SMC Corporation of America
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Entry Vertical ~ _~ Connection Male thread Female thread Vacuum ~2~8 Ms x O.8,M6 x l M4 X O.7,MS X O.8 entry Thread 11O ~16 MS X O.8,M6 x l M5 X O.8,M6 x l ,Ys dia. 120-~32 M6 X l ,M8 x l MsxO.8,M6x I ,M8 x l .2S,Y, -140'1S0 M6 X l ,M8 x l M6 Xl,M8 x 1.25, Va Mounting Use connection for vacuum entry NBR(Black!

W U U X X U1 U1 X1 X1 z300 Q F D D z300 Q F 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole R C C R E 1.2 1.2 1.2 1.2 E B1 B1 2 x P Port size 2 x P Port size B B DIN terminal Conduit terminal Y Y W W U U X X U1 U1 X1 X1 Cable 6 to 12 F Q 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole D D S G1/2 Qp2 F 34 (44) 31.5 25 T C R R G1/2 E E Sp2 B1 2 x P Port size 2 x P Port size B1 B B (mm) Mounting bracket

P Port size 2 x P Port size U W M U W M X 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole DIN terminal Conduit terminal D G1/2 S Q F Cable 6 to 12 34 D Q2 F (44) 31.5 32 25 R T E C R Y E C 1.5 1.5 S2 B B1 A A Y B B1 2 x P Port size 2 x P Port size U W M U W M X 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole (mm) Mounting bracket dimensions Port size P 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 A B B1 C

EX600-ZMA2 EX600-ZMA3 (Specialized for SY series) Enclosed parts Round head screw (M4 x 20) 1 pc. P-tight screw (4 x 14) 2 pcs. Enclosed parts Round head screw with washer (M4 x 20) 1 pc. P-tight screw (4 x 14) 2 pcs. w Valve Plate EX600-ZMV1 EX600-ZMV2 (Specialized for SY series) Enclosed parts Round head screw (M4 x 6) 2 pcs. Round head screw (M3 x 8) 4 pcs.

-www.stevenengineering.com 4-T counterbore W + Stroke S + Stroke Z + 2 x Stroke 16 to 32 2-M5 x 0.8 (32: Rc 1/8) Rod end nut 2-P through Auto switch Width across flats L 2-P through Width across flats L A' 4-T counterbore S + Stroke W + Stroke Z + 2 x Stroke Rod End Nut/Accessory Material: Carbon steel Part no.

1.94) 6 x 1m 6 x 1m 8 x 1m AS3001F-08 (Cv = 0.56) 8 x 1m AS3001F-08 (Cv = 0.56) AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN101-01 (Cv = 1.11) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89) 10 x 1m AS3001F-08 (Cv = 0.56) 12 x 1m AS4001F-10 (Cv = 1.17) 6 x 1m 6 x 1m AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN200-02 (Cv = 1.94) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89

5 6 6 6 6 No. 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

PA_ _ ]) [] PA01 **STY _ _ _ x 0h _ _ x _ 0: (0) 0h _ x _ _ 0h x _ _ _ MR-J4(W)-B [AL.3E ]8 0: J3 (LECSS-) 1: J4 (LECSS2-T) 1h 5 12 5. [] PA02 **REG [AL.37] _ _ x x 00: 00h 100W 200W750W 02:LEC-MR-RB-032 03:LEC-MR-RB-12 _ x _ _ 0h x _ _ _ 0h 5 13 5. [] PA03 *ABS _ _ _ x 0: () 1:() 0h _ _ x _ 0h _ x _ _ 0h x _ _ _ 0h PA04 *AOP1 A-1 _ _ _ x 0h _ _ x _ 0h _ x _ _ 0(EM2EM1) 1(

HRZ x V x C x iT it m x C x (T0 Tt) it Q = = HRZD 1 x 300 x 4.186 x 103 x 12 900 = = 16744 [J/s] 16.7 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 HRW Q = = Cooling capacity = Considering a safety factor of 20%, 16.7 [kW] x 1.2 = HECR 1 x 300 x 60 x 1.0 x 103 x 12 15 x 860 20 [kW] = HEC Thermo-chiller Q x t: Heat capacity [kJ] 16744 [W] = 16.7 [kW] Water bath 20C HEB Cooling

X-axis Y-axis Z-axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3 Calculation of Load Factor for Static Load m1: Weight m1 m1 max (from q of graph MY3A m1) = 10.7 (kg) Load factor 1 = m1 m1 max = 0.8 10.7 = 0.08 X M1: Moment M1 max (from w of graph MY3A M1) = 4 (Nm) m1 M1 = m1 x g x X = 0.8 x 9.8 x 5 x 10-3 = 0.04 (Nm) M1 Load factor 2 = M1 M1 max = 0.04 4 = 0.01 M2: Moment Y M2 max (from

4 1 x 4 0.75 x 4 0.9 x 8 1 x 4 8 8 10 10 10 12 12 14 14 14 14 14 17 17 17 24.3 24.3 24 24 24 16 16 17 17 17 KNS-08-075-4 KNS-08-100-4 KNS-10-075-4 KNS-10-090-8 KNS-10-100-4 2 H2 H1 L1 Low noise nozzle with male thread/KNS (mm) Model Nozzle size D Connection size L1 A Width across flats H1 0.75 x 4 1 x 4 0.9 x 8 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 R 1/8 R 1/8 R 1/8 R 1/4 R 1/4 R

H 8.5 14 M4 x 0.7 18.2 4.2 24 25 8.5 A 20 4-M5 x 0.8 4-M4 x 0.7, depth 4.5 Bottom hole diameter 4.2 19 1.5 W 22 0.05 32 0.5 0.05 B D Piping port 2-M5 x 0.8 33 10 J 5 12 9.5 Mounting base side B D Across AA MXP12-25 Without magnet and switch rail 2-M3 x 0.5, depth 3.5 2-M2 x 0.4, depth 3 For magnet mounting For rail mounting 8 5.7 3.5 6-M4 x 0.7, depth 4.5 20 20 L (mm) Model G M W H S Z

[mm] Model D1 Q2 Q2 Applicable tubing b 2 x N L3 L1 M1 Q1 Q1 D2 2 x O D2 L2 L2 M2 M2 Release button dimensions X X Y Applicable tubing O.D.: 3.2, 4, 6 Different Diameter Tee: KQ2T 2 x Applicable tubing a Release button dimensions b L1 L2 L3 M1M2 Q1 Q2 Mounting hole Effective area [mm2] Min. port size Release button dimensions a D2 Applicable tubing Weight [g] X (X) Y X (X) Y ON Thickness

21 8 M8 x 1.25 M8 x 1.25 6 7 7 14 18 18 22 26 11 11 14 17 17 11 12 15 19 19 501 to 800 11 11 13 16 601 to 1200 601 to 1200 751 to 1400 751 to 1500 M10 x 1.25 M12 x 1.75 M12 x 1.75 102 116 10 10 100 Stroke range Bore size Without rod boot With rod boot MM N P RT RY S (mm) (mm) H ZZ d e f h L ZZ 40 50 63 80 501 to 800 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 51 58 58

8 1(IN), 2(OUT) port 17.5 17.5 2 x M5 x 6.5 15 15 2 x M5 x 6.5 CS: Conduit DS: DIN terminal DZ: DIN terminal with light Applicable cable 6 to 12 18 67 36 55.3 G1/2 48.9 500 18 36 NPT1/2 63 17.5 63 17.5 42.1 40.6 IN IN 8 8 28 30 30 28 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x M5 x 6.5 15 2 x M5 x 6.5 15 15 Direct Operated 2-Port Solenoid Valve JSX Series Dimensions

CQSKB125D 10D 15D 20D 25D 30D M3 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l M3 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l M5 X 30 l X 35 l X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l M5 X 35 l X 40 l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M5 X 25 l X 30 l X 35 l X 40 l X 45

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G MM L J K C D B A W MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 26 55 115 235 420 4.45 5.8 7.45 8.9 14.8 17.7 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 3 5 6 8

D4-MM thread depth L (Thread for mounting attachment) 20K K J J B A A D G D B F C S W O (mm) Model A B C D F G Open Closed Double acting Single acting J K L Weight (g) MM W MHZL2-103 MHZL2-163 MHZL2-203 MHZL2-253 +2.2 0 2H9 2.5H9 3H9 4H9 0 0.2 0 0.2 0 0.2 0 0.2 +0.025 0 5 8 10 12 0 0.05 0 0.05 0 0.05 0 0.05 70 145 290 505 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 60 135 270 460 7 9

HRZ x V x C x iT it m x C x (T0 Tt) it Q = = HRZD 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 HRW Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = HECR 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = HEC Q x t: Heat capacity [kJ] Thermo-chiller 6977 [W] = 7.0 [kW] Water bath HEB Cooling capacity

DC: 1 W (With indicator light: 1.05 W) Nil AC DC: 0.45 W (With indicator light: 0.5 W) Y Only 24 VDC and 12 VDC are applicable to 0.45 W. Note) Screw length of VJ100 and VJ300 for series ZX is different from that of the standard model. VJ100M1.7 x 15 VJ300M1.7 x 22 869 Series ZX Ejector Unit Specifications ZX1-W05 1 2 ZX1-W07 1 2 ZX1-W10 1 2 Nozzle dia.