SFOD-OMT0009CN

10.5 [5m ] L E C P *B* (a) (b) 2 A B-1 L 1 A A-1 (b) 6 A B-1 B B-2 1 1.5m 5 A A-1 B A-2 3 3 3m B B-2 COM-A/COM B-3 4 B A-2 COM-B/A-3 5 5m (c) COM-A/COM B-3 Shield COM-B/ A-3 Vcc B-4 12 GND A-4 13 Vcc B-4 A B-5 7 GND A-4 A A-5 6 A B-5 B B-6 9 A A-5 S B A-6 8 (d) B B-6 3 B A-6 (a) + B-1 4 A-1 5 + B-3 1 2 A-3 (a) (8) (14.2) B1 A1 (b) 2 1 (17.7) (14) (18) (10.2) 6

Table of Contents

Auto Switch Mounted from Direction B 1.

Electric Actuator/Slider Type

1 !5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

SFOD-OMT0010

7 A B-5 Nil Robotic type cable Black 6 A A-5 Orange 9 S Standard cable B B-6 Black 8 B A-6 3 Actuator side Controller side (14.2) (b) 2 1 (8) (a) (14) B A1 (17.7) 6 5 1 (c) 2 1 (18) A6 B6 15 16 L (11) (30.7) 10.4 Actuator cable (8-20m) (a) (b) L E C P Signal name Terminal Cable colour Terminal number number Brown 2 A B-1 Red 1 A A-1 Cable length [L] Orange 6 B B-2 8 8mNote) Yellow 5 B A-2

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W G 1 N.C. (B contact) 2 pcs.

Air Slide Table

A C B B stroke operation 1) Initial state (0 stroke position) B stroke A stroke 2) Operation When the air pressure is supplied from the C port, the rod operates the B stroke.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

_ _ 1 A 346 _ _ 0 B 818 _ _ 1 B 333 _ _ 0 C 750 _ _ 1 C 321 _ _ 0 D 692 _ _ 1 D 310 _ _ 0 E 642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 8 7.

Table of Contents

B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

ti n ti a g g n o a r ti a t e a e o n t t o g o r 1 1 Key e r r y 0 9 y y e 2 0 + 4 0 0 e e K 8 + 4 0 K K 0 + 4 0 + 4 0 0 0 Key Key 1 (40) e Key g n a r n o ti a t o r y e K (85) (40) (40) A port B port A port B port A port B port A port B port Direct Mounting of Body L 4 screws Model CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 L Screw M6 48 M8 52 M8 60 M10 80 11-4-4 70 Series CRB1 Rotary

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

Electric Actuator with Integrated Guide

pc., (B contact) 2 pcs., Proximity switch rail 1 pc.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

Plug-in Unit

2 1(P) port 4-G 1/2 Conduit port VQC SMC SMC SMC SMC SMC SMC SMC SQ 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 90 72 VQ0 13 55.5 42.7 43.5 20.5 VQ4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 33.5 11.5 15.7 12 2-Rc 1/8 (Pilot exhaust port) VQ5 (6.5) 21.5 2-Rc 1/8 (External pilot port) 27 2n-Rc 1/4, 3/8, C8, C10, C12 <4(A), 2(B) port> Rc 1/4: 1/4" Female thread Rc 3/8: 3/8" Female thread C8 : 8 One-touch

VQC

SUP block plate VVQ1000-16A EXH shutoff position When using EXH block base (VVQC1000-19A--C ) Note 1) Port plug Note 2) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B With 3.2 (1/8") One-touch fitting C3 (N1) Side port Fill out in case of mixed sizes (CM/LM/NM).

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Description Bore size Stroke range 12, 16 1 to 29 Stroke range 20, 25 1 to 49 32 to 63 1 to 99 Part no.: CQ2KB50-57D CQ2KB50-75D with 18 mm width spacer inside. B dimension is 115.5 mm.

VQ5000

0 1 0 1 VQ510 A side + A side VQ520 B side + B side A side + A side 0 1 3 4 5 VQ5 0 B side + B side A side + A side .

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

MY1

Applicable cylinder MY1B25 MY1B32 MY1B40 Model MY-J Bore size SMY1B Bore size , #3 (#1 + #3 + #6) B 28 40 44 B 78 88 108 F 96 111 131 C 14 20 22 C 39 44 54 E 1 1 1 E 1 1 1 MY-J25 MY-J32 MY-J40 Note) One set of floating brackets consists of one right piece and one left piece.

ISO Cylinder

set of a, b, c, e) (Screw: Stainless steel) *1 *2 *3 *4 Band mounting Switch bracket (Resin) Transparent (Nylon)1 d e White (PBT) b c Auto switch mounting screw Switch holder (Zinc die-casted) a Auto switch mounting band D-C7l/C80 D-C73C/C80C D-H7l/H7lW D-H7BA/H7NF BJ2-008 (A set of a and b) BJ2-010 (A set of a and b) BJ2-012 (A set of a and b) BJ2-016 (A set of a and b) BM2-020A (A set

VQ7-6/7-8

ISO size 1 Series VQ7-6 ISO size 1 Max. 10 stations 0.43n + 0.49 (n: Stations) 1/4 3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 3-10-11 12 Series VQ7-6 DIN Terminal Type VV71-100 80 100 2n-1/4, 3/8 80 23 37 9 14 9 15 U side U side Manual override R4.5 R4.5 Indicator light P = 43 53.5 P = 43 53.5 B B B B 9 9 B 23 20 SMC SMC SMC 9 A PA A B B A PA