High Vacuum Angle Valve, XL Series

Z Flange size U 25 40 50 63 80 The S type is not available for AC.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

(mm) Model CXS10-10 S SS ZZ Z 10 70 87 30 20 80 97 30 30 90 107 40 40 100 117 40 21-/2210-/11-/12CXS10-20 CXS10-30 CXS10-40 CXS10-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 110 127 40 21-/2210-/11-/1283 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS15, CXSL15 10-/11221221S ZZ SS 20 10 9 2-4.3 through Z 28 counter bore depth 4.4 18 5 30 1 M6 x 1.0 x 5L (Hexagon socket

CE2

+ Stroke RS Q G RS H A RZQ Double clevis style MI W S Z + Stroke CEP1 CE1 CE2 ML2B Center trunnion style Z + 1/2 stroke C J G5-S CV MVGQ CC RB Rod side flange, Head side flange Rod side flange Single clevis, Double clevis Double clevis Center trunnion Bore size (mm) 40 50 63 80 100 J CD H10 Z TZ TX CZ BB Z B FX U FD FV RR FZ FT CX L TDe8 FY 224.5 117 15 10 15 85 29.5 299.5 71 80 16 9 60

PSE550/300

(Not including sensor accuracy), Response time: 150 ms or less Accuracy (To display value) (25C) 1.0% F .S. or less 1.5% F .S. or less 2.0% F .S. or less PF2 0.5% F .S.

7

Thread depth 12 R15 0.050 d90.093 +0.027 H8 0 Shaft: 12 Hole: 12 97 ZZ + Stroke Z + Stroke Clevis width CKP1A: 16.5 CKP1B: 19.5 CKP1C: 12.5 +0.3 0 +0.4 0 +0.5 0 Unit: mm 40 Symbol F IA IB N S W Z ZZ Hs 57 Bore size 40 50 63 44 52 47 52 58 5 83 195 47.5 55 60 58 49 56 5.5 78 190 51 69 74 72 49 56 5.5 78 190 57.5 424 Clamp Cylinder with Magnetic Field Resistant Auto Switch (Band Mounting Type

XLAQ/XLDQ

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

ZR

With surge voltage suppressor S S and Z are not available for grommet style (DC). S is not available for AC. DC voltage (with surge voltage suppressor) If the polarity is incorrect at DC (surge voltage suppressor), diode or switching element may be damaged.

CQS

Contents Action CQSB12-S-PS CQSB12-T-PS 12 12 Kits include items !2, !3 and !4 from the table above. CQSB16-S-PS CQSB16-T-PS 16 16 Kits include item !3 Single acting Spring return Single acting Spring extend CQSB20-S-PS CQSB20-T-PS 20 20 from the table above. CQSB25-S-PS CQSB25-T-PS 25 25 Seal kits consist of item !

Vacuum System Peripherals:

/S (8 points output) R2 09 9 Can accommodate up to 16 solenoids.

The cost effective and clean looking AC series allows you to pick a combination of modular style air preparation equipment that best suits your needs. The series, available in 8 size options to ensure optimum performance, offers energy savings, with higher flow rates. Simple assembly and maintenance reduces downtime. Pressure relief, 3 port valve, Accessory for AC series, Body sizes: 1/8

MQQ

-0.1 -0.2 10 14 H 30 S + Stroke Z + Stroke 9 ZZ + Stroke (mm) Bore size (mm) S Z ZZ CI H 168 177 24 40.5 97.5 20 177 186 30 44.5 102.5 25 16 Series MQM Refer to the standard type on page 14 for other dimensions.

MXW

Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

Z F9NWZ Solid state switches marked "" are produced upon receipt of order.

Sine Rodless Cylinder Series REBR Direct Mount Type

+ Stroke LW EA EB HC HP HA H HB NT HT NL HG PP W 8 A N Z + Stroke Square nut for body mounting J TW (mm) Model A EA EB H HA HB HC HG HP HT J L LL LW M MM REBH15 REBH25 97 26.5 21 46 33.5 33.5 45 17 42 19 M5 x 0.8 106 44 71.5 M5 x 0.8 8 125 29 24 63 46 46 61.5 25 58.5 28 M6 x 1.0 138 56 86 M6 x 1.0 10 Model N S TW Z ZZ NL NT P PA PB PP W XB REBH15 REBH25 161 65 194 17.5 15 8 M5 x 0.8 50 62

MXW Series Long Stroke Slide Table

W : W max. value is from at Va=300mm/s 1 = W/W max. =10/70 =0.143 L3 C (2) Static moment Examine Mr. (Mp,My values do not apply to this example.)

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

CNS

Maximum piston speed: 500 mm/s It can be used at 50 to 500 mm/s provided that it is within the allowable kinetic energy range.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

1 digit (Ambient temperature of 25 3C) Repeatability 0.2% F .S. 1 digit Analog output accuracy 2.5% F .S.

Rotary Table/

(a) (b) Actuator effective torque S . Ta (S is 10 times or more) Allowable moment (Nm) Allowable thrust load (N) Allowable radial load (N) Accelerating torque calculation (a) (b) Size .

48

7.1 7 Dual Rod Cylinder JMGP Series Bore Size 50 (40 x 2), 63 (45 x 2) Standard: JMGPM WA + Stroke/2 Z X 4 x YY depth YL Bottom view 2 x P (Plug) WA + Stroke/2 Z 4 x MM depth ML L 4 x OA through 4 x OB counterbore depth OL (OL) 4 x NN through 2 x P (Plug) U X PW H VA PE R T 2 x P D GB GA S Q 2 x P (Plug) JC K J PD FB FA C + Stroke A + Stroke G [mm] Bore size Standard stroke A C D FA FB G