7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Component Parts Note Note No. q Description Material No. Description Material Bushing B !
7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Note Note No. q Description Material No.
P EA EB 3 position pressure center A B 5 EB P EA 3 position double check A B 6 EB P EA For the solenoid valve specifications and dimensions, please refer to VQC catalog (ES11-80). Please refer to page 13 for Series EX250 single SI unit dimensions. For details of the Series EX250 SI unit, please refer to the technical instruction manual.
DIN DIN DIN DIN D 68mm Y 4.57mm T 68mm E 2.32.8mm E, T 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S D,Y R Y Z EZTZDZLZMZ AC24V (+) D C S VF1000 VF1000 VF1000 VF1000 VF3000 VF3000 VF3000 VF3000 VF5000 VF5000 VF5000 VF5000 () P P(SUP) P A B A(CYL2) B(CYL1) A B EA EB R1(EXH2) R2(EXH1) R1 R2 (B)2 4(A) (B)2 4(A) (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 3(R2) 1(P) 5(R1) JIS () Z (B)2 (A)4 1:P 2:
PA PA(P) PAX PPS/PFA dual construction, withstand pressure and heat cycle performance have been improved. No metallic parts are used.
Air operated style fluid control valve Vacuum valve Vacuum pad 2(A) 1(P) 2(A) 1(P) 2(A) 1(P) 2(A) 3(P) 3(R) 3(R) 3(R) 1(R) Atmospheric air or micro pressure for vacuum release 22 Multi-purpose Valve Series VCA Direct Operated 2 Port Solenoid Valve for Air Improved durability (Nearly twice the life of the previous series) Operating resistance of moving parts reduced for improved longevity
PA T (N) d d NN RW RW PW QW PB GP lE W Y Z 2-M5X0.8 2-RB G G HT U (NA) (Option) A L HN(MAX.)
Tubing T S Coupler KK S Coupler/Stainless Steel (Stainless Steel 304) KKA Series T TU TH Material Nylon Polyurethane FEP (Fluoropolymer) Modified PTFE (Soft fluoropolymer) Super PFA PFA Metal One-touch Fittings KQB2 Stainless Steel 316 One-touch Fittings KQG2 TD TL TLM Stainless Steel 316 Insert Fittings KFG2 Fluoropolymer Fittings LQ 323 C O N T E N T S HRL Series Dual Channel Refrigerated
(O.D.10, Length approx. 2m) Inside diameter 25 Compressed Air outlet (The opposite side (For Option K: 16K) 4xEye bolt condensed water JIS flange 80A 10K Drain tube for Drain tube Drain tube 268 t 217 20 18 t A A 8x23 8x19 20 Flange bolt hole Drawing of view A 75 4x 1056 720 9351 1290 160 150 t Other than Option K Option K Model (For Option K: 16K) Compressed Air inlet JIS flange 80A 10K
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR Model VH Flow characteristics Pilot port size Pilot port piping location b Cv b C [dm3/(sbar)] 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Cv Function Port size Valve model VHS VZA2121-M5 VZA2221-M5 VZA2321-M5 VZA2421-M5 VZA2141-1-01 VZA2141
x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 N.C.
Bulkhead female union P. 77 KCE Use for transit connection of a tube and a male screw for installation of panel. 74 Series KC Self-seal Fittings M5 Half union: KCH M5 Applicable tube O.D. (mm) Effective orifice(mm 2) Weight (g) A Thread R(PT) Part No. H (Hex.)
GD M Q R Bore size (mm) 20 25 32 40 M8 x 1.25 depth14 80 5.5 60 3.5 93 35 4 4 25 26 M5 x 0.8 54 50 14 105 M6 x 1 M10 x 1.5 depth18 95 9 70 4 103 40 7 7 32 31 M5 x 0.8 62 125 60 M8 x 1.25 14 M10 x 1.5 depth18 95 9 70 4 104 40 7 7 32 38 Rc 1/8 Rc 1/8 62 60 13 125 M8 x 1.25 M12 x 1.75 depth 21 115 11 82.5 4 115 45 8 8 38 47 67 75 14 150 M8 x 1.25 WH W X Y U W T V Z Bore size (mm) 20 25 32 40
GD GK GL GQ GR H I J K L M N O Q R S Bore size (mm) 20 25 32 40 M8 x 1.25 depth14 80 5.5 60 3.5 93 M5 x 0.8 54 4 4 35 105 50 25 M6 x 1 14 26 M10 x 1.5 depth18 95 9 70 4 103 M5 x 0.8 62 7 7 40 125 60 32 M8 x 1.25 14 31 M10 x 1.5 depth18 95 9 70 4 104 Rc 1/8 Rc 1/8 62 7 7 40 125 60 32 M8 x 1.25 13 38 M12 x 1.75 depth 21 115 11 82.5 4 115 67 8 8 45 150 75 38 M8 x 1.25 14 47 WH W X Y T U V W
Specifications Model PSE530-M5 PSE531-M5 101 to 101kPa PSE532-M5 PSE533-M5 Rated pressure range 0 to 1MPa 0 to 101kPa 0 to 101kPa Proof pressure 1.5MPa 500kPa Air, Non-corrosive gas Fluid 12 to 24VDC (Ripple 10% or less) Power supply voltage Current consumption 15mA or less Output specification Analog output (1 to 5V, Output impedance: Approx. 1k) Accuracy 2% F.S. or less (within rated pressure
physical property values by circulating uid. m x C x (Tt T0) x V x C x T Q = = t t 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (Tt T0) t x 860 x V x 60 x C x T t x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = Q x t: Heat capacity [kJ] Thermo-chiller 6977 [W] = 7.0 [kW] Water bath
e t e q IN OUT IN OUT r r q w w Component Parts No.
x 1.25 depth 14 32 40 75 22 16 18 107 8.6 140 50 34.5 160 14 depth 10 M10 x 1.5 depth 18 37 M8 x 1.25 depth 16 45 110 22 19 23 142 10.5 170 80 37 194 17 depth 12 M12 x 1.75 depth 21 42 M10 x 1.5 depth 20 Bore size (mm) W Z Y X WH W V U T S R Q O N M L K J I P 20 25 32 40 50 30 140 80 30 23 36 40 86 12 26 12 21 M6 x 1 25 38 80 60 44 25 M5 x 0.8 30 153 80 37 25 44 47 98 13 31 12 21 M6 x 1
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Buffer mounting (Male thread) Buffer mounting (Male thread) Mounting Male thread Female thread Female thread Vacuum entry port Female thread Common Female thread Female thread Female thread P. 13-11-91 to 92 P. 13-11-86 to 88 P. 13-11-86 to 88 P. 13-11