Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) (mm) Q1 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Size 30 50 63 80 100 Size 30 50 63 80 100 Symbol: A35 Symbol: A36 Symbol: A37 Machine female threads into the short shaft.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) (mm) Q1 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Size 30 50 63 80 100 Size 30 50 63 80 100 Symbol: A35 Symbol: A36 Symbol: A37 Machine female threads into the short shaft.

One-touch Fittings

[mm] Weight [g] X Y Nylon Urethane 4 M5 x 0.8 KQ2H04-M5G1 8 7.9 7.7 10 17.7 14.7 13.3 4 4 2.5 3.3 6 M5 x 0.8 KQ2H06-M5G1 10 9.9 9.7 12 17.7 14.7 13.3 4 4 2.5 4.1 *1 D Oval type M A L 4, 6 H *1: D is the body diameter.

Slide Tables MX Series

side mounting Work piece mounting L L Use a mounting bolt that is 0.5mm shorter, when attached, than the L dimension.

E-P HYREG

Port 1 (P), 2 (A), 3 (R) 3 x M5 Silencer (Option) VY1A0 0 1 Applicable cable O.D. 4 to 6.5 Connection mark All types are the same in terms of connection. (VY1A01 only) M5 external pilot port Foot (Option) Port 1 (P), 2 (A), 3 (R) 3 x M5 VEXA-18-3A Hexagon socket head cap screw M3 L = 8 (2 pcs.)

Electric Actuator with Integrated Guide

Output transistor OFF OFF Hexagon socket head bolt (M3 x 6) Tightening torque: 0.290.01Nm Operate Operate Load 1 (Relay) Load 1 (Relay) Return Return H H Load 2 Load 2 L L Be sure to use the attached mounting screws.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations 583 Series AS1F-D Construction Universal type Meter-out type Elbow type Meter-out type M5 type U10/32 type M5 type U10/32 type Meter-in type Meter-in type M5 type U10/32 type M5 type U10/32 type 584 Series AS1F-D Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

x 0.8 (Plug: M-5P) 4-M5 x 0.8 4-M4 x 0.7, depth 4.5 Bottom hole diameter 4.2 22 0.05 W 8 0.05 33 D B Operating port 2-M5 x 0.8 10 J 5 Mounting base side B D 12 9.5 Across AA MXP12-25B Without magnet and switch rail 2-M3 x 0.5, depth 3.5 2-M2 x 0.4, depth 3 For magnet mounting For rail mounting 8 5.7 3.5 6-M4 x 0.7, depth 4.5 20 20 L (mm) Model H M W J S Z K MA V L MXP12-15B 40 29 55 68

SMC Electronic Switch Series Variations

0 to 100kPa R(PT) 1/8, M5 X 0.8 L NPTF 1/8, M5 X 0.8 Note) M5 X 0.8 (female) thread.

CJ5-S

m L Part no.

CJ5-S

m L Part no.

Battery-less

16: LEFS32(L/R)EA Lead 16: LEFS32(L/R)EA 20 10 Lead 24: LEFS32(L/R)EH Lead 24: LEFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEFS40(L/R)EB Lead 10: LEFS40(L/R)EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEFS40(L/R)EA 30 Lead 30: LEFS40(L/R)EH Lead 20

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L plug connector (L) (Made to order) 100V AC 200V AC 110V AC 220V AC 0.6 0.7 M plug connector (M) (A) 2 1 (P) 3 (R) M plug connector (M) N.O.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

of needle rotations Number of needle rotations Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area (mm2) Effective area (mm2) AS ASP Number of needle rotations Number of needle rotations ASN Construction AQ Meter-out type M5 type U10/32 port AS3200-02 ASV u w e t o u q !

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Thread type AS-D Port size Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT M5 U10/32 01 02 M5 x 0.8 AS-T 10-32 UNF 1/8 N ASP 1/4 ASN Made to Order AQ ASV Lubricant: Vaseline X12 Grease-free (Seal: Fluorine Coated) + Throttle Valve (Without Check Valve) X21 AK Ex.) AS1201FM-M5-23-X12 Ex.)

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Crack on the back of the belt LES Model Screw size Max. tightening torque [Nm] Length: L [mm] LEYG25M L M5 x 0.8 3.0 40.3 LEYG32M L M5 x 0.8 3.0 50.3 LEPY LEPS L LER Body fixed/Bottom mounting LEH Model Screw size Max. tightening torque [Nm] Max. screw-in depth [mm] LEYG25M L M6 x 1.0 5.2 12 LEYG32M L M6 x 1.0 5.2 12 LEY -X5 11LEFS 11LEJS Body fixed/Head side tapped type Model Screw size

Series AS-FM/AS-M/ASD-FM

10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 6 8 10 With One-touch fitting For low speed control Thread type Port size M5 U10/32 01 02 Nil Metric thread (M5) Unified thread (10-32UNF) R NPT M5 x 0.8 10-32UNF 1/8 1/4 N Needle Valve/Flow Rate Characteristics ASD230FM ASD330FM ASD430FM 0.8 Upstream pressure 0.5MPa Upstream pressure 0.5MPa Upstream pressure 0.5MPa 50 10 20 0.15 0.3 Flow rate l/min

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

M M A L1 H/DL L/LL D1 D2 L2 KC H Connection threads KK Male Branch: KPQU, KPGU (M5) KK130 Effective area mm2 D Model L TPH TPS A (M5) 2 x Applicable tubing Connection thread R M H (width across flats) Note1) Applicable tubing O.D. mm Weight g P M P DM D M5 x 0.8 1/8 1/4 M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Bottom Mounting: CJ2RA, CJ2RA 10112122X GC Y Relief port M5 x 0.8 GA GB Piping port 2 x M5 x 0.8 Piping port M5 x 0.8 MM C D B 0 0.3 L LX B 0 0.3 LB LH Head cover port location Axial (R) NA H A Z + Stroke S + Stroke NB 2 x LD The overall cylinder length does not change.