High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

MY1

Applicable cylinder Port variations MY1B10 MY1H10 L R L L R R R Note 1) Note 1) R R R L L R L L L L R Slide table operating direction Note 1) These ports are not applicable to MY1H10.

Thermo-chiller/Rack Mount Type

-W Approx. 2 HRR018-W Approx. 4 HRR024-W Approx. 5 HRR030-W Approx. 6 HRR050-W Approx. 10 Electric conductivity (25C) [S/cm] 100*1 to 300*1 v v Refer to Facility water system in the specifications.

PSxx-OMV0003CN

(2 ) 2o1Lv(OUT1 ) 3o2Lv(OUT2 ) 4LinE() 5oFF() 1100 0x044C 0 R/W U8 0 Y std 1101 0x044D 0 R/W Std U8 0 Y 2 1102 0x044E 0 R/W U8 0 Y 2 2 1103 0x044F 0 R/W U8 1 Y Line 1820 0x071C 0 R/W Line 1 U8 0 Y 1 (11seg) 1821 0x071D 0 R/W Line 2 U8 0 Y Line 24 (7seg) 1822 0x071E 0 R/W Line 3 U8 0 Y 1823 0x071F 0 R/W Line 4 U8 0 Y 1824 0x0720 0 R/W Line bot U8 0 Y 1825 0x0721 0 R/W Line

PSxx-OMV0008CN

11seg) 1821 0x071D 0 R/W Line 2 U8 0 Y Line 24 (7seg) 1822 0x071E 0 R/W Line 3 U8 0 Y 1823 0x071F 0 R/W Line 4 U8 0 Y 1824 0x0720 0 R/W Line bot U8 0 Y 1825 0x0721 0 R/W Line bot U8 0 Y 0OFF(dot ) 1ON(dot ) 1826 0x0722 0 R/W Line bot U8 0 Y () U8 0 Y 0 1(1/10) 1110 0x0456 0 R/W drE (Zero-cut) U8 0 Y 010 0 0 1.0% 1140 0x0474 0 R/W Cut () U8 0 Y 0oFF 1on 1800 0x0708 0 R/W Eco Pin

IIIIIIIIII

Model Number Description R-800-XX-W/K Precision regulator with adjusting knob R-800-XX-W/S Precision regulator with 1/4" adjusting shaft R-800-XX-W/OS Precision regulator with slotted adjusting shaft R-801-XX Factory pre-set regulator R-810-XX-W/K Non-bleed, non-relieving with adjusting knob R-810-XX-W/S Non-bleed, non-relieving with 1/4" adjusting shaft R-810-XX-W/OS Non-bleed, non-relieving

Series SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

modular-press-e

IN OUT Replacement Parts r w e t Part no. AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 No.

Modular F.R.L. Pressure Control Equipment

IN OUT Replacement Parts r w e t Part no. AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

15

Series Variations Series Size Page 25 32 40 63 Slider Type Ball Screw Drive LEFS Series 784 100 W 200 W 400 W Slider Type Belt Drive LEFB Series 805 100 W 200 W 400 W High Rigidity Slider Type Ball Screw Drive LEJS Series 824 100 W 200 W Rod Type LEY Series 848 100 W 200 W 400 W Guide Rod Type LEYG Series 864 100 W 200 W The values in shows the equivalent motor capacity. 780 LE Series Compatible

Shock Absorbers and Rate Controls

(otaloq l{0, lltlodell trl tl P 0 R 5 T U v w x CR 6.59 ?

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

Modular F.R.L. Unit

Note 2) Use a bushing (part no: 131368) when connecting R 1/8 pressure gauge to R 1/16 gauge port. Note 3) Not applicable to AW10. Accessory part no.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

3 (R) 1 (P) 5 (R) 3 (R) 1 (P) e t q r w w q t r A B A B SY SYJ u u R P R R P R SX y VK 3 position closed center/exhaust center/pressure center VZ 3 position closed center VF (A) 4 (B) 2 w t q r VFR 5 (R) 3 (R) 1 (P) 3 position exhaust center A B (A) 4 (B) 2 VP7 5 (R) 3 (R) 1 (P) VP4 3 position pressure center u (A) 4 (B) 2 R P R (This construction shows a closed center.) 5 (R) 3 (R) 1 (P

REA/REB

depth R 14 8-Q Effective thread depth R 14 22 23 25 K W 23 25 4-M8 x 1.25 Effective thread depth 12 B C 0.1 14.5 2 S + Stroke 2 ZZ + Stroke (mm) Model B C D E (h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 300.033 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 0 320.039 100 38 66 72.2 26 122 69 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 Mounting Nuts: 2 pcs.

REA/REB

9 u o i @7 @9 @5 @6 @4 e y r !3 q #0 !1 w @0 !8 t !4 !5 @2 @1 #2 #4 #5 #7 #6 #8 Component Parts No. Description Cylinder tube No.

TABLE OF CONTENTS

Body Brass Body Hydrolic Oil Non-Flammable NR NR NR NR Standard R R R R Hydrochloric Acid NR NR NR NR Hydrogen R R R R # Inert Gases R R R R JP4 JET Fuel V V V V JP5 JET Fuel V V V V Kerosene R R R R Ketones PP NR PP NR Lacquer PP PP PP PP Linseed Oil R R R R Lubrication R R R R Mercury R*** NR R*** NR Natural Gas R R R R Nitric Acid PP NR PP NR Nitrogen R R R R Oxalic Acid NR NR NR NR Oxygen