Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Air / Nitrogen, Exhaust Mechanism (Air Bleed): [Included] Relief, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/8, Control Side Connection Type: Rc, Control Side, Connection Diameter: 1/8, Pressure Gauge: [Not Provided] No, Size of Body: 3, Set Pressure: 0.05 to 0.7 MPa, Custom-made Specifications: None, Washing Grade: Grade A, Specification: Gauge port orientation: R

Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/8, Flow Direction: [Right] From Left to Right, Control Side Connection Type: Rc, Control Side, Connection Diameter: 1/8, Pressure Gauge: [Not Provided] No, Set Pressure: 0.005 to 0.2 MPa, Custom-made Specifications: None, Specification: Gauge port orientation: R

Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/8, Flow Direction: [Right] From Left to Right, Control Side Connection Type: Rc, Control Side, Connection Diameter: 1/8, Pressure Gauge: [Not Provided] No, Set Pressure: 0.01 to 0.4 MPa, Custom-made Specifications: None, Specification: Gauge port orientation: R

EXxx-OMO0027

5 6050:01 Channel 0 6050:02 Channel 1 6060:0 (No input data allocation) Slot 6 60A0:0 Diag.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2

Fieldbus system EtherCAT compatible SI Unit

50x2:0 2 Under range error 2 UNSIGNED8 Number of Channels 50x2:01 2 50x2:04 Channel 0 2 Channel 3 Enum081C 0=No error 1=Error 50x3:0 Over upper limit error UNSIGNED8 Number of Channels 50x3:01 50x3:04 Channel 0 Channel 3 Enum081C 0=No error 1=Error 50x4:0 Under lower limit error UNSIGNED8 Number of Channels 50x4:01 50x4:04 Channel 0 Channel 3 Enum081C 0=No error 1=Error 1: x = Unit

VZA2000

VZA4221-01 VZA4321-01 VZA4421-01 VZA4141-1-01 VZA4141-1-02 VZA4141-2-01 VZA4141-2-02 VZA4241-1-01 VZA4241-1-02 VZA4241-2-01 VZA4241-2-02 VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-01 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 Single Double Closed center Exhaust center 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49 0.49 0.47 0.47 0.14 0.14 0.15 0.15 2.0 2.0 1.9

VZA2000

(Value in the initial stage) Base mounted Body ported Model Flow characteristics Pilot port piping location 14/2(PA/B) 4/25/3(A/BEA/EB) Pilot port size Valve model Function Port size b Cv b Cv Single Double Closed center Exhaust center VZA2121-M5 VZA2221-M5 VZA2321-M5 VZA2421-M5 VZA2141-1-01 VZA2141-2-01 VZA2241-1-01 VZA2241-2-01 VZA2341-1-01 VZA2341-2-01 VZA2441-1-01 VZA2441-2-01 0.60 0.60

EXxx-OMU0020CN

Valve diagnostics 1 . 5-4 Valve diagnostics 1 Bit 0 Valve 0, 1 diagnostics 01() 1 Valve 2, 3 diagnostics 01() 2 Valve 4, 5 diagnostics 01() 3 Valve 6, 7 diagnostics 01() 4 Valve 8, 9 diagnostics 01() 5 Valve 10, 11 diagnostics 01() 6 Valve 12, 13 diagnostics 01() 7 Valve 14, 15 diagnostics 01() 5.1.1.4.

JXCx-OMT0005CN

DRV C RESET <> 66 - <>12 1 [] A [a ] (01-103) [] C RESET 2 [SW] A [a ] <> <> (01-144) D RESET SVON <> <> <>(M24V) (01-145) D RESET SVON <> <> <> (01-146) D RESET SVON <> 67 - <> <>(DC24V) D RESET SVON (01-147) <> <> <> (01-148) D RESET SVON <> <> (01-149) D RESET SVON <> <> Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVON ON)

SFOD-OMT0005CN

<> (01-144) D RESET SVON <> <>(M24V) (01-145) RESET SVON D <> <> <> RESET SVON (01-146) D <> -65- <> <>(C24V) RESET SVON (01-147) D <> <> <> (01-148) RESET SVON D <> <> (01-149) D RESET SVON <> () Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVONON) (01-193) E <>ON(SVON ON) <> Output current limit is exceeded set value (

VZA200/400

Rc 1/8 Body side VZA422-P-01 M5 x 0.8 0.53 0.17 2.2 0.49 0.17 2.0 N.O. Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Sub-plate side M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C.

VZA200/400

Rc 1/8 M5 x 0.8 Body side VZA412-P-01 0.53 0.17 2.2 0.49 0.14 2.0 N.C. Rc 1/8 M5 x 0.8 Body side VZA422-P-01 0.53 0.17 2.2 0.49 0.17 2.0 N.O. Rc 1/8 M5 x 0.8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 0.49 0.11 2.2 0.57 0.19 2.4 N.C.

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

Nozzle Type Ionizer

L-bracket IZN10-B1 Pivoting bracket IZN10-B2 Power supply cable length Symbol Type 01 1 m 20 20 m * Available in 1 m increments from 1 m to 20 m.

EXxx-OMW0014CN

1 Valve 2, 3 diagnostics 01 2 Valve 4, 5 diagnostics 01 3 Valve 6, 7 diagnostics 01 4 Valve 8, 9 diagnostics 01 5 Valve 10, 11 diagnostics 01 6 Valve 12, 13 diagnostics 01 7 Valve 14, 15 diagnostics 01 Valve diagnostics 2 . 5-5 Valve diagnostics 2 Bit 0 Valve 16, 17 diagnostics 01 1 Valve 18, 19 diagnostics 01 2 Valve 20, 21 diagnostics 01 3 Valve 22, 23 diagnostics 01 4 Valve 24, 25