Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N7L (ø1/4" One-touch Fitting, Elbow Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

MHY2/MHW2

Switch return position (OFF) D-F9N D-F9B D-F9BA D-F9NW D-F9NV D-F9BV D-F9NWV MHS O MHY2-10D 3 8 13 6 1 1 8 S Hysteresis O MHY2-16D 3 8 13 7 1 1 8 S MHC2 Switch operating position (ON) O Hysteresis MHY2-20D 5 10 4 5 S Switch operating position (ON) MHT2 O Switch return position (OFF) MHY2-25D 3 9 3 3 S MHY2 D-F9NW(V) D-F9BA MHW2 D-F9N(V) D-F9B(V) Red light at ON Red light at ON Green

MHx-OMY0001

D-P3WA 56mm Nm D-M9(V) D-M9W(V) D-M9A(V) D-P3DWA 0.050.15 -12- (mm) L1 L2 L3 L4 L5 L6 16 5 MHM-16D 1 1 1 1 MHM-25D 36 34 MHM-32D 50 24 MHM-50D 23 25 80 41 / 3 NPN 3 PNP PLC PLC 2 2 PLC PLC PLC PLC -13- AND(),OR() *50ms 3 NPN OR 3 NPN AND 1 1 1 2 2 2 3 PNP AND 3 PNP OR 1 1 1 2 2 2 2 AND 2 OR 2 AND ON , 2 ON 20V 2 OR OFF OFF 1 1 ON 2 2 ON =-2 OFF =2 =1mA2 3k =6V 3k

I

I ll lir r i I l l l + r EtacK ^^ DC Lamp, Surge Voltage Supffessor Circuit z *"o",.ioffiJl-l|= *-ilEll-l'" EZ, TZ, DZ EZ, rZ, DZ {1@V or more) (Less tban 24V) Electrical Connection Use As A 3 Port Valve a For the DIN connection and Terminal connection (with surge voltage protection circuit), inner connections are as follows.

•

Tokyo 105 JAPAN Te/:03-3502-2740 Fax:03-3508-2480 1st pnnhng February 1995.D-036,P-53{M) November 1997, 67 5(RP) SpeclilCatlons are subject to change without pnor notICe Printed In Smgapore and any obltgaltOn on the pa r1 01 the manifacture.

Series GS40 Digital Pressure Sensor 1

G Lead wire length Digital pressure sensor 0.6 m 5 m Nil X202 PPA A variety of installation options Screw includedM5, Mounting bracket M5 type only 8 1 R , 4 1 R Unit specifications AL With the unit switching function Note) Nil M Port size Fixed in SI unit (MPa) M5 (Female thread) R1/8 R1/4 M5 01 0 Note) With unit switching function is not permitted to sell for the domestic use in Japan,

Series GS40 Digital Pressure Sensor 1

G Lead wire length Digital pressure sensor 0.6 m 5 m Nil X202 PPA A variety of installation options Screw includedM5, Mounting bracket M5 type only 8 1 R , 4 1 R Unit specifications AL With the unit switching function Note) Nil M Port size Fixed in SI unit (MPa) M5 (Female thread) R1/8 R1/4 M5 01 0 Note) With unit switching function is not permitted to sell for the domestic use in Japan,

E-P HYREG

IRV 1 to 4 V 67 k 6 0 to 7.5 V 10 k 7 4 to 16 mA 120 8 0 to 15 mA 12 V VEX SRH Body size Port size Rc Option Mounting Symbol Symbol Port 1(P), 2(A) Port 3(R) B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Applicable pilot valve (4) SRP D 00 Without sub-plate M5 M5 SRF B 00 Without sub-plate M5 M5 01 18 ITV 2 00 Without sub-plate 01 18 02 14 Base mounted IC VY1D0-X39 (5) 00 Without

AMR3000 to 6000

Failure to observe this precaution could damage the filter element. 1.9-3 Regulator with Mist Separator AMR3000 to 6000 Dimensions AMR4000, 5000, 6000 AC AV AU AMR3000 AF AR IR VEX AW AMR AWM AWD ITV VBA VE AMR3100 AMR4100 AMR5100 AMR6100 SAMR, #1 SAMR, #2 SAMR, #3 SAMR, #4 VY G N Bracket mounting dimension With auto drain Model Port size A M L K J H G F E D C B U (Body) V (Adapter) L 178

E-P HYREG ® Series VY1 1

12 V Body size Port size Rc Option Symbol P/A port R port B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Symbol Mounting Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note

Compact and Lightweight

H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04

PSE200.eng

When [M] is included in the controller model number (fixed SI units), set up the controller to display the units according to the table below. When [M] is not included in the controller model number (with unit conversion), the appropriate units label should be used from the table above. If the error cannot be reset after the above measures are taken, then please contact SMC.

90

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.005 to 0.2 MPa V V 0.01 to 0.2 MPa V 1 0.01 to 0.4 MPa V V V 2 0.01 to 0.8 MPa V V V + ARM ARP IR-A IR-A e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR IRV r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH

PSE300.eng

When [M] is included in the controller model number the controller displays [S_J]. When [M] is not included in the controller model number the controller displays [S_F]. Hysteresis mode ON OFF Power on Specifications Outline with Dimensions (in mm) n_1 High pressure Wiring Normally closed mode Detects pressure displays values and performs switching.

HRX-OM-T004

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRS090 Series 5-20 HRX-OM-T004 Chapter 5 Simple communication

HRX-OM-R028

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRSH Series 5-20 HRX-OM-R028 Chapter 5 Simple communication