Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

BM Bellows type with groove UM Flat type with groove KJH C2 06 Pad diameter Applicable tubing O.D. 63 63 80 80 04 4 06 6 03 5/32" 07 1/4" When changing the pad diameter, replace also the plate together. !

ZFC Series

32" Element Part Numbers 07 1/4" 09 5/16" Part No.

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

Part No. 07 1/4" 09 5/16" Part no.

Vacuum Unit Series ZK2

saving function 100 to 100 Unit selection function Note 9) PNP 2 outputs SI unit only Note 10) r Rated Voltage Note 8) w Nominal Nozzle Size Unit selection function Note 9) NPN 1 output Digital pressure System Nominal size Voltage Symbol 00 07 10 12 15 Symbol 5 6 0 SI unit only Note 10) switch for vacuum 100 to 100 24 VDC Vacuum pump system Unit selection function Note 9) with energy saving

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

32" Element Part Numbers 07 1/4" 09 5/16" Part No.

AS

Made to Order Body size 100 200 205 300 400 M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 Inch size 01 03 07 09 11 13 Metric size 02 23 04 06 08 10 12 Lock nut option 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)

฀AS

Bodysize Metricsize Inchsize 100 200 205 300 400 M3,M5standard 1/8standard 1/4standard 3/8standard 1/2standard Grease-free(Sealant:Fluorocoated)+ Restrictor(WithoutCheckValve) -X21 02 23 04 06 08 10 12 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)AS2002F-04-X21 Note)Notparticle-free 4 6 8 10 12 Withone-touchfittings Restrictor(WithoutCheckValve) -X214 Use1/8"tube.

Regulator for Chemical Liquids Series LVR

Applicable model LVR20 LVR40 06 6 x 4 LVR20 LVR40 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 2

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

bases with 5 stations.

AC Servo Motor Driver (CC-Link Type ）

OPERATION 5 1 to 5 -60 5.1 Switching power on for the first time . 5 2 5.1.1 Startup procedure . 5 2 5.1.2 Wiring check . 5 3 5.1.3 Surrounding environment . 5 4 5.2 Startup . 5 5 5.2.1 Power on and off procedures . 5 5 5.2.2 Stop . 5 5 5.2.3 Test operation. 5 6 5.2.4 Parameter setting . 5 7 5.2.5 Point table setting . 5 8 5.2.6 Actual operation . 5 8 5.3 Driver display . 5 9 5.4 Automatic

AC Servo Motor Driver (CC-Link Type ）

OPERATION 5 1 to 5 -60 5.1 Switching power on for the first time . 5 2 5.1.1 Startup procedure . 5 2 5.1.2 Wiring check . 5 3 5.1.3 Surrounding environment . 5 4 5.2 Startup . 5 5 5.2.1 Power on and off procedures . 5 5 5.2.2 Stop . 5 5 5.2.3 Test operation. 5 6 5.2.4 Parameter setting . 5 7 5.2.5 Point table setting . 5 8 5.2.6 Actual operation . 5 8 5.3 Driver display . 5 9 5.4 Automatic

V100

mA), Holding 0.5 VA (5 mA) 100 VAC Inrush 0.55 VA (5 mA), Holding 0.55 VA (5 mA) 110 VAC Inrush 1.0 VA (5 mA), Holding 1.0 VA (5 mA) 200 VAC Inrush 1.1 VA (5 mA), Holding 1.1 VA (5 mA) 220 VAC Note 1) Use dry air to prevent condensation when operating at low temperatures.

HRX-OM-M005

4.5 Product Startup and Shutdown . 4-5 4.5.1 Product startup . 4-5 4.5.2 Product shutdown . 4-5 Chapter 5 Product Operation. 5-1 5.1 Operation Touch Panel. 5-1 5.2 Flow Chart of Operation Screen . 5-2 5.2.1 Flow Chart of Operation Screen (1) . 5-2 5.2.2 Flow Chart of Operation Screen (2) . 5-3 5.3 Operation Screen . 5-4 5.3.1 Initial screen . 5-4 5.3.2 Main screen . 5-5 5.3.3 Special mode

LEC-OM02904

m i m 4 8 1 . 5 1 6 1 ( 1 8 . 5 5 ) m a x .

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

Swivels

16-12 1-5/16-12 103.8 mm 66.2 mm 41.3 mm 47.6 mm UN-2A UN-2A A Part Number A B Wrench Flats Dia.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Flow Rate and Sonic Conductance AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 10, 12 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Flow rate (L/min (ANR)) 180 230 100 260 390 660 790 460 920 1580 1710 Controlled

Direct Solenoid

Portg (4) NVS 4044, /m54 03 = 110V 50Hz M = 22OV SOHZ 07 = 24 VAC 60Hz 0g = 115/120 60Hz 10 = 2 1240 6OHz 11 = ,180V 6OHz NVS 4(X4, /(}54 01 = Mounted on Indlvidual Subplate 1/2'NPTFSlde Ports (5) 02 = Mounted on Indlvidual Subplate 3,/,1' NPTF Side Ports (5) 03 = Mounted on Indivldual Subplate 1/2" NPTF Slde Ports (5), Bottom Ports (5) (X = Mounted on Individual SubDlat 3rl' NPTF Slde Ports