XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

T T V V 2-Rc P Cushion adjustment screw 4-J GA F GA A MA a A MA a Air release R (max.)

VCB

Rc NPT G Nil N F OUT(2) 1 IN(1) Port size Class 3 Class 2 Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Symbol 01 02 03 04 06 Voltage 1 2 3 4 36 100 VAC 200 VAC 110 VAC 220 VAC 230 VAC Orifice size Please consult with SMC regarding other voltages.

VCB

Nil N F Rc NPT G OUT 1 IN Port size Symbol 01 02 03 04 06 Class 3 Class 2 Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Voltage 1 2 3 4 36 100VAC 200VAC 110VAC 220VAC 230VAC Orifice size Consult SMC regarding other voltages.

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

HRX-OM-Z015

Example 1) ASCII mode Received function code: 04(0 0100) ASCII code 30h, 34h Abnormal function code: 841000 0100 ASCII code 38h, 34h Example 2) RTU mode Receive function code: "04" (0 0100) Abnormal function code: "84" (1000 0100 2) Error Code Assign error code below. 01 : Function code of a command is outside the standard 02 : The specified address of register is outside the range. 03 :

The mounting dimensions of the manifold bases (VVT300 and VV307 series) are the same.

Note) Changes to the operating pressure range and the electrical entry types have been made.
The new VT307 series catalog can be found here.

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

Nil N F Rc NPT G OUT 1 IN Port size Symbol 01 02 03 04 06 Class 3 Class 2 Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Voltage 1 2 3 4 36 100VAC 200VAC 110VAC 220VAC 230VAC Orifice size Consult P/A regarding other voltages.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

One-touch Fittings Series KQ2

Weight (g) M L1 A L2 P Q D 1 8 5 32 3 16 1 4 5 16 1 8 5 32 3 16 1 4 5 16 KQ2U01-99 KQ2U03-99 KQ2U05-99 KQ2U07-99 KQ2U09-99 10 12 17 19 22 2 2.5 3.5 4.6 6 15.5 16 16.5 17 18.5 35 35.5 39.5 39.5 46 9.6 10.4 11.4 13.2 15.2 9 9.7 10.6 12 13.7 9.6 10.4 11.4 13.2 15.2 50 51.5 56 56.5 64.5 17.5 18 20.5 21.5 24.5 KQ2U Metric e v i t c e f f E m m ( e c i f i r o 2) . t W ) g ( e l b a c i l p p A

CJ5-S

side GB F NN MM GA Piping port 2-M5 x 0.8 Cover surface Piping port M5 x 0.8 0 0.3 CEP1 BA CB D CE1 LH LB LY CE2 With head cover port in axial location (R) 0 0.3 LT BB NB A ML2B NA X Y LX LZ S + Stroke Z + Stroke H C J G5-S CV 2-LC Mounting hole MVGQ CC Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4

CJ5-S

H C J G5-S CV 2-LC Mounting hole MVGQ CC Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 12 RB 16 15 18.3 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 18.3 J D-X 20Data 10-14-7 8 Series CJ5-S Dimensions R V Rod side flange style (F):

Environment

L Foot F Rod flange*2 D Double clevis*3 !2 Cable length Note 2) [m] !3 Driver type * When the driver type is selected, the cable is included. Select cable type and cable length.

3

F G Rod flange Auto switch type Head flange Auto switch multiple side mounting Nil Without auto switch (Built-in magnet) Rod flange, head flanges are shipped together, (but not assembled). For applicable auto switch models, refer to the below table. Auto switches are shipped together, (but not assembled).

MY1

MY3M EA h EB W F Stroke adjustment unit (Shock absorber stroke) T MY1W16/20 S F MY1W50/63 Shock absorber EY EC (mm) h E EB EC EY T EA S TT F Shock absorber model RB0806 W 58 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 3.6 14.6 30 5.8 39.5 6 7 40.8 5.4 (Max.11) 4 20 32 5.8 45.5 3.6 6 10 RB0806 RB1007 40.8 5 (Max.11) 4 58 70 D24 38 6.5 53.5 7 12 3.5 46.7 5 (Max.16.5) 6 RB1412 RB1412

AC Servo Motor Driver (SSCNET Type)

(Default) Spare (SW2-2) Rotary axis setting switch (SW1) Description Display 0 Axis No.1 01 1 Axis No.2 02 2 Axis No.3 03 3 Axis No.4 04 4 Axis No.5 05 5 Axis No.6 06 6 Axis No.7 07 Down 7 Axis No.8 08 (Be sure to set to the 8 Axis No.9 09 "Down" position.) 9 Axis No.10 10 A Axis No.11 11 B Axis No.12 12 C Axis No.13 13 D Axis No.14 14 E Axis No.15 15 F Axis No.16 16 -12- 5.

CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5

AFF

AFF37B AFF75B Port size N.C. auto-drain N.O. auto-drain Drain guide B 01 B 06 B 1 8 3 4 1B Accessory 02 03 10 14 B 1 4 B 3 8 04 B 1 2 1 4 1 B 1 2 20 2B Option IN-OUT reversal direction -T Element service indicator AFF75A to AFF220A AFF 75A 20 D Accessory (Option) Basic size (Applicable compressor rating) D Auto-drain G Pressure gauge F Companion flange L Anchor bolt 75A 75 kW 125A 110 to

Stainless Steel Regulator Series NSR

45) 01-r,6NPr 02-TNPI 03-Stl.lPI 04_I'NPI N Pon thrEd Fluoro rubber E Fluororesin lining Fluoro rubber Fluoro rubber & Fluoro resin lining Port lhrad N-NPT F-PF _-Rc(Pn' *Special o.der only.

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12 FLOW CONTROL W/FITTING. FLOW CONTROL. AIRLINE EQUIPMENT. AS***F 10/32 STANDARD (NPT). .00000 lb. BD.