SZ3000

Put the symbol at the beginning of part numbers for solenoid valves, etc. which are to be attached. 37 SZ3000: Specific Product Precautions 3 Be sure to read before handling. Refer to pages 32 through 35 for safety instructions and common precautions.

MLGC

50 8.6 14 depth 10 29 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 75, 100, 125, 150, 200, 250, 300 MXP 16 75 15 40 37 50 8.6 14 depth 10 30 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 19 18 45 42 80 17 depth 12 35 142 22 M10 X 1.5 depth20 194 170 110 95 37 10.5 MG Bore size (mm) H GR GQ GL O GK J N S GD I K L M Q R P 20 25 32 40 4 4 5.5 M6 X 1 3.5 60 25 26 54 M8 X 1.25 depth14 35 80 105

Rotary Table/

Auto Switch Weights Unit: g Auto Switch Internal Circuits D-F9N(V) D-F9P(V) D-F9B(V) Model 0.5 7 7 6 D-F9N, F9NV Lead wire length (m) 3 37 37 31 DC (+) Brown 5 61 61 51 Main switch circuit Main switch circuit Main switch circuit OUT Black Auto Switch Dimensions D-F9 Mounting screwM2.5 x 4l Slotted set screw DC () Blue 2 Indicator light D-F9P, F9PV 2.7 2.8 22 DC (+) Brown 2.6 4 OUT Black Most

Brake mechanism added

Applicable bore size d H B C D E1 C H NX B A L1 A1 U1 I-04A 40 69 22 24 55 M14 x 1.5 15.5 20 12+0.070 0 16 0.1 0.3 I-05A 50, 63 74 27 28 60 M18 x 1.5 15.5 20 12+0.070 0 16 0.1 0.3 I-08A 80 91 37 36 71 M22 x 1.5 22.5 26 18+0.070 0 28 0.1 0.3 I-10A 100 105 37 40 83 M26 x 1.5 24.5 28 20+0.084 0 30 0.1 0.3 NT-04 40 M14 x 1.5 8 22 25.4 21 NT-05 50, 63 M18 x 1.5 11 27 31.2 26 NT-08 80 M22 x 1.5

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y 4 4 Connection 1.6 thread 29 B D 6 15 10 94 40 43 15 99 45 25 109 55 63 37 02 1.2 Width across flats 12 A N S U F GN GS 6 63 37 15 10 94 40 43 15 99 45 25 109 55 N4 N6 U4 U6 J K ZP Y U 04 A8 1.6 Width across flats 7 6 63 37 15 10 94 40 43 15 99 45 25 109 55 06 08 2.5 F 17.5 Dimensions Per Vacuum Inlet C2 Model E F Fitting part

MY1

D-F9BV D-F9PV D-F9NV D-F9B D-F9P D-F9N DC(+) Brown [Red] Lead wire length: 0.5m 6 7 7 6 7 7 Lead wire length: 3m 31 37 37 31 37 37 Main circuit of switch OUT Black [White] DC() Blue [Black] Dimensions D-F9N, D-F9P, D-F9B D-F9P(V) M2.5 x 4 Slotted set screw DC(+) Brown [Red] 2 Indicator light Main circuit of switch 2.7 2.8 22 OUT Black [White] 2.6 4 DC() Blue [Black] Most sensitive position

CQS

Cylinder stroke (mm) Cylinder stroke (mm) Bore size (mm) Bore size (mm) Symbol Specifications 5 5 10 10 -XA Change of rod end shape 12 12 29 (31) 37 (39) 36 (37) 44 (45) -XB10 Intermediate stroke (Using exclusive body) 16 16 39 (39) 49 (51) 48 (47) 58 (59) Piston rod and rod end nut made of stainless steel -XC6 20 20 63 (68) 94 (104) 76 (79) 107 (115) 25 25 92 (98) 130 (150) 108 (113) 146

Free Mount Cylinder

(mm) DQ HQ HP 4 6 8 10 13 16 20 25 32 40 50 10 16 25 40 6 8 10 13 16 20 25 32 40 50 2.6 4.8 31 12 7 26 10 7 31 12 9 26 10 9 10 10 26 26 2.6 4.8 32 13 7 32 13 9 DQ HQ HP ZP ZC(D)UKD16 ZC(D)UKR16 12 12 31 31 15 12 33 18 16 37 28 20 44 DQ HQ HP 12 18 12 15 36 15 18 20 41 12 16 37 ZC(D)UKD20 ZC(D)UKR20 ZP 12 33 12.5 18.5 33.5 23 14 38 39.5 28 14 38 34 29 53 35 22 27 24 48 DQ HQ HP ZC(D)UKD25

Environment

Work load [kg] Size Model LEY25 LEC-MR-RB-032 LEY32 LEC-MR-RB-032 LEY63 LEC-MR-RB-12 Lead 6: LEY25B 20 16 Lead 12: LEY25A 10 8 0 0 200 400 600 800 1000 1200 Speed [mm/s] LEY32 (Motor mounting position: Top/Parallel) LEY32D (Motor mounting position: In-line) 50 60 Lead 4: LEY32DC Lead 5: LEY32C 50 40 46 Area where the regeneration option is required. 37 Area where the regeneration option is

Integrated Controller

(Excludes when the stroke exceeds 2000 mm) Table Displacement (Reference Value) 0.08 EQFS32 (L = 30 mm) W L EQFS40 (L = 37 mm) 0.06 Displacement [mm] EQFS25 (L = 25 mm) 0.04 EQFS16 (L = 20 mm) 0.02 0 0 100 200 300 400 500 Load W [N] This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table. Check the clearance and play of the guide separately.

Industrial Filters

Symbol Element length Number of arranged elements 4 7 9 18 22 29 34 37 53 83 04 07 09 18 22 29 34 37 53 83 Element length FQ1 A B C D L250 L500 (L250 x 2) L750 (L250 x 3) L1000 (L250 x 4) Symbol Nominal filtration accuracy (m) Note) FN Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 50 70 74 75 100 105 120 EB ES X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Port size Port

PSxx-OMT0005CN

-A 1 M12 3m ZS-37-B 1 Rc1/4 ZS-31-X175 1 -8No.PS-OMT0005CN-A M12 C3604+AI203(96)FKM (Nm) R1/4 812 -9No.PS-OMT0005CN-A PSE570ZS-37-AZS-37-B ZS-37-A ZS-37-B 1 DC(+) 2 N.C. 3 DC(-) 4 -10No.PS-OMT0005CN-A DC(+) PSE57-02 15V 1 k N.C.

Cylinder with Lock

Bore size d H B C D NT-03 32 M10 x 1.25 6 17 19.6 16.5 NT-04 40 M14 x 1.5 8 22 25.4 21 NT-05 50, 63 M18 x 1.5 11 27 31.2 26 NT-08 80 M22 x 1.5 13 32 37 31 NT-10 100 M26 x 1.5 16 41 47.3 39 Double Acting, Single Rod Double Acting, Double Rod Lock Unit Made to Order Auto Switch *1 Split pins and flat washers are included.

CY1

WWV PPV (Refer to p. 37 for method to find .) Calculate stroke coefficient () with stroke and tentatively determined bore size Load weight within stroke = Maximum load weight Select an example calculation for allowable weight based on cylinder mounting orientation (Refer to P. 37 & 38.)

Table of Contents

No operation program 37 Trying to execute a program/step with no commands. Invalid movement command 38 Trying to execute a command other than MOVA, MOVI, or ASET with a step (position movement) designated operation. Format error 39 An error is found in the attached value of a command being programmed. Refer to the Series LC1 instruction manual for alarm details.

MGC

16 18 107 45 170 110 80 M12 X 1.75Depth21 22 M10 X 1.5Depth20 17Depth12 37 10.5 194 42 19 23 142 Bore (mm) WH W V U T S R Q J O I N Z P M Y L X K Wq 20 25 32 40 50 23 36 40 86 12 26 12 21 44 M6 X 1 25 25 140 M5 X 0.8 38 80 80 30 60 30 25 44 47 98 13 31 12 21 52 M6 X 1 30 32 153 M5 X 0.8 46 80 95 37 70 30 50 53 112 16 28.5 38 12 21 60 M6 X 1 35 32 161 Rc(PT)1/8 50 82 105 37 80 25 60 63 132

Heavy Duty Stopper Cylinder Series RSH/RS1H

37 23.5 37 16 The values inside ( ) are for D-Z73.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Rc (NPT) Port size 25 VX3 3/8" 25 6 28 43 24 9 18 21 29.5 1/2" VXA 31.5 LQ1R44-F 10 H LQ1R54-F LQ1R53-F LQ1R52-F LQ1R51-F 19 12 19 29.5 1/2" VN 35.5 7 39 54 29 14 28 26 36 3/4" 37 LVC 12 LQ1R64-F LQ1R63-F LQ1R62-F LQ1R61-F 25 19 25 19 42.5 36 3/4" LVA

39

37 122.7 M8 x 1.25 R38 1520.05 R28 M8 x 1.25 1 1 8.5 12.5 R28 1 1 22 8.5 R7 22 20 R7 22 12.5 22 20 B 81.3 111.3 141.3 171.3 201.3 231.3 A 135.0 165.0 195.0 225.0 255.0 285.0 A 135.0 165.0 195.0 225.0 255.0 285.0 Weight kg 1.7 1.9 2.1 2.3 2.5 2.7 Weight kg 2.1 2.3 2.5 2.7 2.9 3.1 Part no.

SMC Pneumatic Clean Series

37 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22 Note) < >: Denotes the dimensions for G port.