Actuation Type: 3 Position Exhaust Center, Sealant: Rubber Seal, Function: Standard (1W), Voltage: 110VAC 50/60HZ, Light & Surge Suppressor: Yes, Manual Override: Locking Slotted Style-Tool Required, Protection: Dust Proof, 1: 1, Piping Specification: -, Port Size: -, Thread: -, Composite Symbol: -

Actuation Type: 4 (3 Position Exhaust Center), Sealant: 1 (Rubber Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: B (Locking Slotted Style-Tool Required), Protection: Dust Proof, 1: 1

Actuation Type: 4 (3 Position Exhaust Center), Sealant: 1 (Rubber Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: Dust Proof, 1: 1

Actuation Type: 4 (3 Position Exhaust Center), Sealant: 1 (Rubber Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: W (IP65 Protection Compatible), 1: 1

Actuation Type: 4 (3 Position Exhaust Center), Sealant: 1 (Rubber Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: E (w/o Light w/Surge Suppressor), Manual Override: Non-locking Push Style (Tool Required), Protection: W (IP65 Protection Compatible), 1: 1

Actuation Type: 4 (3 Position Exhaust Center), Sealant: 1 (Rubber Seal), Function: Standard (1W), Voltage: 3 (110VAC 50/60HZ), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: W (IP65 Protection Compatible), 1: 1

Actuation Type: 4 (3 Position Exhaust Center), Sealant: 1 (Rubber Seal), Function: Standard (1W), Voltage: 3 (110VAC 50/60HZ), Light & Surge Suppressor: Yes, Manual Override: B (Locking Slotted Style-Tool Required), Protection: Dust Proof, 1: 1

Actuation Type: 4 (3 Position Exhaust Center), Sealant: 1 (Rubber Seal), Function: Standard (1W), Voltage: 1 (100VAC 50/60HZ), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: Dust Proof, 1: 1

Stability of suction position,

Pad diameter 32, 40 Dimensions/With Ball Joint Adapter: Vacuum Inlet Vertical Pad form Flat type with groove ZP3E-TF32UMl-AL6 ZP3E-TF40UMl-AL6 14 14 Width across flats 8 2.5 M6 x 1 2.5 M6 x 1 Width across flats 8 Seal washer Seal washer 14.5 3 1.3 19.2 23.6 16 39.6 14.5 1.3 3 19.2 23.6 16 39.6 Width across flats 2.5(2) Width across flats 2.5(2) 17 17 31 31 14.41) 2.5 14.41) 2 30 (Rotating

1

25 25.5 27.5 29 27 24 30 31 32 26.5 28.5 30 28 25 31 32 40 31 33 34.5 32.5 29.5 35.5 36.5 50 38.5 40.5 42 40 37 43 44 ( ): Denotes the values of long strokes. 6-17-114 94 Made to Order Individual Specifications: Air Slide Table Please contact SMC for detailed dimensions, specifications, and lead times.

Air Slide Table

D A A MXQ16B 57 31 17 30 16 13 MXQ20B 64 32 14 31 13 18 The MXQ6(A, B) is not available.

CJ2

179 3.3 5 48.5 48.5 56 57 68 69 80 81 87 111 129 141 M5 x 0.8 12.5 23.5 T-bracket Dimensions ZZ Bore size (mm) Bore size (mm) 10 16 TX TC TH TV TW TY 126 to 150 st 193 10 16 5 to 15 st 95.5 100.5 16 to 30 st 103 109 31 to 45 st 115 121 46 to 60 st 127 133 61 to 75 st 139 76 to 100 st 163 101 to 125 st 181 4.5 5.5 29 35 40 48 22 28 32 38 12 16 6-3-30 31 31 Series CJ2 Air Cylinder:

CJ2

Bore Bore B C d H 10 16 NTJ-015A 10 16 7 8 8.1 9.2 M4 X 0.7 M5 X 0.8 3.2 4 NTJ-010A Dimensions by stroke (mm) Symbol S Z ZZ Stroke Bore 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 5 to 15 16 to 30 31 to 45 46 to 60 61 to 75 76 to 100 101 to 125 126 to 150 10 16 48.5 56 68 80 84.5 92

0.5

Series Accessories (for Individual Parts) IZF21/31 IZF10/IZF10R Technical Data Emitter cartridge Bracket IZF IZF 21 NT B1 21 Model Model 21 For IZF21 31 For IZF31 21 For IZF21 31 For IZF31 : 4 retaining bolts are included.

Table of Contents

31 Series MHSH3 Construction Open condition 16 to 25 Closed condition !

MXQ

31 31 31 36 23 41 42 41 42 41 19 19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.

Made to Order

23 (31) 30 22 (30) 35 27 (35) 29.5 21.5 (29.5) 27 19 (27) 32 32.5 23.5 (31.5) 31.5 22.5 (30.5) 36.5 27.5 (35.5) 31 22 (30) 28.5 19.5 (27.5) 40 37.5 25.5 (34.5) 36.5 24.5 (33.5) 41.5 29.5 (38.5) 36 24 (33) 33.5 21.5 (30.5) 50 44.5 30.5 (42.5) 43.5 29.5 (41.5) 49 34.5 (46.5) 43 29 (41) 40.5 26.5 (38.5) 63 43 32 (44) 42 31 (43) 47 36 (48) 41.5 30.5 (42.5) 39 28 (40) 80 56 37 (51) 55 36 (50)

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

M30 x 1.5 35 98 364 Lube Non-lube Air-hydro 1/2 341 133 40 75 110 318 0.2 stroke 15 31 24 M30 x 1.5 35 98 364 3/4 141 367 75 40 120 346 0.2 stroke 17 36 26 M36 x 1.5 39 106 388 3/4 399 153 45 85 381 135 0.2 stroke 20 31 41 M40 x 1.5 39 111 417 3/4 1 399 45 153 381 90 135 0.2 stroke 20 31 46 M45 x 1.5 39 111 417 Lube Non-lube 477 176 55 105 160 461 0.17 stroke 25 56 35 M56 x 2 49 141 493

VQ valves are ideal for applications requiring high speed, frequent operation, stable response time and long service life. Innovative mounting methods allow valves to be changed without entirely disassembling the manifold. Built-in one-touch fittings save piping time and labor. Fluid: air/inert gas, Operating pressure range: 0.10 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal 72.0

Rotary Actuator/Vane Type

Size: 10 31 2 x M3 x 0.5 through 2 x 3.5 through 25 Chamfer (Rotation range is stated on page 70.) 25 31 41 B port A port 29 9h9 0 0.036 17 4g70.004 0.016 0.5 2 x 3.5 through 9 14 31 29 1 3 10.6 7 16.5 9.5 2 x M3 x 0.5 1 18.5 35 19.8 67 2 15 When D-M9m is used *1.