1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.
bracket) are included with the above parts. 3 Series VCB Direct Operated 2 Port for Heated Water Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical
1&4 I Spdng-spooltuln xTmtl0 4 Orlng -Slv ARRt6A{14 sltw a3lambt-congEt3 ot spoot end st.v (metchd s6t) end (4) detjt4 6 XT@4 7 Q!!e, axT01&5 I P[ot cotr asrmDty with oprator.
S) 42 (-Q) VV5K3-40 (-Q) (S) 41 (-Q) (S) 42 (-Q) VV3K3-20 (-Q) 21 (-Q) VV5K3-20 (-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.
(kg) Applicable dryer Port size NPT A B C D E D E Part no.
Stroke + 246 75.5 59 LXSH S B Q F G x I Without brake 5H9 +0.030 0 depth 5 D-5.1 through Refer to Cross section C-C, bottom view. 5H9 +0.030 0 depth 5 Phillips binding head screw (included) 32 5 M3 x 4l E-M5 2-M3 x 0.5 Effective thread depth 4 (PE terminal) 6 Thread depth 10 Crimping terminal 38 76 46 Toothed lock washer (included) Motor wire (300mm) Photo micro sensor wire (300mm) Phillips
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Differential pressure indicator w O-ring order no. e O-ring order no. Port size q Seal order no. r Seal order no. t Seal order no.
VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.
This pushes the main valve up so that it creates a seal, and the inside of the bowl q is shut off from the outside air. If there is no accumulation of condensate in the bowl q at this time, the float w will be pulled down by its own weight, causing the valve r, which is connected to the lever e, to seal the valve seat t. !
End Plate Assembly > q U end plate assembly no.
Thrust energy E Fs Fs + mgs Fs mgs Absorbed energy E E + E Symbols : Speed of impacting object (m/s) m: Weight of impacting object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8m/s) s: Shock absorber stroke (m) Note) Although the lock plate may slightly bend due to tightening of the lock plate holding bolt, this does not a affect the shock absorber and locking function.
U Q F I 22 M E Z D 11 Minimum bending radius for lead wire 10 Auto switch D-A7, A8 K L B + Stroke M E S A + Stroke J 2-cushion needle Rod end male threads H1 C1 L1 X Rod end nut Auto switch D-A9, F9 Rod end male threads mm Bore size (mm) X C1 H1 L1 32 40 50 20.5 23.5 M14 x 1.5 28.5 20.5 23.5 M14 x 1.5 28.5 26 28.5 M18 x 1.5 33.5 Standard type mm A B C D E F H I J K L M N Bore size (mm) 32
w e OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR30l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR30l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 800 Precision Regulator IR1000-A/2000-A/3000-A Series Dimensions Basic type (Knob): IR10l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole for hexagon
P(D Appendix e/How to caculate a rnomenl of ineriia .e@ Difilensions ..,,.,.,.,,.,.,,.,.,., C6 with Auto switch.-. e@ Auto Swilch DiagramgRolatron Into. ..
A B Weight [g] ZP3P-T50PTSFK10-B01 40.5 107 100.7 ZP3P-T50PTSFK20-B01 50.5 112.5 101.8 8 ZP3P Series Construction Pad with Adapter Male thread Female thread e w w q q Component Parts No.
P(D Appendix e/How to caculate a rnomenl of ineriia .e@ Difilensions ..,,.,.,.,,.,.,,.,.,., C6 with Auto switch.-. e@ Auto Swilch DiagramgRolatron Into. ..
E _ 6 9 " . q l 1 2 3 4 5 Load (kgl 6 7 8 I IE tleunic Auuat I||oilelSdodi||g trlollloil Criteria of Accelerating Speed (Horizontal Orientation) LXSH5BC .of /.
Pad assembly ZL ZH ZH Pad Locking status: Acceptable e ZH -X267 q Lock plate w Lock screw r Stud assembly Unlocked ZHP ZHP Adhesion q Remove the lock screw. w Push the lever (on the ejector side) of the lock plate to slide it to a position where it stops completely. e Pull out the pad assembly. r Pull out the stud assembly from the pad assembly. t Remove the holder. y Remove the plate from