V

G H H Flat Flat with rib G ZPR25 U C 25 28 14 29 39.8 57.6 25 83.5 73.5 4 1.8 15 ZPR40 U C 40 43 18.5 32 42.8 60.6 25 86.5 76.5 6.5 3.3 15 ZPR32 U C 32 35 14.5 29.5 40.3 58.1 25 84 74 4.5 2.3 15 ZPR50 U C 50 53 19.5 33 43.8 61.6 25 87.5 77.5 7.5 3.8 15 D E E P T Y P E D E E P T Y P E I: M8X1 I: M6X1 I: M8X1 I: M6X1 Model A B C D E F Y Model A B C D E F Y G H H G G H H G ZPR25D 25 28 20 35

JIS Standard Hydraulic Cylinder

Hs 12 D-G5/K59 D-G5W/K59W D-G5BA D-G59F/G5NT D-B5/B64/B59W 24.5 A A 33 Auto switch G 1/2 (applicable cable O.D 6.8 to 9.6) Approx. Hs D-G39/K39 D-A3 34 56 56 A A 36 49 Auto switch G 1/2 (applicable cable O.D. 6.8 to 11.5) Approx.

SMC Pneumatic Clean Series

G H2 (Rc, NPT, G) Width across flats B2 Relief port M5 x 0.8 (This drawing shows the cases of 20 and 25.)

IIIIIII

P T , 0 079 in. (2mm) O T 0.059 in (1 Smm) T.T, 0 138 in. (3 5mm) -75 PSIG (5 Kgf/cm2) '75 PS|G (5 A B c D E F G 2.24 (571 1.26 (32) 0.94 (241 0.63 {16) 0.31 {8) 0.57 14.51 0.24 {6} A B c D E F G 2.48 (63) 1.50 {38) 0.94 (241 0.63 (16) 0 . 1 6 (4) 0.57 '14.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses NVM120-N01-07 130-N01-08 Panel Mounting F O F 5 0 7 l b s ( 2 3 k s

Process Pump

1/8" 10 PA PB (270) 249 AIR SUP Rc, NPT, G 1/4" FLUID OUT Rc, NPT, G 3/4" 195 166 157 82 110 51 18 FLUID IN Rc, NPT, G 3/4" AIR EXH Rc, NPT, G 1/4" Silencer: AN20-02 (Option) Tube extension: PAF5410P19 P19N P19F 204 10 255 120 4 x 9 (270) 249 43 AIR SUP Rc, NPT, G 1/4" 10 Reset button Air operated reset port Rc, NPT, G 1/8" (19.05) (15.85) FLUID OUT 3/4" tube extension Straight part 40 82

Mechanical Valves Series NVM, NVFM, NVZNI

P T , 0 079 in. (2mm) O T 0.059 in (1 Smm) T.T, 0 138 in. (3 5mm) -75 PSIG (5 Kgf/cm2) '75 PS|G (5 A B c D E F G 2.24 (571 1.26 (32) 0.94 (241 0.63 {16) 0.31 {8) 0.57 14.51 0.24 {6} A B c D E F G 2.48 (63) 1.50 {38) 0.94 (241 0.63 (16) 0 . 1 6 (4) 0.57 '14.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses NVM120-N01-07 130-N01-08 Panel Mounting F O F 5 0 7 l b s ( 2 3 k s

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Auto Switch Guide

Reed switch LED OUT () Terminal no. 2 OUT (+) Terminal no. 1 Resistor Zener diode Weight D-A34A, D-A44A (g) None 112 112 110 D-A33A D-A34A D-A44A Auto switch model Choke coil Reed switch LED Lead wire Terminal no. 1 OUT () Resistor OUT (+) Terminal no. 2 Zener diode Surge absorber Dimensions D-A3A D-A44 G 1/2 Tightening gland (Applicable cable O.D. 6.8 to 9.6) Tightening gland G 1/2 (Applicable

Mist Separator Regulator

Piping port thread ty pe Rc Rc G AD38-2-A AD38-D G NPT AD38N-2(Z)-A NPT AD38N(-Z)-D Appearance and part No. Semi-standard: 6 Piping port thread ty pe (9) Part No. Rc AD38-6-A G NPT AD38N-6(Z)-A D Note 1) Option symbol 8 Semi-standard symbol Semi-standard: 8 Piping port thread ty pe (9) Part No. Rc AD38-8-A G NPT AD38N-8(Z)-A Appearance and part No.

Ｍ icro Mist Separator Regulator

Rc G Rc G C2SF-6-A C2SF-6C-A NPT C2SF-6(Z)-A NPT C2SF-6C(Z)-A Option symbol Semi-standard symbol J 6J CJ 6CJ Semi-standard: CJ Semi-standard: J Piping port thread ty pe Piping port thread ty pe (9) Part No. (9) Part No. Rc C2SF-CJ-D G C2SFF-CJ-D NPT C2SFN-CJ(Z)-D Rc C2SF-J-D G C2SFF-J-D NPT C2SFN-J(Z)-D Appearance and part No.

10

The seal kit includes a grease pack (10 g for 32 to 50, 20 g for 63 and 80, 30 g for 100 and 125). Order with the following part number when only the grease pack is needed.

VQZ1000/2000/3000

Inch sizes of One-touch fittings and NPT, NPTF and G thread are available.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Add 1 g for AC. ( ): Without sub-plate. 604 3 Port Pilot Solenoid Valve 10-SYJ300 Note) CE-compliant: For DC only.

SV

Interface Regulator Caution Specifications SV100-SV1000 SV2000-SV2000 SV3000-SV3000 SV4000-SV4000 P, A, B 0.1 to 0.7 MPa 0.7 MPa Air Maximum at 50C 38.4 g (43.4 g) 32 g (37 g) 86.5 g 80.3 g 103.8 g 97.6 g 178.2 g 171.8 g Interface regulator Applicable model Regulating port Set pressure range Maximum operating pressure Fluid Ambient and fluid temp.

Stopper Cylinder

flats K M H + Stroke Workpiece transfer direction 2 x P (Rc, NPT, G) F 32 40 50 Stroke Q Z RSQB -DKZ (Double acting) Bore size: 32, 40, 50 J Workpiece transfer direction 2 x P (Rc, NPT, G) F G Stroke Q Z T 0 0.1 J D M E G Workpiece transfer direction 2 x P (Rc, NPT, G) F Width across flats K A + 2 stroke B + Stroke V H + Stroke T 0 0.1 D M E Stroke Q Z E M 4 x N through 8 x O counterbore

5 Port Solenoid Valve SY Series

, (H): SY3120(-F2) G H C4, N3 C6, N7 Foot bracket SY3120-F1 G H C4, N3 C6, N7 9.5 (For mounting bracket) 2-M3 x 0.5 depth 3.5 38 31 4 13.1 1.2 11.6 17 24 + G: Approx. 300 H: Approx. 600 (For mounting) 23.2 66.9 [69.1] 28.5 [35.5] (Lead wire length) 44.7 25 8.6 B A 10.2 Manual override 22.2 (For manifold mounting) 21.4 One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 6, 1/4"

C95

L8 VD VA WA WB WH ZZ ZY L2 L9 22 24 32 32 40 40 30 35 40 45 45 55 12 16 20 20 25 30 G 1/8 G 1/4 G 1/4 G 3/8 G 3/8 G 1/2 13 14 15.5 16.5 19 19 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6.5 8 8 10 10 M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 M20 x 1.5 M20 x 1.5 10 13 16 16 21 21 27 27 31.5 31.5 38 38 16 16 16 16 16 16 94 105 106 121 128 138 4 4 6 6 8 8 4 4 4 4 4 4 4 4 5 9 11.5

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

EtherNet/IP is a trademark of ODVA. 574 Gateway Unit LEC-G Series Wiring Example Power supply plug for LEC-G: LEC-D-1-1 * Power supply plug is an accessory.

REA/REB

-X 20Stop Data 10-2-11 11 Series REA Dimensions REA25/32/40 Effective thread depth J L 0 0.1 B NN G 4-MM H G 2-port size X D I NB NB T N K W N S + Stroke F NA F R ZZ + Stroke (mm) B D F G H I K L MM x J N NA NB NN Model Port size REA25 REA32 REA40 Rc 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15 M26 x 1.5 Rc 1/4 70 43 16

NCA1

Note) Lead wire length symbols: 0.5 m Nil (Example) A53 3 m L (Example) A53L 5 m Z (Example) A53Z CS1 C76 C85 C95 CP95 NCM NCA D-X 20Data 6-15-7 7 Series NCA1 Basic Style: NCA1B (MX0 mounting style) ZB + Stroke P + Stroke D across flats 4-DD 2-EE (NPTF) AA KK EA MM BA B A C R WF G J E LF + Stroke Bore size (in) MM KK A AA B BA C D DD E EA EE G J R WF Y LF P ZB 150 (1.5") 5/8 7/16-20 3/