Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

ZQ1 3M-K1 L-E G-00. ZQ1 3M-K2 L-E G-00. ZQ1 3M-J1 L-F -00. ZQ1 3M-Q1 L-E G-00. In case of ZQ1 3M-F -00, the overall length is 91.7.

Direct Operated

C[dm3/(sbar)] 0.32 0.25 N.C. 1 0.7 1.2 1.6 0.3 0.6 1 0.3 0.5 b 0.08 0.15 Cv VX311-00 VX312-00 VX322-00 VX332-00 VX313-00 VX323-00 VX333-00 VX324-00 VX334-00 0.29 0.60 0.7 0.4 0.7 1 0.2 0.3 0.6 0.2 0.3 1 0.5 1 1.6 0.3 0.5 0.9 0.25 0.4 1.5 2.2 0.40 0.17 0.64 0.20 0.20 0.82 2.0 3 0.25 0.27 1.1 0.20 0.38 1.6 4 Refer to Glossary on page 31 for details on the max. operating pressure differential

42

-00-P-1 P ARBQ5000-00-P (PRB) ARBQ5000-00-A-5 A 0.7 VQ5l5l (Plug lead type) ARBQ5000-00-B-5 B 0.6 Outlet pressure [MPa] ARBQ5000-00-P-5 P 0.5 0.4 Dimensions 0.3 0.2 0.1 SMC 00 2500 2000 1500 1000 500 3000 Flow rate [L/min (ANR)] 64 181 Pressure Characteristics Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate: 20 L/min (ANR) 2 B SMC 68.5 D P 1 X 12 5 R1 3 R2 PE T A 4 0.35

Series KV2 Fittings

(g) Bag/Box Quantity D2 L MA MB 5/32 5/32** 1/4 1/4** 3/8 3/8** 1/2 5/8 3/4** KV2H03-00 KV2H03-07 KV2H07-00 KV2H07-11 KV2H11-00 KV2H11-13 KV2H13-00 KV2H15-00 KV2H19-00 10.4 13.2 13.2 17.9 17.9 21.7 21.7 26.5 32.6 10.6 13.3 13.3 18.1 18.1 22.1 22.1 27.0 32.9 32.6 34.6 34.6 42.1 42.6 44.6 44.6 53.4 68.2 16 16 17 17 21 21 22 25 33 16 17 17 21 21 22 22 25 33 1.6 1.6 3.5 3.5 5.4 5.4 8.5 9.8 13.6

Title not found

(mm) Model KQGH04-00 KQGH06-00 KQGH08-00 KQGH10-00 KQGH12-00 4 6 8 10 12 KQGU04-00 KQGU06-00 KQGU08-00 KQGU10-00 KQGU12-00 4 6 8 10 12 Male Elbow Male Elbow Bulkhead Union Bulkhead Union Applicable tubing O.D. (mm) Connection thread Model Applicable tubing O.D.

2/3 Port Valve for Various

5"5 VVXA211-stations VVXA212-stations VVXA221-stations VVXA222-stations 7 %1 % = > = > 3 1 VXA21 -00 . ; < Construction/ Principal Parts Material 3 1 VXA22 -00 ; Common SUP type Solenoid Valve for Manifold " 5 '* #5 5 # I ,+!J ! #5 " 0"8 1 E F 4 " 4 % " 4 4 4 4 7 %1 % 3 VXA212-00 VXA213-00 VXA223-00 VXA224-00 = < .G < < * 4.5 . >< * < * 6 < * $ /H"3 % .

VVXA21/22

5"5 VVXA211-stations VVXA212-stations VVXA221-stations VVXA222-stations 7 %1 % = > = > 3 1 VXA21 -00 . ; < Construction/ Principal Parts Material 3 1 VXA22 -00 ; Common SUP type Solenoid Valve for Manifold " 5 '* #5 5 # I ,+!J ! #5 " 0"8 1 E F 4 " 4 % " 4 4 4 4 7 %1 % 3 VXA212-00 VXA213-00 VXA223-00 VXA224-00 = < .G < < * 4.5 . >< * < * 6 < * $ /H"3 % .

KC

(mm) 4 6 8 10 12 Note) Weight (g) D L Q M Model KCT04-00 KCT06-00 KCT08-00 KCT10-00 KCT12-00 Note) D: Max. diameter 10.4 12.8 15.2 18.5 20.9 28.6 32.7 39.2 45.5 49.2 5.3 6.1 7.1 7.9 8.6 18 19 21.5 24 25.5 8 15 23 39 52 3-applicable tubing Union Y: KCU Applicable tubing O.D.

G15/G27

(Full span) (3) Indication precision Case (Surface treatment) Rolled steel (Black melamine painted) Polycarbonate (Part no.: G36-00-00-3) Nylon (Part no.: G36-00-00-3N) Polycarbonate (Part no.: G46-00-00-3) Nylon (Part no.: G46-00-00-3N) Clear cover Material Stud Bourdon tube Brass Brass 0.04 0.05 Mass (kg) Note 1) When mounting a pressure gauge, use caution not to tighten excessively.

VVX31/32/33

VX3235-00 VX3335-00 3 1.1 0.25 0.27 AC DC 60 40 1 99 60 120 183 Maximun VX3245-00 40 1.6 0.20 0.38 4 20 VX3345-00 Minimum AC, DC Ambient temperature (C ) 40 10 Operating fluid temp.

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors, MECHANICAL VALVE, MECHANICAL VALVE, I98, 12 lb

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors, MECHANICAL VALVE, MECHANICAL VALVE, I98, 12 lb

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors, MECHANICAL VALVE, MECHANICAL VALVE, I98, 12.00000 lb

Self-seal Fittings Series KC

M1 L M2 D 4 KCH04-00 KCH06-00 KCH08-00 KCH10-00 KCH12-00 42.1 45.8 52.8 59.8 63.5 10.4 12.8 15.2 18.5 20.9 2.6 6.8 16.2 25.6 35.4 18 19 21.5 24 25.5 16 17 18.5 21 22 2.6 6.8 13.1 20.4 30.4 5 8 11 18 24 6 8 10 12 Note) D: max. diameter Straight plug for frequent use: KCH Applicable tube O.D.

Plug-in/Plug Lead: Single Unit

00-B-1 P ARBQ5000-00-P-1 ARBQ5000-00-P (P B) A ARBQ5000-00-A-5 0.7 0.6 VQ55 (Plug lead type) B ARBQ5000-00-B-5 Outlet pressure (MPa) 0.5 P ARBQ5000-00-P-5 0.4 0.3 Dimensions 0.2 0.1 00 2500 2000 1500 1000 500 3000 Flow rate (l/min (ANR)) SMC Pressure Characteristics 64 181 Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate: 20 l/min(ANR) 2 B SMC 68.5 D P 1 X 12 5 R1 3

VXA21/22

n X 100+50 VXA32m5-00 n X 160+70 Model/Valve Specifications Flow rate Orifice size (mm) Max. operating pressure differential (MPa) (1) Proof pressure (MPa) Weight (g) Max. system pressure (MPa) Cv Effective area (mm2) Model VXA3115-00 VXA3125-00 VXA3225-00 VXA3135-00 1.0 1.5 1.5 0.08 1.4 1.0 0.5 1.0 0.3 150 0.16 2.8 0.19 3.4 2.2 230 0.24 0.6 0.33 6 VXA3235-00 150 4.3 3 0.3 4 0.5 9 VXA3245

Plug-in/Plug Lead: Single Unit

00-B-1 P ARBQ5000-00-P-1 ARBQ5000-00-P (P B) A ARBQ5000-00-A-5 0.7 0.6 VQ55 (Plug lead type) B ARBQ5000-00-B-5 Outlet pressure (MPa) 0.5 P ARBQ5000-00-P-5 0.4 0.3 Dimensions 0.2 0.1 00 2500 2000 1500 1000 500 3000 Flow rate (l/min (ANR)) SMC Pressure Characteristics 64 181 Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate: 20 l/min(ANR) 2 B SMC 68.5 D P 1 X 12 5 R1 3

Process Pump <Fluororesin Type> Series PA3000

50 4 0.1 0.3MPa 2 0.2MPa 00 5 10 00 5 10 00 50 100 Flow rate (l/min) Air consumption (l/min [ANR]) Operating cycle (Hz) PAP3313-T11: Flow rate characteristics (5Hz)* PAP3313-T11: Flow rate characteristics (2.5Hz)* PAP3310-T11: Flow rate characteristics 0.5 0.5 0.5 Discharge pressure (MPa) Discharge pressure (MPa) SUP = 0.5MPa Discharge pressure (MPa) 0.4 0.4 0.4 SUP = 0.5MPa SUP = 0.5MPa

Electric Slide Tables

00 3 6 9 00 2 4 6 00 0.5 1.0 1.5 2.0 Work load m [kg] Work load m [kg] Work load m [kg] 2,000 2,000 1,500 1,250 1,500 1,500 Pitching Mep 1,000 L4 [mm] L4 [mm] L4 [mm] 1,000 750 1,000 500 500 500 250 Mep m 00 0.1 0.2 0.3 0.4 0.5 00 1 2 3 4 5 00 0.5 1.0 1.5 2.0 L4 Vertical Work load m [kg] Work load m [kg] Work load m [kg] 2,000 2,000 1,500 1,250 1,500 1,500 1,000 L5 [mm] L5 [mm] L5 [mm] 750

SI unit ( device)

Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value