High Vacuum Angle Valve, XL Series O After a few seconds at 10-6Torr 41
Description Description Note 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 No.
depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 Without auto switch With auto switch DBore size (mm) 5 st 38 41 35 41 45 47 S 15 st 48 56 50 56 60 62 Z S Z 15 st 61 72 66 75 83 89 10 st 43 46 40 46 50 52 5 st 51 57 51 60 68 74 5 st 38 41 45 51 55 57 10 st 56 62 56 65 73 79 10 st 43 46 50 56 60 62 15 st 48 56 60 66 70 72 5 st 51 57 61 70 78 84 10 st 56 62 66 75 83 89 15 st 61 72
M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.
M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.
M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.
Setting of switch operation 1_P/1_n (page 41) (Selection of display colour) Setting of Add dEC1 dEC2 (page 45) 3. Input of set values Setting of Setting of P1L/n1L Setting of P_1/n_1 P1H/n1H P1/n1 H_1 WH1 (page 44) (page 41) (page 43) 4. Delay time Setting of dtH1(ON) dtL1(OFF) (page 42) 5. Selection of display colour rED/Grn/1SoG/1Sor/2SoG/2Sor (page 45) 6.
(SeeLECSS Operation Manual (Simplified Edition),section 6.3.2 for uploading.) -41- 6.8.2 To Load saved Parameters From the Project menu in the setup software, select Open. Please select the "drive path name project name" that you want to read parameters from. Click Open.
Port size IDK Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 R, Rc 1 R, Rc 1 1/4 R, Rc 1 1/2 Symbol 01 02 03 04 06 10 12 14 Connection type Type Male thread (with sealant) Female thread Symbol M F Plug Yes No No Yes Socket Yes Yes No No Availability Built-in check valve Note) A plug with check valve should be used in combination with a socket with check valve.
mmt ,-.ow "",.f I Bore size (mm) A DB BN BP BO DC 00 oE F GA GB GC GO GL GR J K LZ MM Without boot With boot 40 500 25-500 27 30 60 96 '/. y. 44 16 32 10 85 15 26 54 10 10 M8Xl.25 6 71 M14X1 .S 50 600 25-600 32 35 70 108 'I, 'I< 52 20 40 10 95 17 27 59 13 12 M8X1.25 7 80 M18xi.S 'I, 35 86 40 1 -'02 115 129 20 25 40 52 10 14 17 32 37 102 113 67 72 18 15 17 63 80 26 30 7 99 -SOO 750 32600 41
3(R) port 24 18 67 2 x 6.2 (For mounting) NO 2A NC 53 66 12 3R NC 1P 1/8 12(PA) port 11.5 16 115.1 24 96.5 95.5 32.5 M5 x 0.8 (Breathing hole) 16 X 40 80 3/8, 1/2 1(P) port 1568 3 Port/Air Operated Valve Manifold Common Exhaust Type 41 / Individual Exhaust Type 42 VPA300/500/700 Series SYA How to Order Manifold SYJA VZA VV3PA 3 1 41 04 02 Type 41/Common exhaust VFA VFRA Series 3 5 7 Thread
Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.
Series MY1MW/CW Dimensions/Centralized Piping Type 16, 20 1 in = 25.4 mm MY1 M C W G Bore size Stroke 8.5 G Cushion needle For 16 Unavailable port 2-M5 x 0.8 2-M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 QQ QQ RR SS RR SS NC Cushion needle TT UU G G TT UU 2-M5 x 0.8 PP PP (Hexagon socket head plug) GB WW XX WW XX 2-ZZ (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV
S 20 20 stations A,B port size R Port M5 0.8 M5T M5 0.8 A, B Port M5 0.8 A, B Port M5 0.8,N3T P Port M5 0.8 P Port NPTF N3T One-touch fitting Type 41(5 Port / Base mounted type) Applicable solenoid valve: SYJ3 40SYJ3 43SS5YJ341-05 --N3T Type 41 Type S41 Single solenoid coil is located on same side as the A, B port. ( ) Applicable blank plate ass'y: SYJ3000-21-2A Valve mounting direction
Weights [g] Bore size [mm] 8 10 12 16 20 25 C85KN 39 41 82 95 189 257 C85KE 41 43 86 98 194 262 Without magnet C85KF 37 39 77 85 174 240 C85KY 37 39 77 85 175 241 Basic weight CD85KN 39 41 83 95 193 261 CD85KE 41 43 86 99 198 266 With magnet CD85KF 37 39 77 85 178 244 CD85KY 37 39 78 85 178 245 Additional weight per 10 mm of stroke 2.3 2.5 4.5 5.5 8.7 12.2 Foot (1 pc.)
(inch) Connection thread M R Model H (Width across flats) L A M Min. port size KQ2H01-M5 KQ2H07-M5 KQ2H01-M5
MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL CV P PA PB PW Q 25, 50, 75, 100 71 58 1.5 1.5 11 8 8.5 9 M5 x 0.8 12 13 15 M5 x 0.8 4.3 5.6 5.6 M5 x 0.8 Rc 1/8 Rc 1/8 40 10 16 18 26 64 83 93 8 9.5 9.5 19 8 10 12 M4 M5 M5 4.5 5.5 5.5 8 10 10 15 18 21 5 6 6 15 18 21 30 36 42 22 24 30 16 20 25 78 62 10.5 M5 x 0.8 M5 x 0.8
B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62
L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 L2 Q 18 61.6 58.2 2.0 2.0 29 29.1 44.5 14.5 1 27 22 16.5 26 41 29.1 16.5 3.5 11 1.2 26 23 11 30 54 51 11 M5 M5 M5 VHK-B1A VHKm-01S-M5 VHKm-M5-M5 1 8 18 41 32.6 16.5 3.5 11 44.5 14.5 1 27 22 16.5 26 8.6 1.2 13 57 13 VHK-B1A VHKm-01S-01S 1 8 1 8 32.6 65.2 VHKm-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66 17 VHK-B1A 44.5 14.5
B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62