MHZ

D4-MM thread depth L (Thread for mounting attachment) 20K K J J B A A D G D B F C S W O (mm) Model A B C D F G Open Closed Double acting Single acting J K L Weight (g) MM W MHZL2-103 MHZL2-163 MHZL2-203 MHZL2-253 +2.2 0 2H9 2.5H9 3H9 4H9 0 0.2 0 0.2 0 0.2 0 0.2 +0.025 0 5 8 10 12 0 0.05 0 0.05 0 0.05 0 0.05 70 145 290 505 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 60 135 270 460 7 9

MGP

103 Over 200st 150 150 171 171 50st or less 21.5 15 21 16 Over 200st 80.5 74 89 84 A E HT Bore size (mm) 32 40 50 63 110 118 146 160 Over 50st to 200st 94.5 95 112 112 128 128 152 172 Over 50st to 200st 31.5 31.5 42.5 36 46 41 45.5 46 Over 200st 132 132 150 150 171 171 203 213 Over 200st 69 68.5 80.5 74 89 84 96.5 87 XC4 80 93 113 121 153 167 205 244 XC35 80 93 110 118 146 160 200 238 50st

MLGC

165 160 Rc(PT) 86.5 104 110 75, 100, 125, 150, 200, 250, 300 88 4 16 9 62 15 9 M8 37 30 160 176 125 165 160 Rc(PT) 86.5 104 110 96 4 19 12 67 18 190 210 135 11 200 42 194 Rc(PT) 35 142 115 M10 95 J I GR GQ GL P Q U O T N S W K L M R V Bore size (mm) 20 25 32 40 60 35 4 4 5.5 M5 X 0.8 93 M6 X 1 16 25 26 50 80 50 12 53 105 112 70 40 7 7 9 M5 X 0.8 M8 X 1.25 20 32 31 60 95 60 12 63 125 132 103

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

234 6 255 272 7 293 310 Electrical entry position: Manifold block 2-G1, 1 1/4 Type SU Formula/Stations L1 = 38n + 27 L2 = 38n + 44 Formula for manifold weight M = 0.325n + 0.39 (kg) 2 103 120 3 141 158 4 179 196 5 217 234 6 255 272 7 293 310 ( ) Electrical entry position: Valve body ( ): DC 3-9-6

VZS

DXT170-80-4A-103 pcs. 3-7-2 3 Series VZS2000/3000 Caution Connector assembly with protective Cover 2. Light/Surge Voltage Suppressor Connector assembly with protective cover enhances dust protection Effective to prevent short circuit accidents due to penetration of foreign matter into the connector section.

KJ

(mm) Weight (g) L1 L2 L3 D1 D2 Model L1 Nylon Urethane KQ2V04-M5 KQ2V04-01S KQ2V06-M5 KQ2V06-01S KQ2V06-02S KQ2V08-01S KQ2V08-02S KQ2V08-03S KQ2V10-02S KQ2V10-03S KQ2V12-03S KQ2V12-04S KQ2V16-03S KQ2V16-04S 6 14 7 15 26 24 30 47 40 49 63 80 103 110 Reference dimensions after R thread installation. Note 1) D: Max. diameter Note 2) ( ): Values for soft nylon.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Station n L1 L2 Station 2 66 46 Station 20 408 388 3 85 65 4 104 84 5 123 103 6 142 122 7 161 141 8 180 160 9 199 179 10 218 198 11 237 217 12 256 236 13 275 255 14 294 274 15 313 293 16 332 312 17 351 331 18 370 350 19 389 369 63 Series SYJ7000 Type 40: Bottom Ported/SS5YJ7-40Stations -01 [ ]: AC Approx. 300 (Lead wire length) Grommet (G) L1 L2 4-4.5 (For mounting) 10 1.5 (DIN 2.8) 15.3

Plate Cylinder with Lock Series MLU

MU-D02 MU-D03 MU-D04 MU-D05 CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no.

MXS Series Air Slide Table

X 0.7 thread 6 deep 16 -1 x F 2 2-M5 X 0.8 thread 8 deep 4H9 3.5 deep +0.030 0 8 M 0.5 28.5 32 Z ZZ (NN-1) x H G H 18.5 8.5 8.5 18.5 A B 4.2 8.5 9 9 20 1 5 4H9 3.5 deep +0.030 0 NN-M5 X 0.8 thread 10 deep 4H9 3.5 deep +0.030 0 A B HA GA Cross section AA Cross section BB (mm) Model F 35 35 35 50 35 55 65 GA 15 15 15 42 51 61 111 KA NA 2 2 2 2 2 4 4 Z 70 70 70 82 102 148 202 M 71 71 71 83 103

3 Way Direct Acting NVKF 300 Series

plate ass'y vK300-42-1A Dimuuiun $uies t{U|ff30 Body Ported Grommet (G): NVKF332-"G-M5 inch (mm) Base Mounted Grommet (G) : NVKF334rG-01 T inch (mm) =1 1 .81 (=3001 lld wi'e hQt') Ssis ilUff300 Dimsui Body Ported (Top Ported) lType 20 Manifold NVV3KF3-20-Stations-007 inch(mm L: Dimensions 19 20 14.84 15.59 (377) 't3.78 r4.53115.28 (350) (36s) (388) ( 1 r 1 ) ( 1 3 0 s.sll as6 I +s (84) (103

Air Cylinder NCA1 Series

stroke 700 30 68 118 168 202 275 cylinders, oversized piston rods may be required. 1000 27 60 105 155 190 257 330 1400 24 53 92 142 174 244 308 385 1800 23 48 82 127 160 230 296 366 It must be noted, however, that oversized piston rods transmit more side load 2400 19 45 75 114 145 213 281 347 than is the case with more flexible smaller rods; therefore, the use of oversized 3200 16 41 67 103

Sine Rodless Cylinder Series REBR Direct Mount Type

C D 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 101 103 47 47 78 78 22 32 30.5

Air Cylinder Series MB

58 92.5 48.5 52 45 51.5 45 45 100 55 62 55 59.5 55.5 113.5 65.5 103 56.5 60 53.5 60.5 53.5 53.5 125 66.5 71.5 66.5 70.5 67.5 125 76.5 115 68.5 72 65 72 65 65 Operating range (mm) Auto Switch type Bore size 32 40 50 63 80 100 125 D-Z7, Z80 13 10 17 7.5 8.5 7.5 9.5 9.5 10.5 D-A5, A6 9 9 10 11 11 11 D-A59W 13 13 13 14 14 15 D-A3, A44 9 9 10 11 11 11 10 D-Y59, Y69 D-Y7P, Y7V D-Y7W, Y7WV

Guide Cylinder Series MGG

8 30 85 13 16 54 35 6.6 100 70 130 M10 x 1.5 depth 18 65 30 26.5 35 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 12 19 118 80 11 depth 8 35 100 16 16 60 35 6.6 106 80 73 135 M10 x 1.5 depth 18 35 29 40 129 M8 x 1.25 depth 16 22 150 100 14 depth 10 40 120 19 19 75 50 9 134 95 93 170 M12 x 1.75 depth 21 45 32 50 152 M10 x 1.5 depth 20 22 170 120 17 depth 12 45 150 21 25 90 56 11 152 115 103

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.

OMR0032

Modify the pulse signal and test the operation again. 9.3 Basic parameter set up (P.43) Incorrect pulse input 103 - Please match the controller setting with the pulse input signal.

, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?

, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?

, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?

, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?