MHL2

+0 052 0 Depth 1.5 M5 X 0.8 (Finger closing port) M5 X 0.8 (Finger opening port) Auto switch mounting groove (4 locations) G 65 28.2 4-M6 X 1 H (Piston rod and rack screw) 6.5 1 11 15 10 24 14 Width across flats 10 20 46 24 (4 locations) A (70) 30 24 24 10 30 12.5 12.5 Closed E 54 Open F 17 17 4-M6 X 1 through (Thread for mounting attachment) A B C D E F G H 54 96 116 J 120 195 235 Model

Lightweight and Compact

Applicable model Minimum operating flow rate (50/60 Hz) [L/min] HRS-BP005 HRS090-ll-20/40 29/45 To circulating fluid return port r t r e q To circulating fluid outlet r t w r Parts List No.

Compact Cylinder with Air Cushion Series RQ

30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 9 8 9.5 13.5 10 3 Compact Cylinder with Air Cushion Double Acting: Single Rod Series RQ Auto Switch Mounting Bracket Part Nos.

IR1000/2000/3000

5 P36202026 1.5 x 1.5 4.5 x 1 JIS B 2401 P11 P36202018 P36202009 P36203010 4.5 x 1 27.8 x 1.5 JIS B 2401 P5 JIS B 2401 P16 P36203015 P36203016 P36203017 P36201021 2.5 x 1 10 x 1.3 P36202018 KT-IR1000 KT-IR1010 P36202026 1.5 x 1.5 4.5 x 1 JISB2401 P11 P36202018 P36203009 P36203010 4.5 x 1 27.8 x 1.5 JIS B 2401 P5 JIS B 2401 P16 P36203015 P36203016 P36203017 Valve Valve Damper O-ring

RZQ

If a moment or torque directly acts on the cylinder, it will lead to reduced service life or damage to machinery. 10-10-8 9 3 Position Cylinder Series RZQ Construction u i @2 r !0 y q w !9 e @1 @4 !3 RE A B @0 REC !2 CX @3 !

reduces flow setting time

Series Construction: Universal Type Seal method: Gasket seal For M5, 10-32UNF Seal method: Sealant For R, NPT thread r !

Industrial Filters

C Model FGESA FGESB FGESC Port size R Model FGELA FGELB FGELC Port size R Model FGETA FGETB FGETC Port size R 671 850 671 850 366 612 910 1, 2 1, 2 1, 2 554 554 931 1350 931 1325 516 871 1225 1191 1860 1191 1825 647 1133 1620 31 Industrial Filter FGG Series How to Order FGG S B 20 B N 002 A G1 Symbol Option Pressure gauge type G46-10-02M (Brass at wetted parts) Material G1 G2 Nil O-ring

3 Port Solenoid Valve Metal Seal Series VZ200 1

Cv C[dm2/(sbar)] b Cv Flow characteristics 1 2 (P A) 2 3 (A R) Body ported Max. operating frequency (c/s) (AC/DC) (1) 15 21/21 or less 0.125 15 21/21 or less 0.250 Response time (ms) (AC/DC) (2) Weight (kg) (3) Note 1) Minimum operating frequency: As per JIS B 8373 (Once in 30 days) Note 2) Based on JIS B 8375-1981 (Supply pressure; 0.5 MPa; without surge voltage suppressor) Note 3) Value

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10 V.

A

The pressure difference generated at this time opens check valve and the residual pressure on the A port side is quickly exhausted from R port. 2 1(P) OFF 2(A) 1 3(R) 3 Soft Start-up Valve AV2000/3000/4000/5000 Construction B ON OFF B-B 1(P) 2(A) B 3(R) Parts list No. 1 2 3 Description Material Body Cap Cover ADC ADC ADC Replacement parts Description No. Part no.

LG1H

Bottom Mount LG1H20/ Without coupling LG1H21/ With coupling 95() 95(160) A() B() 95() 95(170) A() B() 10 95(140) 95(150) 10 30 30 A A B B A B B A Stroke Stroke Stroke Stroke 700 570 700 580 655 100 645 100 800 670 800 680 155 755 200 80 745 145 200 70 900 770 900 780 855 255 300 180 245 845 300 170 1000 870 1000 880 355 955 400 280 945 345 400 270 1200 1070 1200 1080 1155 455 500 380

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Flow Rate Characteristics/Weight Flow rate characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Grommet Valve model C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 0.58 kg (For AC) 0.63 kg (For DC) VO325 4.1 0.24 1.0 4.4 0.18 1.0 4.5 0.15 1.0 4.3 0.23 1.0 VO325V (Vacuum spec. type) Precautions Changing from N.C. to N.O.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

A 9.5 11 11 1.5 30 5.1 B A 11.5 29 11.5 29 H G (NN 1) x H Section AA Section BB (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 44 G

Magnetically Coupled Rodless Cylinder

Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

: Universal Type Seal method: Gasket seal For M5, 10-32UNF Seal method: Sealant For R, NPT thread r !

3 Port Solenoid Valve Rubber Seal Series SY100 1

For driving air operated valves for fluid control N.C N.O N.C N.C Air operated style fluid control valve Vacuum valve Vacuum pad A, B 1(P) A, B 1(P) A, B 1(P) A, B 3(P) 3(R) 3(R) 3(R) 1(R) Vacuum releasing air Atmospheric pressure or micro pressure The characteristic values shown in the catalog are representative values, not warranting the performance. 4-3-1 2 Series SY100 Precautions Be

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

r t . : . , t . : r r l ' r i . r t , : t r ' r r r , . a a . . r . r . , r r , , .

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

0 0 0 1.5 4 A 2 2 2 7.5 10 B 2 2 2 5.5 8 A 4.5 4.5 4.5 10 12.5 B 9.5 9.5 9.5 13 15.5 Hs 116 124 134.5 144 154 Hs 126 134 144.5 154 164 Hs 75.5 81 89 97 107 Ht 69.5 76.5 87.5 97.5 108 Hs 74.5 80 88 96 107.5 Ht 70 76.5 87.5 97.5 108 B 9.5 9.5 9.5 15 17.5 B 4.5 4.5 4.5 8 10.5 Operating Range D-Z7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL Auto switch model Bore size (

Mechanical Valves Series NVM, NVFM, NVZNI

P T 0 .138 in. (3 5mm) r \ T 0 079 in (2mm) T T . 0 217 in. (5 5mm) F O F 6 61 lbs (3kg) P T 0 138 in (3 5 mm) O T 0 079 in (2 mm) T T 0 217 (5 5 mm) A B c D E F G 4 . 1 1 104.5' 2.O3 t51.51 1.32 i33.51 0.91 (23l o.47 fi21 0.81 (20,s'l 0.39 (10) A B c D E F G 4.29 (10e) 2.20 (56) 1.32 :33.5) 0.91 t23\ o.24 (6) 0.81 r20.5) 0.39 (10) in Parentheses Millimeters in NVM430-N01-07 Panel Mounting

IIIIIII

P T 0 .138 in. (3 5mm) r \ T 0 079 in (2mm) T T . 0 217 in. (5 5mm) F O F 6 61 lbs (3kg) P T 0 138 in (3 5 mm) O T 0 079 in (2 mm) T T 0 217 (5 5 mm) A B c D E F G 4 . 1 1 104.5' 2.O3 t51.51 1.32 i33.51 0.91 (23l o.47 fi21 0.81 (20,s'l 0.39 (10) A B c D E F G 4.29 (10e) 2.20 (56) 1.32 :33.5) 0.91 t23\ o.24 (6) 0.81 r20.5) 0.39 (10) in Parentheses Millimeters in NVM430-N01-07 Panel Mounting