NARM Series

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

Thermo-chiller

, 15% Ethylene glycol aqueous solution, Deionized water Set temperature range Note 1) 41 to 95F (5 to 35C) Cooling capacity 50/60 Hz Note 3) kW 9.0/9.5 13.0/14.5 Heating capacity 50/60 Hz Note 4) kW 1.7/2.2 2.5/3.0 Temperature stability Note 5) 1.8 (1.0) Circulating uid system Rated ow 50/60 Hz (Outlet) Note 6) 11/14.8 gal/min (42/56 L/min) Maximum ow rate 50/60 Hz 14.5 to 17.9 gal/min (55

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

) 84 (58) 0.36 0.12 0.46 0.35 0.12 0.46 2 position 5 port Base mounted 0.33 0.39 0.12 0.10 0.47 0.59 [0.40] 0.46 0.31 0.12 0.47 0.36 0.58 [0.32] M5 x 0.8 M5 x 0.8 (with sub-plate) 0.43 [0.33] 0.32 0.16 [0.11] 0.11 82 (56) 92 (66) 3 position 0.42 [0.33] 0.16 [0.080] SV 36 53 41 63 37 55 2 position SZ 5 port Body ported 0.9 M3 x 0.5 M3 x 0.5 3 position 56 66 58 SY 36 53 41 63 37 55 Note 1)

F/ISE

Reference page Item 3 Output type Example of internal circuit and wiring 4 Auto shift function, Chattering prevention function 5 Measures to be taken when error occurs 6 11 For General Fluids High Precision Digital Pressure Switch Series ZSE60F/ISE60 Dimensions Bracket A A 30 20 20 45 55 4.5 11.5 40 15 4.5 6.5 1.6 20 41.5 Bracket A ZS-24-A View A Bracket D A 30 20 20 45 55 4.5 4.2 11.5 40

Prevents Micro-Bubbles

-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 Sensor (Breathing port) R VXA 2-Q VN PB LVC G H PA C LVA SMC A B LVH N E LVD J B LVQ (F) LQ LVN TI/ TIL PA (mm) Dimensions PAX A B C D E F G H J K L M M5 x 0.8 R N Q Model LVC2 LVC3 LVC4 LVC5 LVC6 30 30 54.5 44 11 79 28.5 13 4 20 37 3.5 23.5 M3 x 0.5 PB 36 47 79 56 16.5 106 43 17.5 7.5 34 46 5.5 39 46 60 96 68 22 131 55

VVX31/32/33

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Inrush Holding 5 50 3.5 45 50 20 11 60 17 7 AC VX31 Model/Valve Specifications (Fluids: Oil) AC (Full wave rectification) 50/60 7.5 6 55 DC 6 55 Max. operating pressure differential (MPa) Flow characteristics Oil Weight (g) Max. system pressure (MPa)

VXF

45 35 55 60 50 60 Rated value 10 104 VXF 2150 83 LVC DC 6 VXF 2160 AC 50 20 11 4.5 60 6 DC Rated value 10 105 LVA 85 VXF 2280 AC 50 40 18 7.5 60 8 DC Rated value 10 108 LVH 85 LVD LVQ LQ LVN TI/ TIL PA PAX PB 17-3-73 4 The VX series will be revised shortly.

VXP21/22/23

Solenoid Specifications Apparent power (VA) Inrush Holding Power consumption (W) (Holding) Temperature rise (C ) (Rated voltage) 5 50 3.5 35 6 50 8 55 6.5 45 8 50 10.5 60 9.5 50 11.5 55 Note) They are values in an ambient temperature of 20C 5C and application of rated voltage. Changing coils from AC to DC and vice versa is impossible, because of different core shapes.

VXR21/22/23

Solenoid Specifications Apparent power (VA) Inrush Holding Power consumption (W) (Holding) Temperature rise (C ) (Rated voltage) Frequency (Hz) 50 25 12 60 20 8 Model Power source 5 50 3.5 35 6 50 8 55 6.5 45 8 50 0.5 60 9.5 50 11.5 55 Note) They are values in an ambient temperature of 20C 5C and application of rated voltage.

V

Torr Absolute) 1 Torr = 0.0197PSI D ZH D I M E N S I O N S M A X I M U M S U C T I O N F L O W R AT E/ A I R C O N S U M P T I O N U N I T (ln/min) N O Z Z L E D I A M E T E R E X H A U S T P O R T 15 1.5mm 18 1.8mm 20 2 mm 12 12mm Tube 16 16mm Tube 03 Rc3/8 04 Rc1/2 T03 3/8NPTF T04 1/2NPTF Nozzle Diameter mm Specifications Max Vacuum Pressure 1.5 1.8 2.0 mmHg (Torr) Body Ported T Y P E 55

V

or less Exhaust Center NVFS5400 55 or less 3 Position Pressure Center NVFS5500 55 or less Perfect (Double Check) NVFS5600 60 or less T E C H N I C A L SPECIFICATIONS O P T I O N A L T E C H N I C A L SPECIFICATIONS S T A N D A R D Pilot Type External Pilot Type Fluid Air and Inert Gas Manual Override Main Valve Direct Manual Override Type Max Operating Pressure 150 PSI (1MPa) Pilot Operator

SZ3000

L 20 46 (7.5) L 14 1 8 55 47.04 (35) (25) 5.5 Approx. 10 25 13 2-M2.6 x 0.45 Socket side Rail mounting hole pitch 12.5 Plug connector HDB-CTF Terminal No.

VQ7-6/7-8

279 236 193 150 107 L2 L2 = 43n + 76 506 463 420 377 334 291 248 205 162 119 7 Series VQ7-6 Prewired Connector Type VV71-100 80 9 14 Indicator light U side 15 R4.5 Manual override 53.5 P = 43 20 9 23 38 B B B B B SMC SMC SMC B B B A A A A PA PA PA PA A A A A A L1 L2 SMC PA R side L side (2n-Rc1/8) D side 4n-Rc1/4, 3/8 (ports A, B) 3 68.5 16 120.5 (single) 145 (double) 155 (3 position) 44 55

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ (47.5) 9.9 9.9 3-M5 x 0.8 P, R port VQD Foot bracket VZS 5 1 3 VFS 22.2 Die cast hole For manifold gasket positioning PE port VS VS7 L plug connector (L): VQZ112 wLwC3, C4, C6, M5 0 1 M plug connector (M): VQZ112 wMwC3, C4, C6, M5 0 1 Cover diameter 1.5 Cross section 0.23mm2 34 <39> 300 (Lead wire length) 76 (Metal seal) <77> 73.5 (Rubber seal) <74.5> 300 82 (Metal seal) <83> 54 <55

Ejector Valve Unit Series ZYY/ZYX 1

Indicator light SET2 30 V, 80 mA + Analog output 12 to 24 VDC Load White Blue DC () ZSE1-55 Brown DC (+) When using to confirm adsorption, set to the minimum vacuum pressure at which adsorption is possible. If set below this valve, the switch will turn ON even when adsorption has failed or is insufficient.

%silltr

23 23 23 23 24 24 24 24 26 26 27 28 55 55 J5 57 - C o T E N T S T A B L E o F Load Fatio Speed Control Air Flow and Consumption Rotary Actuators Rack and Pinion Type Vane Type Rotary Actuators: Sizing Rotary Actuato|s Torque and Inertia Spcial Actuators Locking Cylinder Rodless rylinders Wilh magnetic coupling, unguided Guided types, with magnetic coupling Guided, with mechanical coupling

76

8.30 1.5 Rc3/8 IDF3E 11.3 13.1 2.2 IDF4E 18.4 20.1 3.7 Rc1/2 Single-phase 100/200 VAC (50 Hz) IDF6E 26.5 29.0 5.5 Single-phase 100/110 VAC, 200/220 VAC (60 Hz) IDF8E 43.1 46.6 7.5 Rc3/4 IDF11E 58.3 64.3 11 IDF15E1 98.9 109.5 15 Rc1 IDF22E 137.7 151.8 22 R1 Single-phase/Three-phase 200 VAC (50 Hz) Single-phase/Three-phase 200/220 VAC (60 Hz) IDF37E 201.3 215.4 37 R1 1/2 IDF55E 296.6 346.0 55

reduces flow setting time

15 AS231FS1-G01-08 8 13.2 10.2 16.4 30.1 21.5 39.7 14.2 16 AS231FS1-G02-04 4 7.2 9.6 12 13.2 24 17.5 35.7 43.8 42.4 38.3 36.9 13.3 20 15 1/8 13 ASN AQ 26 AS231FS1-G02-06 6 10.4 19 33.8 21.4 43.9 28 AS231FS1-G02-08 8 13.2 34.9 23.5 46 14.2 29 AS231FS1-G02-10 10 15.9 20.9 38.1 24.7 47.3 15.6 32 AS331FS1-G02-06 6 8.2 16.5 29.9 17.5 40.1 49.7 48.3 43.2 41.8 13.3 21.5 16.2 1/4 17 12.9 13 ASV 55

Speed Controller with One-touch Fitting

41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 42.3 40.7 37.1 35.5 13.3 31 (32) AS321F-03-09(S)A 5/16" 13.2 22.7 33 14.2 AS321F-03-11(S)A 3/8" 15.5 26.7 37 28.2 15.6 32 (33) AS421F-04-11(S)A 3/8" 1/2 24 (23.8) 15.5 18.8 27.4 40.3 (40.2) 36.2 50.8 49.2 43.7 42.1 15.6 54 (53) AS421F-04-13(S)A 1/2" 19.3 30.9 43.8 (43.7) 34.7 17 56 (55

C76

200 st Bore Single acting/Spring extended Auto switch model B A 32 40 32 40 8 13 8.5 13.5 137 137.5 82 87 82.5 87.5 32 37 32.5 37.5 57 62 57.5 62.5 107 112 107.5 112.5 D-C7/C80 D-C73C/C80C D-J79C D-A73 D-A80 D-A72/A7H/A80H D-A73C/A80C D-F7/F7W D-J79/J79W D-F7WV D-J79C D-F7BAL, D-F79F 32 9 83 33 58 108 40 14 138 88 38 63 113 105 110 32 40 32 40 6 11 7 12 135 80 85 81 86 30 35 31 36 55