Process Valve

VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Electrical entry: D or DZ only Electrical entry: D or DZ only Coil rated voltage 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 4 Note 1) Manual override 5 6 Note 1) Non-locking push type Nil A Electrical entry CE-compliant G Non-locking push type

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50 MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N 11-9-9 10 Courtesy

CJ5-S

20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41 60 90 30 29 20 71 16 10 26 33 8 M26 x 1.5 100 1/2 23 131 32 110 M12 x 1.75 DBore size (mm) Pivot bracket CD(Shaft) Z ZZ LD LE LF LG LH LL LP LT LV LX LY LZ -X 0.040 0.076 0.040 0.076 0.040 0.076

JXCx-OMT0023

To rotate the servo motor at 3000r/min in the open collector system (200kpulse/s), set the electronic gear as follows. f CMX CDV = N0 60 10 f : Input pulse frequency [pulse/s] N0 : Servo motor speed [r/min] 200 103 CMX CDV = 3000 60 10 CMX CDV = 3000 60 10 200 103 = 3000 10 60 20 = 15 6 4 11 4.

Secondary Batteries

Valve Treatment Material Regulator AR25K to 60K Stem Treatment AR25 to 40: POM AR50, 60: ADC AR25 to 40: POM AR50, 60: ADC ADC Material Bonnet AR25 to 40: AR50, 60: Chromate, black painted AR25 to 40: AR50, 60: Chromate, black painted Chromate, black painted Treatment Steel belt Steel belt Material Steel belt Bracket Electro-deposition painted (Black) Electro-deposition painted (Black)

SL5200

0.41 1.18 (30.0) Delivery pressure (MPa) Delivery pressure (psig) 50 0.34 Max. 3.95 (100.3) 40 0.28 30 0.21 0.44 (11.2) 1.42 (36.1) 20 0.14 10 0.07 0 0.00 1.25 (31.8) A 0 20 40 60 80 100 120 140 Flow rate (slpm, N2) SL5210 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 60 psig (0.41 MPa) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 0.28 40 0.24 35 4 Delivery pressure (MPa) Delivery

CG5-S

, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Basic type Axial foot type Front flange type Double clevis type B L F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L 16 S R 60 H7BAL With Auto Switch With auto switch (built-in magnet) Number of auto switches 2 pcs. 1 pc.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Valve model Pilot valve model Note) VQZ115-L VQ110-M Note) For the special voltages, please consult with SMC. VQZ115-M VQ110-L 4-14-41

70pvvna

100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Nil A B Non-locking push type Non-locking extended type Locking slotted type 1 2 3 4 5 6 7 9 1 2 3 4 5 6 7 9 Electrical entry Grommet Conduit Conduit terminal DIN terminal DIN terminal with indicator light Option G C T Note) D DL Option Option Option Note) When the electrical entry

VNC

Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other VC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Nil S Z None With surge voltage suppressor With light/surge voltage suppressor With indicator light Option VDW L Light/Surge voltage suppressor Nil Z VQ Except 12 VDC, 240 VAC, other voltages

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

50 100V AC Hz 110V AC Hz 200V AC Hz 220V AC Hz Closed center Exhaust center Pressure center 60 50 60 M5 X 0.8: 1.8(0.1) 50 60 (1) AC Push-turnlocking slotted style With light and surge voltage suppressor SYJ5000 Rc(PT)1/8: 4.5(0.25) SYJ7000 Rc(PT)1/8, 1/4: 12.6(0.7) Note 1) All AC voltage models have built-in surge voltage suppressor. 1.2-2 Series SYJ3000/5000/7000 Manifold Variations Manifold

AC Servo Motor Driver (CC-Link Type ）

5.8.3 Battery installation procedure . 5 -60 6.

LEC-OM02704CN

-21 TD-112TD-124 YF-1E-4 YET-60-1 (1)f R60-8 YPT-60-21 TD-113TD-125 YF-1E-4 YET-60-1 g FVD2-4 YNT-1614 h FVD2-M3 j FVD5.5-6 YNT-1210S k FVD5.5-8 l FVD8-6 DH-111DH121 m FVD14-8 DH-112DH122 YF-1E-4 YNE-38 n FVD22-8 DH-113DH123 (1)p R38-8 YPT-60-21 TD-112TD-124 YF-1E-4 YET-60-1 q FVD2-6 YNT-1614 1. 2. 13 16 13 (2) 13.3 1 (2) (1) [mm] [m] [/mm] [/km] d[mm] (3) VSVP 7/0.26( AWG#22)-3P-16823

ChemicalThermo-con

: 95F (35C) Facility water: 95F (35C) 400 400 200 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) HED007 60 80 100 120 140 F 40 1600 Facility water: 50F (10C) Facility water: 77F (25C) Cooling capacity (W) 1200 Facility water: 95F (35C) 800 400 0 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) Heating Capacity

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

SMC Pneumatic Clean Series

MM Relief port FX 20, 25 Eh8 D FZ I 20 to 32 Standard port Relief port Width across flats NA 4-FD 45 1.5 AL 32, 40 A F N K N S + Stroke FT H FY Z + Stroke ZZ + Stroke 40 (mm) 4 7 FD E 20-0.033 0 52 40 40 34 B FX FZ FY G FT 13 8 AL D K MM NA NN B1 B2 Bore size ZZ Z H H2 H1 S P N I F C2 A 66 60 60 60 75 75 75 11 8 8 8 40 32 25 20 24 22 22 18 50 45 45 41 8 8 8 6 6 5 22 17 17 13 41 32 32 26

Rotary Actuator/Vane Type

Current: 4 directions 8 directions Starting point Rotation range CRB2 CRB2 Starting point Rotation range Port surface Starting point CRB1 Port surface Rotation range MSU CRJ 30 30 Port surface CRA1 Port surface Port surface 60 60 Rotation range Starting point CRQ2 MSQ Starting point MSZ Starting point (Single flat) 60 60 CRQ2X MSQX Port surface Rotation range MRQ 30 30 Port surface Rotation

Process Valve

Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Orifice dia.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Urethane rubber 0 to 60 60 Fluoro rubber 0 to 250 50 EPR 20 to 150 The above table covers only general characteristics of subject rubber materials.

Compact Cylinder

10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 55 60 65 70 75 80 85 90 95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110