Air-hydro Unit

nominal size (mm) Limited flow (dm3/min) Standard effective oil level stroke (mm) 100 300 750 200 600 1510 3660 300 890 2260 5490 400 1190 3010 7320 500 1480 3770 9150 600 4520 10980 700 12810 800 14640 50 150 63 100 160 36 88 217 Limited flow shows the limit of converter oil level speed (200 mm/s) which can maintain stability of converter oil level.

15

1 y, z + A = 200 y, z + A = 300 1 y, z + A = 200 0.1 y, z + A = 300 0.01 0.1 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Stroke [mm] Stroke [mm] [Graph 7] Allowable load mass by stroke 40 100 y, z + A = 0 y, z + A = 50 Load mass [kg] y, z + A = 100 y, z + A = 200 10 y, z + A = 300 1 0 200 400 600 800 1000 1200 1400 1600 If load center of gravity exceeds the

HRX-OM-X071

Start time of circulating fluid temperature monitor 600 0 to 9 TEMPOUTSTART SEC No.24 circulating fluid temperature monitor is outside of the time range 5 0 to 600 TEMPOUTOVER SEC screen No.25 screen Dust filter replacement time*2 5000 1 to 9 FLTRTIME H No.26 screen DI filter replacement time*1 5000 1 to 9 DITIME H No.27 screen Temperature control speed 0 -10 to 10 CTRLSPEED DI water piping

Ionizer Gun

450 600 750 900 1050 1200 1350 1500 Distance [mm] Distance [mm] 5) 6) Supply pressure 0.4 MPa Consumed flow rate 316 L/min (ANR) Supply pressure 0.5 MPa Consumed flow rate 390 L/min (ANR) 200 200 150 150 2s 1.5s 100 100 50 50 1.5s 1s 0.5s 1s 0.5s 0 0 -50 -50 -100 -100 -150 -150 -200 -200 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 Distance

3 Port Solenoid Valve Metal Seal Series VZ200 1

Without lead wire Nil 6 10 15 20 25 30 300 600 1000 1500 2000 2500 3000 Blue (2) Red (2) Gray (2) 1 2 3 For 100 VAC For 200 VAC Another VAC Molded coil With indicator light (AC) Concave groove Pin Cover 4 Red: +, Black: For DC Varistor Neon bulb Lever DC indicator Note) When ordering a valve with a lead wire of 600 mm or longer, be sure to indicate the model number of the valve without connector

VQ4000

00-A-5 0 0 200 400 600 800 1000 1200 1400 VQ45 (Plug lead type) B ARBQ4000-00-B-5 Flow rate (l/min(ANR)) P ARBQ4000-00-P-5 ARBQ4000-00-P (P B) 0.7 Outlet pressure (MPa) 0.6 SMC 0.5 0.4 0.3 0.2 50 147 0.1 0 0 200 400 600 800 1000 1200 1400 B 2 SMC Flow rate (l/min(ANR)) 12 1 P 5 3 R2 R1 Pressure Characteristics 59 PE 4 A Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate

VZS

Without lead wire Nil 6 10 15 20 25 30 300 600 1 2 3 Blue (2) For 100 VAC For 200 VAC Another VAC 1000 1500 2000 2500 3000 Socket Hook Red (2) Gray (2) 4 Red: +, Black: For DC Note) When ordering a valve in which the length of the wire is more than 600 mm, be sure to indicate the model number of valve without connector and connector assembly. Ex.)

Digital Flow Switches

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 11 For Water Digital Flow Switch Series PF2W Refer to www.smcworld.com for details of products compatible with overseas standards.

PF2A/PF2W

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 16-11-16 13 For details about certified products conforming to international standards, visit us at www.smcworld.com.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(with connector and 2 of sockets only) Rated voltage Lead wire length 5 24 VDC Nil 300 mm 6 12 VDC 6 600 mm Electrical entry V 6 VDC 10 1000 mm Grommet, 300 mm lead wire G S 5 VDC 15 1500 mm Grommet, 600 mm lead wire H R 3 VDC 20 2000 mm L With lead wire 1 100 VAC 50/60 Hz L plug 25 2500 mm LN Without lead wire 2 200 VAC 50/60 Hz connector 30 3000 mm LO Without connector 110 VAC 50/60 Hz

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series MB/CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series MB/CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ7140-02 Cylinder is in extending.

Digital Flow Switches, Series PF2A, Series PF2W

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 11 For Water Digital Flow Switch Series PF2W Refer to www.poweraire.com for details of products compatible with overseas standards.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

Gun Type Ionizer

150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

PFxx-OMU0002

(Displays 0 when the (Displays 0 when the (Displays 0 when the value is below 120 L/min) value is below 240 L/min) value is below 480 L/min) 150 to 3150 L/min 300 to 6300 L/min 600 to 12600 L/min 5.0 0 to 5%F.S.

PFxx-OMY0005

(Page 77) 8200 0x2008 0 R Temperature PD conversion equation: a F32 N 8210 0x2012 0 R Temperature PD conversion equation: b F32 N 8220 0x201C 0 R Flow peak value S16 N 0xFF9C to 0x0258 (-100 to 600) 8230 0x2026 0 R Flow bottom value S16 N 8400 0x20D0 0 R Pressure PD conversion equation: a F32 N Refer to "Inclination and intercept to the unit specification".

Electric Actuator / Slider Type 《 AC Servo Motor 》

PA06 1 262144 (Position control mode) 2000 1200 600 2400 1600 800 3000 2000 1000 Electronic gear denominator *3.