AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Electro-Pneumatic Proportional Valve Series VEF/VEP

characteristics Set pressure range (MPa) Without sub-plate Without sub-plate 1 2 3 Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2

Electro-pneumatic Proportional Valve Series VEF/VEP 1

Symbol Body size Symbol Standard characteristics Symbol Port size Without sub-plate Rc 1/4 Rc 3/8 1 2 3 Nil 02 03 Symbol Set pressure range (MPa) 2 Without sub-plate Rc 1/4 Rc 3/8 Nil 02 03 03 04 06 0.05 to 0.65 MPa 1 2 2 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 0.1 to 0.9 MPa 2 02 03 04 03 04 06 1 3 30 Rc 3/8 Rc 1/2 Rc 3/4 4 0.005 to 0.15 MPa 1 1 4 45 1 2 3 4 12 8 4.5 2.5 Without sub-plate

CRQ2

Rotational axis B d D I m kgm I = m kgm 8 8 Gear: I a + b I = m kgm IB = I + I + I kgm 12 Substitute the moment of inertia IB for rotation around shaft B with the moment of inertia IA for rotation around shaft A. Gear: I IA = (A/B)IB [A/B: Gear tooth ratio] Find the actual moment of inertia.

LX Series Compact Electric Actuators

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.

VP4

VFR VP450 VP470 VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 82 (3 position: 98.5) 129 VZS 71(95.5) VFS 139.5 B A B A VS4 VQ7 (External pilot port) 1/8 (External pilot port) 1/8 EVS VFN A B B A B B B A EA P EB P EA EB ( ): Port size 3/4, 1 Dimensions: Port

AMD

06 10 14 B 3 4 1B 1 8 N.C. auto-drain N.O. auto-drain Drain guide Accessory 02 03 B 1 4 B 3 8 04 B 1 2 1 B 1 2 20 2B 1 4 B IN-OUT reversal direction T Element service indicator Option AMD800 to AMD1000 Self-standing type AMD801/901 Piping support type 20 01 AMD 8 20 00 AMD 8 Port size Body size Port size Body size 8 8 20 2B flange 30 3B flange 20 2B flange 30 3B flange 9 9 10 40 4B flange

MHZ2/MHZJ2

When closed 8.8 When open 22.8 7 Standard Type/Series MHZ2 Finger Position/Options Side Tap Mounting Type [1N1] Through Hole in Opening/Closing Direction [2N2] 4-MM Attachment mounting thread C C B A 4-H Attachment mounting hole S S O O B A Unit: mm Unit: mm Model A 3 4 5 6 Model A 3 4 5 6 B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 B 5.7 7 9 12 H 2.9 3.4 4.5 5.5 1

CYP

x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8m/s] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Guide central axis Cylinder

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Pulse Valve

JSXF-06B-KT 55-JSXFA(E, F)-06m-B-mA JSXF-06B-A-KT 55-JSXFA(E, F)-10m-B-m JSXF-10B-KT 55-JSXFA(E, F)-10m-B-mA JSXF-10B-A-KT 55-JSXFA(E, F)-14m-B-m JSXF-14B-KT JSXF-14B-KT2 AN30-03 (14R, 14F), AN30-N03 (14N) 13 Dedicated Controller for Operation VXFC Series [Excludes the VXFCmA] Dedicated Controller for Operation / VXFC Series How to Order Controller [Application example] D VXFC 06

Compatible Fluid: Air / Water, Operating Environment: Dust Resistant, Type: Electromagnetic Type, Switching Type: Normally Open, Application: Individual Item, Connection Type: NPT, Plumbing Thread Nominal: 1/4, Operating Temperature Range(°C): -20～60, Driving Type: Linear Motion Type, Operating Pressure Difference Range(MPa): null～1, Orifice Diameter(Ø): 1.5, IP Rating: IP65, Insulation Class: B,

Air / Water, Operating Environment: Dust Resistant, Type: Electromagnetic Type, Switching Type: 3-Port Universal, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1/4, Operating Temperature Range(°C): -20～60, Driving Type: Linear Motion Type, Operating Pressure Difference Range(MPa): null～0.7, Orifice Diameter(Ø): 1.5, IP Rating: IP65, Insulation Class: B,

Compatible Fluid: Air / Water, Operating Environment: Dust Resistant, Type: Electromagnetic Type, Switching Type: Normally Open, Application: Individual Item, Connection Type: NPT, Plumbing Thread Nominal: 1/8, Operating Temperature Range(°C): -20～60, Driving Type: Linear Motion Type, Operating Pressure Difference Range(MPa): null～0.5, Orifice Diameter(Ø): 2.2, IP Rating: IP65, Insulation Class: B,

Compatible Fluid: Air / Water, Operating Environment: Dust Resistant, Type: Electromagnetic Type, Switching Type: Normally Open, Application: Individual Item, Connection Type: NPT, Plumbing Thread Nominal: 1/4, Operating Temperature Range(°C): -20～60, Driving Type: Linear Motion Type, Operating Pressure Difference Range(MPa): null～0.5, Orifice Diameter(Ø): 2.2, IP Rating: IP65, Insulation Class: B,

Compatible Fluid: Air / Water, Operating Environment: Dust Resistant, Type: Electromagnetic Type, Switching Type: Normally Closed, Application: Individual Item, Connection Type: NPT, Plumbing Thread Nominal: 1/8, Operating Temperature Range(°C): -20～60, Driving Type: Linear Motion Type, Operating Pressure Difference Range(MPa): null～0.3, Orifice Diameter(Ø): 3, IP Rating: IP65, Insulation Class: B,

Compatible Fluid: Vacuum, Operating Environment: Dust Resistant, Type: Electromagnetic Type, Switching Type: Normally Closed, Application: Individual Item, Connection Type: NPT, Plumbing Thread Nominal: 1/8, Operating Temperature Range(°C): -20～60, Driving Type: Linear Motion Type, Operating Pressure Difference Range(MPa): null～0.3, Orifice Diameter(Ø): 3, IP Rating: IP65, Insulation Class: B,

Fluid: Air / Water, Operating Environment: Dust Resistant, Type: Electromagnetic Type, Switching Type: 3-Port Universal, Application: Individual Item, Connection Type: NPT, Plumbing Thread Nominal: 1/4, Operating Temperature Range(°C): -20～60, Driving Type: Linear Motion Type, Operating Pressure Difference Range(MPa): null～0.2, Orifice Diameter(Ø): 3, IP Rating: IP65, Insulation Class: B,