material: Rolled steel Material: Cast iron Material: Rolled steel Material: Cast iron (mm) (mm) Applicable bore size (mm) Applicable bore size (mm) ND NX Applicable pin no. 20 25 32, 40 50, 63 80

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

With air cushion 15 LH B 4 x LD Z Y X W LZ LX 2 x LC (Knock pin position) ZZ + S Stroke LS + Stroke Y X W M (mm) B 54.5 78 LS 54 LX 71 LZ 4 M 10 W 4 LC 7 LD 30 LH 3 LT 16.5 X 8.5 Y Z 63.5 205 ZZ Bore size 40 50 63 5 5 10 12 40 45 91 91 4.5 4.5 17.5 17.5 70.5 75.5 66 82 86 106 5 5 22 22 11 13 242 242 82.5 75.5 Other dimensions are the same as basic type.

MU

E1 NDH10 Size A1 E1 MM Size L1 L1 MM A1 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 M10 X 1.25 M12 X 1.25 M14 X 1.5 M18 X 1.5 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 X 1.25 25 32 40 50, 63 25 32 40 50, 63 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 M12 X 1.25 M14 X 1.5 M18 X 1.5 Applicable pin NDH10 NL U1 U1 Part No. NO Part No.

CE

2r e y @4@8 !0 @0 oi @3 u@4 @8@7@2r !9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.