Special Applications: 21-AR (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 20, Reverse Flow: No, Thread: N (NPT), Port Size: 01 [1/8 (Size 20)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: Z (Nameplate/Caution Plate for Bowl in Imperial Units )

Body Size: 20, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 01 (1/8), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting

Body Size: 20, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 02 (1/4), Options: H (w/Set Nut, for Panel Mount), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting)

Body Size: 20, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 01 (1/8), Options: H (w/Set Nut, for Panel Mount), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting)

Body Size: 20, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 02 (1/4), Options: B (w/Bracket), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting)

Body Size: 20, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 01 (1/8), Options: GH (G+H), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting)

Size: 20 (1/8), Port Size: 02 (1/4, Size 20), Accessories: None, Handle Orientation: Handle Down

Body Size: 20, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 01 (1/8), Options: BG (B+G), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting)

Body Size: 20, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 01 (1/8), Options: BE (B+E), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting)

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

(Piping port) (Opposite side: Same) -X 3 208 6 Data 22.5 11 Z (10 + 1/2 ST) (13) 4 (mm) Z S SS ZZ Stroke Model CXS6-10 CXS6-20 CXS6-30 CXS6-40 CXS6-50 68.5 10 15 23 55 78.5 20 20 33 65 88.5 30 25 43 75 98.5 40 30 53 85 108.5 50 35 63 95 8-29-7 8 Series CXS Dimensions: 10, 15 ZZ Stroke SS 9 J D B M Y (Hexagon socket head set screw) L Z I 1 1 G0.2 (G) A P H 6.3 5 X (Hexagon socket head cap

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

1011Axial Foot (L): CG1WL 1011With rubber bumper 15 LH B LT LT 4 x LD LZ LX 2 x LC (Knock pin position) M X W Y Y X W ZZ + S Stroke LS + Stroke Z (mm) 4 4 4 4 LC 7 7 6 6 LD 30 25 22 20 LH 3 3 3 3 LT 16.5 16 15 15 X 8.5 8 7 7 Y 4 3.5 3.5 3 M B 60 69 69 69 LS 54 44 36 32 LX 187 175 173 163 ZZ 10 10 10 10 W 71 58 49 44 LZ Z Bore size 63.5 53 52 47 38.5 34 40 32 25 20 54.5 45 10 12 55 74 4.5

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Stainless steel Body, Base material Coil insulation type Nil T F N Rc NPTF G NPT 10 stations S Q Suffix H PTFE Nil Z All IN ports are Rc 3/8.

Rotary Actuator

Grease pack part number: GR-S-010 (10 g) 201 Rotary Actuator with Solenoid Valve CVRA1 Series Rack & Pinion Type/Size: 50, 63, 80, 100 RoHS How to Order CVRA1 B 1 S 1 50 90 Z G With auto switch CDVRA1 B S 50 90 M9BW Z 1 1 G q w e r t Built-in magnet Auto switch With solenoid valve Nil Without auto switch (Built-in magnet) Mounting B Basic type L Foot type * For applicable auto switch model

Slider Type Ball Screw Drive/11-LEFS Series

LEFS16/Ball Screw Drive Horizontal Vertical 16 6 14 Lead B Lead B 12 Work load: W [kg] Work load: W [kg] 4 10 Lead A 8 Lead A 6 2 4 2 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 700 800 Speed: V [mm/s] Speed: V [mm/s] LEFS25/Ball Screw Drive Horizontal Vertical 20 30 Lead B 25 15 Work load: W [kg] Work load: W [kg] Lead B 20 10 15 Lead A Lead A 10 5 Lead H Lead H 5 0 0 0 100 200

V

O D Y S I Z E T U B E S I Z E OD M M 04 4 06 6 08 8 10 10 05 3/16 07 1/4 11 3/8 13 1/2 100 Max 20 ln/min 200 Max 50 ln/min 300 Max 75 ln/min 101 Max 20 ln/min 201 Max 30 ln/min 301 Max 60 ln/min 401 Max100ln/min Courtesy of Steven Engineering, Inc. !

CNA

DL DD DA DU DC DX DE DO DR DT DS DH DF B W1 Z A B A + B + 90 CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 +0.058 0 11 57 35 65 15 85 10 9 17 8 40 52 60 10 234 10 +0.070 0 11 12 57 35 65 18 85 10 9 17 8 40 52 70 10 261 +0.070 0 13.5 12 60 162 67 40 80 25 105 12.5 11 22 10 50 66 85 10 280 16 +0.084 0 16.5 93 60 100 31.5 130 15 13.5 24 12 65 90 102 12 337 20 +0.084 0 16.5 93 60 100 35.5 130 15 13.5

CNA

DL DD DA DU DC DX DE DO DR DT DS DH DF B W1 Z A B A + B + 90 CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 +0.058 0 11 57 35 65 15 85 10 9 17 8 40 52 60 10 234 10 +0.070 0 11 57 35 65 18 85 10 9 17 8 40 52 70 10 261 12 +0.070 0 13.5 12 60 162 67 40 80 25 105 12.5 11 22 10 50 66 85 10 280 16 +0.084 0 16.5 20 93 60 100 31.5 130 15 13.5 24 12 65 90 102 12 337 +0.084 0 16.5 93 60 100 35.5 130 15 13.5

MXQ

NA-M5 x 0.8 thread depth 6.5 10 M 21 KA Bottom view of MXQ6-30 10 5.5 21 K 13 35 45 10 5.5 33.7 0.3 5.5 37 Z ZZ (NN 1) x H G H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 9.5 24 5H9 depth 5 +0.030 0 1 NN-M6 x 1 thread depth 12 6 B A 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2

Cylinder with Lock

D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-F5m D-J59 D-F59F D-F5NT D-A5m D-A6m D-A59W D-G39 D-K39 D-A3m D-A44 D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B 32 10 8 6 4 6.5 4.5 11.5 9.5 0 0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 63 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4

VZS

Flow Characteristics at the Number of Manifold Stations (Operated single/double type individually) Passage/Stations Station 1 Station 5 Station 10 Station 15 Station 20 2.7 0.15 0.62 2.8 0.10 0.65 C [dm3/(sbar)] b Cv 2.7 0.16 0.61 2.8 0.12 0.66 2.7 0.16 0.61 2.9 0.12 0.66 2.7 0.15 0.61 2.9 0.12 0.66 2.6 0.20 0.63 2.9 0.12 0.66 1 4/2 (P A/B) C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Manifold