Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

Fittings & Tubing Air Cylinders Rotary Actuators 10 9+ST 4 x M3 x 0.5 thread depth 3.5 8 2.7 6.7 2 x M3 x 0.5 thread depth 3 (Piping port) Steel ball 4.5 15 M3 x 0.5 thread depth 3.5 Vacuum suction port 24.5 25 Note) 11-, 22-: Vacuum suction port 12-, 21-: Relief port ST 13.4 47+ST 11 1.2 37+ST 5.5 4.5 10+ST 3.8 3.8 11 2.75 M3 x 0.5 x 3 L M8 x 1.25 x 8 L (Bolt holder) (Hexagon socket set

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Base mounted (with sub-plate) 53 (32) 58 (37) M5 x 0.8 54 (33) 10-SYJ324M Note) Value for DC. Add 1 g for AC. ( ): Without sub-plate. 604 3 Port Pilot Solenoid Valve 10-SYJ300 Note) CE-compliant: For DC only.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

), No.2 () 5.9 0.75 mm2 L 120.8 (Lead wire length) Max.10 5 ATEX Compliant Body Ported Type Series 52-SY5000 Dimensions 2-position double L plug connector (L) 52-SY5220-L-01 (-F2) 22.6 16.7 2 x M3 x 0.5 Threads depth 3.5 (For bracket mounting) 65.4 11.6 Insulation: Black () B Insulation: Red (+) A 2 x 3.2 (Mounting holes for manifold) 2 x 1/8" {A (4), B (2) port} Manual override 16.2 36 37

PFxx-OMS0001CN

No.PF-OMS0001CN-A // PFMC7501 PFMC7102 PFMC7202 2 10 11 12 14 15 17 18 [] 22 OU1OUT2 {3 ] 23 [] 25 26 F0 27 F1 OUT1 29 F2 OUT2 37 F3 42 F10 43 F20 47 F22 48 F30 49 F31 50 F80 OFF 51 F81 52 F82 53 F90 54 F98 56 F99 57 58 62 63 65 66 66 69 71 -1No.PF-OMS0001CN-A (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

HRX-OM-M090

PV SV 37. Select the changing of electric resistivity/conductivity dropfrom the table below with [] key or [] key, and confirm by pressing SEL. Refer to the Operation Manual attached to these optional accessories for details.

HRX-OM-R016

Table 5.16-3 List of set value Set value Explanation Initial value (Default setting) Operation continues when this alarm signal is HRS Series 5.16 Alarm customize function 5-37 HRX-OM-R016 Chapter 5 Display and setting of various functions generated. Operation is stopped when this alarm signal is generated.

HRX-OM-W038

HRS Series 5.16 Alarm customize function 5-37 HRX-OM-W038 Chapter 5 Display and setting of various functions Changing of circulating fluid discharge temperature rise Setting and checking 4. Press the [SEL] key once. The set screen of changing of circulating fluid discharge temperature rise is displayed on the digital display. PV SV 5.

HRX-OM-O021

Table 5.16-3 List of set value Set value Explanation Initial value (Default setting) HRS Series 5.16 Alarm customize function 5-37 HRX-OM-O021 Chapter 5 Display and setting of various functions Operation continues when this alarm signal is generated. Operation is stopped when this alarm signal is generated.

HRX-OM-R005

Table 5.16-3 List of set value Set value Explanation Initial value (Default setting) Operation continues when this alarm signal is HRS Series 5.16 Alarm customize function 5-37 HRX-OM-R005 Chapter 5 Display and setting of various functions generated. Operation is stopped when this alarm signal is generated.

HRX-OM-Q026

HRSH Series 5.16 Accumulated Operating Time Reset Function 5-37 HRX-OM-Q026 Chapter 5 Display and Setting of Various Functions Reset of the accumulated operating time of the dust-proof filter 10. Press and hold the [MENU] key for approximately 2 seconds. Repeat pressing the key until the key-lock setting screen [ ] appears on the digital display.

AC Servo Motor Driver (Pulse input type/Positioning type)

If controlling using a PLC or other upper device, please turn off the power and reset the device before use.) 37 - 5.4.1 JOG Mode In order to prevent accidental impact at the end of the stroke, test actuator operation at low speed. See LECSA Operation Manual (Simplified Edition), section 5.6.2 for motor speed configuration.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Electric actuators / Common precautions . 33 6.1 Design and selection . 33 6.2 Mounting . 34 6.3 Handling . 35 6.4 Operating environment . 36 6.5 Maintenance . 37 6.6 Precautions for actuator with lock . 37 7.

SFOD-OMT0005CN

EtherNet/IP . 22 5 . 23 5.1 PWR . 23 5.2 MOT:ENC: . 23 5.3 SII/O . 23 (1) . 23 (2) . 24 5.4 P1P2: EtherNet/IP . 24 6 . 25 6.1 . 25 6.2 . 25 6.3 . 26 (1)(C24V,M24V,0V) . 26 (2)(EMG) . 26 (3)(LK RLS) . 26 6.4 . 27 (1)() . 27 (2)() . 28 -1- (3)((2)) . 29 7LED . 30 7.1 LED . 30 7.2 LED . 30 8 . 31 8.1 . 31 8.2 No. . 31 8.3 / . 31 8.4 . 31 9 . 32 9.1 . 32 (1) . 32 (2) . 33 (3) . 37

LECA6_C

CN5I/O . 23 6.1 . 23 6.2 (NPNPNP ) . 23 (1) I/O (NPNPNP ) . 23 (2) I/O . 23 6.3 . 24 6.4 I/O . 27 7. . 28 7.1 . 28 7.2 . 31 7.3 . 33 8. . 34 8.1 . 34 8.2 . 34 8.3 . 35 (1) . 35 (2) (). 35 (3) . 35 8.4 . 36 8.5 . 36 9. (). 37 9.1 . 37 9.2 . 38 10. . 39 10.1 . 39 10.2 I/O . 39 (1) . 39 (2) . 40 (3) . 41 (4) HOLD. 42 (5) . 42 2 - 6 . 42 (7) . 43 11. . 44 11.1 . 44 11.2 (). 45 11.3 I/O . 46 11.4

LECP6_C

CN5I/O .23 6.1 /.23 6.2 /(NPNPNP ).23 (1) I/O (NPNPNP ).23 (2) I/O .23 63 /.24 64 I/O .27 7 .28 71 .28 72 .31 73 .33 8 .34 81 .34 82 .34 83 .35 1 .35 2 (.35 3 .35 84 .36 85 .36 9 .37 91 .37 92 .38 10 .39 101 .39 102 I/O .39 1 .39 2 .40 3 .41 4 HOLD.42 5 .42 2 - 6 .42 7 .43 11 .44 111 [5m ].44 112 [820m].44 113 [5m ].45 114 [820m] .45 115 I/O .46 116 .46 117 .47 12. .48 12.1 .48 12.2 .49 13

MHF2

4 4.6 3 2-M5 x 0.8 thread depth 5.5 Mounting thread Groove for auto switch mounting 20 74 12-3-19 20 Series MHF2 Dimensions MHF2-16D2 4H9 +0.030 0 depth 3 36 36 36 4H9 +0.030 0 depth 3 4-M5 x 0.8 thread depth 12 Mounting thread 6 127.5 5 Finger closing port M5 x 0.8 50 142 2-M5 x 0.8 thread depth 5.5 122 26 10.6 Mounting thread E 20 20 24 33 E 0 -0.1 1.2 4-4.3 through (Mounting hole) 27 37

MHZ

groove (For D-F, D-M9(V)) 3.3 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible. 12-2-37 37 Series MHZ2 Dimensions MHZ2-40 Double acting/Single acting Basic type 58 (71) The values inside ( ) are dimensions for the single acting type. 32 2-M8 x 1.25 thread depth 13 (Mounting thread) 5H9 depth5 +0.030 0 14 0.02 14 0 0.1 4-M8 x 1.25 thread depth

3

MM M 4.5 (2 locations) M4 x 0.7 (4 locations) (Special cap bolt) FX FZ Arm 5.5 FV (mm) Rod Flange M MM Model Rod state 10 mm Clamp stroke 20 mm 30 mm 10 mm Clamp stroke 20 mm 30 mm Head Flange DModel (mm) Retracted Extended Retracted Extended 23 40.5 26 43.5 33 60.5 36 63.5 17 34.5 17 34.5 43 80.5 46 83.5 27 54.5 27 54.5 37 74.5 37 74.5 MKF12-Z FV FX FZ 25 30 45 45 55 55 MKG12-Z MKG16-Z -

Transfer

45 H 73 88 106 I 76.5 91 110 J 40 46.5 55 K 46 58 68 L 45.5 54 64 M 30.9 32.4 41.5 N 16 15 19 O 69 84 102 P 41 56 68 AA 106 133 164 BB 30 35 40 CC 16 19 23 DD 12 15 16.5 EE 14.5 16 22 FF 63.5 77.5 95 GG 22 27 35 HH 24 32 37 II 16 19 23 F 93.5 Model ML2B25 ML2B32 ML2B40 107.5 130.5 KK 15 16 17.5 LL 28 30.5 37.5 MM 16 21.5 24.5 NN 22 26 37.5 OO 9 9.8 23 PP 56 62.5 77 QQ 34.5 42 51 RR 37.5

3-Position Rotary Table

65h9 67h9 32H9 12 22H9 10 4.5 3 6.5 17 8.6 14 8.5 10 39.7 80 19 21 12 1.6 15.5 100 50 12.4 12.5 60.6 75h9 77h9 35H9 13 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU JV Q S SC SD SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M8 x 1.25 12 M5 x 0.8 M4 x 0.5 M10 x 1 34 132.5 46 50 27.3 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M5 x 0.5 M12 x 1.25 37